1. An optical element, comprising:
a layer of material at least partially transmissive for EUV radiation with a wavelength \u03bb in the range of 5-20 nm, the layer of material including a material selected from the group consisting of Be, B, C, Si, P, S, K, Ca, Sc, Br, Rb, Sr, Y, Zr, Nb, Mo, Ru, Rh, Ag, Ba, La, Ce, Pr, Pa, U, and combinations thereof; and
a top layer of material including a structure having an rms roughness value, wherein transmission through the top layer is at least 30% for EUV radiation with the wavelength \u03bb in the range of 5-20 nm, and the rms roughness value is equal to or larger than \u03bb10 for spatial periods equal to or smaller than \u03bb2, the top layer of material including a material selected from the group consisting of Be, B, C, Si, P, S, K, Ca, Sc, Br, Rb, Sr, Y, Zr, Nb, Mo, Ru, Rh, Ag, Ba, La, Ce, Pr, Ir, Au, Pa, U, and combinations thereof.
2. An optical element according to claim 1, wherein the rms roughness is equal to or smaller than \u03bb for spatial periods larger than \u03bb2 and equal to or smaller than 1 \u03bcm.
3. An optical element according to claim 1, wherein the at least partially transmissive layer includes a surface with a structure with an rms roughness value equal to or larger than \u03bb50 and equal to or smaller than 4*\u03bb for spatial periods equal to or smaller than \u03bb2.
4. An optical element according to claim 1, wherein the top layer and the structure include Ru.
5. An optical element according claim 1, wherein the optical element includes a minor having a mirror surface, the mirror surface includes a protrusion transmissive for EUV radiation with the wavelength \u03bb in the range of 5-20 nm, and at least part of the mirror surface further includes the top layer including the structure.
6. An optical element according to claim 1, further comprising:
a profile having height differences, thereby providing cavities and elevations having a predetermined maximum height difference; and
a substantially transmissive layer in the cavities and on the elevations of the optical element, wherein the substantially transmissive layer has a planar surface on which the top layer and structure are provided.
7. An optical element according to claim 1, wherein the rms roughness value of the top layer is 2 nm or larger for spatial periods equal to or smaller than \u03bb2.
8. An optical element according to claim 1, wherein the optical element include’s optical filters, optical gratings, mirrors or lenses.
9. An optical element according to claim 1, wherein the optical element includes a mirror with a mirror surface and a tilted multilayer stack which is tilted with respect to the mirror surface.
10. An optical element according to claim 1, wherein the layer of material at least partially transmissive for EUV radiation includes Si.
11. An optical element according to claim 10, wherein the top layer of material includes Ru.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A cross connecting device suitable for connecting first and second spinal fixation devices, the cross connecting device comprising:
a fixable pivot junction, the pivot junction comprising a collar and a pivotable joint that is pivotable about a pivot point, the collar being configured for fixating the pivot junction;
first and second connection members connected by the fixable pivot junction such that the fixable pivot junction allows the first and second connection members to be repositioned relative to each other; and
first and second clamps connected to respective ones of the first and second connection members at distal ends of the connection members relative to the fixable pivot junction.
2. The cross connecting device of claim 1, wherein the collar is slidable between an unlocking position and a locking position.
3. The cross connecting device of claim 2, wherein the locking position is closer to a pivot point of the pivotable joint than the unlocking position.
4. The cross connecting device of claim 2, wherein the pivotable joint comprises a tapered interface and a split pivot element.
5. The cross connecting device of claim 4, wherein the tapered interface is connected to the first connection member.
6. The cross connecting device of claim 4, wherein the tapered interface is configured for applying a compressive load to the split pivot element and the second connection member while the slidable collar is in the locking position.
7. The cross connecting device of claim 4, wherein the tapered interface comprises plurality of slits surrounding the split pivot element.
8. The cross connecting device of claim 2, wherein the collar further comprises one or more tabs for preventing the movement of the collar from the locking position to the unlocking position.
9. The cross connecting device of claim 1, wherein the first and second clamps are configured to be connected to respective ones of the first and second spinal fixation devices.
10. The cross connecting device of claim 9, wherein each of the first and second clamps includes a respective locking member that can be adjusted to tighten the respective clamp onto the respective spinal fixation device.
11. The cross connecting device of claim 10, wherein the clamps each include a socket for receiving a respective one of the set screws, where the socket includes a top hole and a bottom hole, the bottom hole being misaligned with the top hole.
12. The cross connecting device of claim 11, wherein each of the set screws includes a tapered end, wherein the tapered end of the set screw can pass through the misaligned bottom hole as the set screw is driven into the socket, thereby urging the misaligned bottom hole to align with the top hole as the set screw is driven into the socket.
13. The cross connecting device of claim 11, wherein the clamp tightens onto the respective spinal fixation device as the misaligned bottom hole is aligned with the top hole by the set screw.
14. The cross connecting device of claim 1, wherein the clamps each include an outer housing and an inner housing.
15. The cross connecting device of claim 14, wherein the outer housing and the inner housing are rotationally or angularly adjustable relative to each other.
16. The cross connecting device of claim 15, wherein the outer housing and the inner housing are rotationally and angularly adjustable relative to each other along at least two degrees of freedom.
17. The cross connecting device of claim 14, wherein the outer housing includes channel that allows for expansion and compression of the outer housing.
18. The cross connecting device of claim 17, wherein the channel includes a transverse channel region.
19. The cross connecting device of claim 14, wherein the inner housing includes an channel that allows for expansion and compression of the inner housing.
20. The cross connecting device of claim 1, wherein the fixable pivot junction allows the first and second connection members to be translationally, rotationally, and angularly repositioned relative to each other.
21. A fixable pivot junction for connecting first and second connection members of a cross connecting device, the cross connecting device being suitable for connecting first and second spinal fixation devices, the fixable pivot junction comprising:
a collar slidable between an unlocking position and a locking position; and
a pivotable joint that is pivotable about a pivot point, the collar being configured for fixating the pivot junction while the collar is in the locking position,
wherein the pivotable joint comprises:
a tapered interface connected to the first connection member; and
a split pivot element being configured for receiving the second connection member.
22. The fixable pivot junction of claim 21, wherein the locking position is closer to a pivot point of the pivotable joint than the unlocking position.
23. The fixable pivot junction of claim 21, wherein the tapered interface is configured for applying a compressive load to the split pivot element and the second connection member while the slidable collar is in the locking position.
24. The fixable pivot junction of claim 21, wherein the tapered interface comprises plurality of slits surrounding the split pivot element.
25. The fixable pivot junction of claim 21, wherein the collar further comprises one or more tabs for preventing the movement of the collar from the locking position to the unlocking position.
26. The fixable pivot junction of claim 21, wherein the fixable pivot junction allows the first and second connection members to be translationally, rotationally, and angularly repositioned relative to each other.