1. A machine tool for machining a workpiece having a first end, an opposing second end, and a central axis, wherein a face of the workpiece at said first end is transverse to said central axis, said machine tool comprising:
a tool holder for holding a tool;
a work table device, the work table device including:
a cradle that is pivotably supported, at two opposite ends thereof that are spaced along a cradle pivot axis, for being pivoted about the cradle pivot axis, the cradle having the following mounted thereto to be pivoted about the cradle pivot axis:
a work support for engaging and supporting the workpiece on said first end;
a work mounting for engaging the workpiece on said second end; and
a drive means for rotating the workpiece and work support about a rotational axis of the machine tool that is transverse with respect to the cradle pivot axis;
wherein said work support comprises a work rest surface perpendicular to said rotational axis and a central region centered about said rotational axis, which central region is recessed relative to said work rest surface such that said work rest surface surrounds said recessed central region and is configured to support the workpiece on said first end about a marginal region radially spaced from said central axis when said central axis is aligned with said rotational axis;
wherein the work support further comprises first means arranged in said recessed central region for aligning the central axis of the workpiece with the rotational axis of the machine tool, which first means engage the first end of the workpiece; and
wherein the work mounting further comprises a counter-holder movable in the direction of the rotational axis for applying a contact pressure, acting in the direction of the rotational axis, onto the second end of the workpiece, which counter-holder is mounted to the cradle so as to be pivotable relative to the cradle about an axis that is transverse with respect to the cradle pivot axis between a position wherein the workpiece can be loaded to and unloaded from the work support, and a position wherein the counter-holder applies the contact pressure.
2. The machine tool of claim 1, wherein the work rest surface is configured in such a way that, when the contact pressure is applied to the workpiece by the counter-holder, the first end of the workpiece rests against said work rest surface.
3. The machine tool of claim 2, wherein said work mounting further comprises second means on said second end of the workpiece for engaging the second end of the workpiece and aligning the central axis of the workpiece with said rotational axis.
4. The machine tool of claim 2, wherein the workpiece has a central bore extending along said central axis from said first end to said second end, and said first means comprises a first arbor extending along said rotational axis that is configured to project into said central bore on said first side of the workpiece to align said central axis with said rotational axis.
5. The machine tool of claim 4, wherein said first end of the workpiece between said marginal region and said central bore is unsupported by said work support.
6. The machine tool of claim 4, wherein said first arbor projects from said recessed central region of said work support, and further wherein said work rest surface surrounds said first arbor.
7. The machine tool of claim 6, wherein said central bore of the workpiece has a predetermined diameter and said first arbor is tapered and has at least one section that is oversized relative to the diameter of said central bore.
8. The machine of claim 7, wherein the counter-holder has a second arbor that is tapered and configured to project into the central bore of the workpiece on said second end, and further has at least one section that is oversized relative to the diameter of said central bore.
9. The machine tool of claim 1, wherein the pivot axis about which the counter-holder pivots relative to the cradle is parallel to the rotational axis.
10. The machine tool of claim 1, wherein the tool is a milling tool.
11. A machine tool for machining a workpiece having a first end, an opposing second end, and a central bore that extends along a central bore axis from the first end to the second end, wherein the central bore axis is transverse to faces of the workpiece that are located at the first end and the second end, respectively, said machine tool comprising:
a tool holder for holding a tool;
a work table device, the work table device including:
a cradle that is pivotably supported, at two opposite ends thereof that are spaced along a cradle pivot axis, for being pivoted about the cradle pivot axis, the cradle having the following mounted thereto to be pivoted about the cradle pivot axis:
a work support;
a work mounting; and
a drive means for rotating the work support about a rotational axis of the machine tool that is transverse with respect to the cradle pivot axis;
wherein the work support comprises a central region centered about said rotational axis and a work rest surface that surrounds the central region and is configured to support the workpiece on the first end at a marginal region of the workpiece;
wherein the work support further comprises an arbor centered about said rotational axis, which arbor protrudes from the central region of the work support, such that a section of the arbor projects into the central bore on the first end of the workpiece to align the central bore axis with said rotational axis when the workpiece is attached to the arbor;
wherein the work mounting has a counter-holder movable in the direction of the rotational axis for applying a contact pressure, acting in the direction of the rotational axis, onto the second end of the workpiece, such that the workpiece rotates with said work support, and which counter-holder is mounted to the cradle so as to be pivotable relative to the cradle about an axis that is transverse with respect to the cradle pivot axis between a position wherein the workpiece can be loaded to and unloaded from the work support, and a position wherein the counter-holder applies the contact pressure; and
wherein the central region is recessed relative to the work rest surface of the work support such that, in the state in which the workpiece is attached to the arbor and contact pressure is applied to the workpiece by the counter-holder, the first end of the workpiece rests only against the arbor and the work rest surface of the work support.
12. The machine tool of claim 11, wherein the work rest surface is spaced from said arbor in a radial direction with respect to said rotational axis.
13. The machine tool of claim 12, wherein said first end of the workpiece between said marginal region and said central bore is unsupported by said work support.
14. The machine tool of claim 13, wherein said central bore of the workpiece has a predetermined diameter and said arbor is tapered and has at least one section that is oversized relative to the diameter of said central bore.
15. The machine tool of claim 14, wherein the arbor of the work support is a first arbor, and wherein the counter-holder has a second arbor that is tapered and configured to project into the central bore of the workpiece on said second end of the workpiece and has at least one section that is oversized relative to the diameter of said central bore.
16. A machine tool for machining a workpiece having a first end, an opposing second end, and a central axis, wherein a face of the workpiece at said first end is transverse to said central axis, said machine tool comprising:
a tool holder for holding a tool;
a work table device, the work table device including:
a cradle that is pivotably supported, at two opposite ends thereof that are spaced along a cradle pivot axis, for being pivoted about the cradle pivot axis, the cradle having the following mounted thereto to be pivoted about the cradle pivot axis:
a work support for engaging and supporting the workpiece on said first end;
a work mounting for engaging the workpiece on said second end; and
a drive means for rotating the workpiece and work support about a rotational axis of the machine tool that is transverse with respect to the cradle pivot axis;
wherein said work support comprises an arbor and a work rest surface, which work rest surface is transverse to the rotational axis, wherein said arbor extends along said rotational axis and is configured to engage the workpiece on the first end and to center the central axis of the workpiece relative to said rotational axis, and further wherein said arbor projects from a central region of said work support that is recessed relative to said work rest surface, such that said work rest surface is spaced radially outward from said arbor with respect to the rotational axis, and the work rest surface supports the workpiece in a marginal region of said first end, which marginal region is radially spaced from said central axis; and
the work mounting having a counter-holder movable along the rotational axis and configured to apply a contact pressure, acting along the rotational axis, onto the second end of the workpiece, which counter-holder is mounted to the cradle so as to be pivotable relative to the cradle about an axis that is transverse with respect to the cradle pivot axis between a position wherein the workpiece can be loaded to and unloaded from the work support, and a position where the counter-holder applies the contact pressure;
wherein the machine tool is configured to clamp the workpiece by contacting it only at the work rest surface, the arbor and the counter-holder.
17. The machine tool of claim 16, wherein the arbor projects into a central bore of the workpiece that extends along the central axis.
18. The machine tool of claim 17, wherein said work mounting further comprises a second arbor configured to project into the central bore of the workpiece on the second end.
19. The machine tool of claim 17, wherein said first end of the workpiece between said marginal region and said central bore is unsupported by said work support.
20. A machine tool for machining a workpiece having a first end, an opposing second end, and a central axis, wherein a face of the workpiece at said first end is transverse to said central axis, said machine tool comprising:
a tool holder for holding a tool;
a work table device, the work table device including:
a cradle that is pivotably supported, at two opposite ends thereof that are spaced along a cradle pivot axis, for being pivoted about the cradle pivot axis, the cradle having the following mounted thereto to be pivoted about the cradle pivot axis:
a work support for engaging and supporting the workpiece on said first end;
a work mounting for engaging the workpiece on said second end; and
a drive means for rotating the workpiece and work support about a rotational axis of the machine tool that is transverse with respect to the cradle pivot axis;
wherein the work mounting further comprises a counter-holder movable in the direction of the rotational axis for applying a contact pressure, acting in the direction of the rotational axis, onto the second end of the workpiece, which counter-holder is mounted to the cradle so as to be pivotable relative to the cradle about an axis that is transverse with respect to the cradle pivot axis between a position wherein the workpiece can be loaded to and unloaded from the work support, and a position wherein the counter-holder applies the contact pressure.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An exposure apparatus which exposes a substrate by radiating an exposure light beam onto the substrate through a pattern and a liquid, the exposure apparatus comprising:
a projection system by which an image of the pattern is projected onto the substrate through the liquid;
a movable member which is movable relative to the projection system; and
a liquid-repellent, member, at least a part of a surface of which is liquid-repellent for the liquid, being detachably provided at the movable member, wherein
the liquid-repellent member includes a first wall portion, a second wall portion disposed inside the first wall portion and a supporting portion surrounded by the second wall portion,
the supporting portion supports an underside surface of the substrate,
a top surface of the first wall portion and a top surface of the second wall portion face the underside surface of the substrate respectively, and
at least one of the top surfaces of the first wall portion and the second wall portion is liquid-repellent.
2. The exposure apparatus according to claim 1, wherein the movable member includes a channel connected to a space between the first wall portion and the second wall portion, and a pressure of the space is adjusted via the channel.
3. The exposure apparatus according to claim 2, wherein the channel is connected to a device which has a sucking function.
4. The exposure apparatus according to claim 2, wherein the channel is connected to a fluid supply source.
5. The exposure apparatus according to claim 4, wherein the fluid supply source is ambient air.
6. The exposure apparatus according to claim 4, wherein the fluid supply source is a gas supply device.
7. The exposure apparatus according to claim 1, wherein the movable member includes a channel connected to a space between the first wall portion and the second wall portion, and the liquid penetrated into the space is recovered via the channel.
8. A device manufacturing method comprising:
exposing a substrate by an exposure apparatus according to claim 1.