1. A preventive maintenance hood disposed on a reaction chamber of a semiconductor machine and connected to an exhaust pipe, comprising:
a hood body including a first opening and a second opening, the first opening located at a bottom of the hood body and covering an exit of the reaction chamber, the second opening located on a sidewall of the hood body;
an air curtain forming apparatus disposed on the hood body and located at an edge of the second opening; and
an exhaust pipe connector mounted on the hood body and connected to the exhaust pipe.
2. The preventive maintenance hood of claim 1, wherein a hood body surface whereon the air curtain forming apparatus is disposed has a tilt angle.
3. The preventive maintenance hood of claim 1, wherein the air curtain forming apparatus forms an air curtain with an emission direction that makes the exit of the reaction chamber enclosed by the air curtain and the hood body.
4. The preventive maintenance hood of claim 3, wherein the emission direction of the air curtain forming apparatus is parallel to a hood body surface whereon the air curtain forming apparatus is disposed.
5. The preventive maintenance hood of claim 3, wherein the emission direction of the air curtain forming apparatus comprises a direction by which the air curtain is formed inside the hood body.
6. The preventive maintenance hood of claim 1, wherein the air curtain forming apparatus further comprises a dismantling device.
7. The preventive maintenance hood of claim 1, wherein disposition of the air curtain forming apparatus is made to selectively attach inside or outside the hood body.
8. The preventive maintenance hood of claim 1, further comprising:
a receiving port located on another sidewall of the hood body; and
a storage bag disposed outside the hood body and sealing the receiving port.
9. The preventive maintenance hood of claim 1, further comprising a soft pad disposed at the bottom of the hood body.
10. The preventive maintenance hood of claim 1, further comprising a pair of handles disposed on the hood body.
11. A preventive maintenance hood disposed on a reaction chamber of a semiconductor machine and connected to an exhaust pipe, comprising:
a hood body being a hexahedron including a first opening and a second opening, the first opening located at a bottom of the hood body and covering an exit of the reaction chamber, the second opening located on a first sidewall of the hood body;
an air curtain forming apparatus disposed on the first sidewall of the hood body and located at an edge of the second opening; and
an exhaust pipe connector mounted on the hood body and connected to the exhaust pipe.
12. The preventive maintenance hood of claim 11, wherein the first sidewall whereon the air curtain forming apparatus is disposed has a tilt angle.
13. The preventive maintenance hood of claim 11, wherein the air curtain forming apparatus forms an air curtain with an emission direction that makes the exit of the reaction chamber thereby enclosed by the air curtain and the hood body.
14. The preventive maintenance hood of claim 13, wherein the emission direction of the air curtain forming apparatus is parallel to the first sidewall whereon the air curtain forming apparatus is disposed.
15. The preventive maintenance hood of claim 13, wherein the emission direction of the air curtain forming apparatus comprises a direction by which the air curtain is formed inside the hood body.
16. The preventive maintenance hood of claim 11, wherein the air curtain forming apparatus further comprises a dismantling device.
17. The preventive maintenance hood of claim 11, wherein the disposition of the air curtain forming apparatus is made to selectively attach inside or the outside the hood body.
18. The preventive maintenance hood of claim 11, further comprising:
a receiving port located on a second sidewall of the hood body; and
a storage bag disposed outside the hood body and sealing the receiving port.
19. The preventive maintenance hood of claim 11, further comprising a soft pad disposed at the bottom of the hood body.
20. The preventive maintenance hood of claim 11, further comprising a pair of handles disposed on the hood body.
21. A preventive maintenance system, comprising the preventive maintenance hood of claim 1, the preventive maintenance hood being disposed on a reaction chamber of a semiconductor machine and connected to an exhaust pipe.
22. A preventive maintenance system, comprising the preventive maintenance hood of claim 11, the preventive maintenance hood being disposed on a reaction chamber of a semiconductor machine and connected to an exhaust pipe.
23. A preventive maintenance system, comprising:
a semiconductor machine, comprising a reaction chamber;
a preventive maintenance hood, disposed on the reaction chamber and comprising:
a hood body including a first opening and a second opening, the first opening located at a bottom of the hood body and covering an exit of the reaction chamber, the second opening located on a sidewall of the hood body;
an air curtain forming apparatus disposed on the hood body and located at an edge of the second opening; and
an exhaust pipe connector mounted on the hood body; and
an exhaust pipe, connected to the exhaust pipe connector, wherein the preventive maintenance hood is switched on when the reaction chamber is being cleaned.
24. The preventive maintenance system of claim 23, wherein a hood body surface whereon the air curtain forming apparatus is disposed has a tilt angle.
25. The preventive maintenance system of claim 23, wherein the air curtain forming apparatus forms an air curtain with an emission direction that makes the exit of the reaction chamber enclosed by the air curtain and the hood body.
26. The preventive maintenance system of claim 25, wherein the emission direction of the air curtain forming apparatus is parallel to a hood body surface whereon the air curtain forming apparatus is disposed.
27. The preventive maintenance system of claim 25, wherein the emission direction of the air curtain forming apparatus comprises a direction by which the air curtain is formed inside the hood body.
28. The preventive maintenance system of claim 23, wherein the air curtain forming apparatus further comprises a dismantling device.
29. The preventive maintenance system of claim 23, wherein disposition of the air curtain forming apparatus is made to selectively attach inside or outside the hood body.
30. The preventive maintenance system of claim 23, the preventive maintenance hood further comprising:
a receiving port located on another sidewall of the hood body; and
a storage bag disposed outside the hood body and sealing the receiving port.
31. The preventive maintenance system of claim 23, the preventive maintenance hood further comprising a soft pad disposed at the bottom of the hood body.
32. The preventive maintenance system of claim 23, the preventive maintenance hood further comprising a pair of handles disposed on the hood body.
33. A preventive maintenance system, comprising:
a semiconductor machine, comprising a reaction chamber;
a preventive maintenance hood, disposed on the reaction chamber and comprising:
a hood body being a hexahedron including a first opening and a second opening, the first opening located at a bottom of the hood body and covering an exit of the reaction chamber, the second opening located on a first sidewall of the hood body;
an air curtain forming apparatus disposed on the first sidewall of the hood body and located at an edge of the second opening; and
an exhaust pipe connector mounted on the hood body; and
an exhaust pipe, connected to the exhaust pipe connector, wherein the preventive maintenance hood is switched on when the reaction chamber is being cleaned.
34. The preventive maintenance system of claim 33, wherein the first sidewall whereon the air curtain forming apparatus is disposed has a tilt angle.
35. The preventive maintenance system of claim 33, wherein the air curtain forming apparatus forms an air curtain with an emission direction that makes the exit of the reaction chamber thereby enclosed by the air curtain and the hood body.
36. The preventive maintenance system of claim 35, wherein the emission direction of the air curtain forming apparatus is parallel to the first sidewall whereon the air curtain forming apparatus is disposed.
37. The preventive maintenance system of claim 35, wherein the emission direction of the air curtain forming apparatus comprises a direction by which the air curtain is formed inside the hood body.
38. The preventive maintenance system of claim 33, wherein the air curtain forming apparatus further comprises a dismantling device.
39. The preventive maintenance system of claim 33, wherein the disposition of the air curtain forming apparatus is made to selectively attach inside or the outside the hood body.
40. The preventive maintenance system of claim 33, the preventive maintenance hood further comprising:
a receiving port located on a second sidewall of the hood body; and
a storage bag disposed outside the hood body and sealing the receiving port.
41. The preventive maintenance system of claim 33, the preventive maintenance hood further comprising a soft pad disposed at the bottom of the hood body.
42. The preventive maintenance system of claim 33, the preventive maintenance hood further comprising a pair of handles disposed on the hood body.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A sealing and cutting unit for applying a plastic foil to a planar substrate material to form laminated material by means of heat and pressure comprising: a sealing unit, a die cutting unit and a drive for moving laminated material from the sealing unit to the die cutting unit, said sealing unit comprising a sealing plate with a heated active surface and a back plate which is movable relative thereto said die cutting unit comprising a die cutter with at least one die cutting knife, and a counter plate for making die cuts at selected locations in the planar substrate material in the region of the applied plastic foil, wherein the sealing plate of the sealing unit has at least one set of raised and depressed regions on a surface facing a portion on the back plate that forms an area of reduced heating of the plastic foil over the depressed regions and the drive for moving the laminated material provides the laminated material to the die cutting unit so the area of reduced heating corresponds to the location of the die cutting knife during cutting, so that cuts are made only in the area of reduced heating.
2. A sealing and cutting unit according to claim 1 wherein the sealing and cutting unit comprises the sealing unit connected to the die cutting unit.
3. A sealing and cutting unit according to claim 2, wherein the die cutting unit is arranged downstream of the sealing unit in a machine direction of the substrate material at a predetermined distance therefrom and the sealing unit and die cutting units are controlled in a coordinated manner so that a selected position in the substrate material in the sealing unit comes into position over a depressed region and thereafter comes into a corresponding position under the die cutting knife in the die cutting unit.
4. A sealing and cutting unit according to claim 3 wherein a plurality of depressed regions in the active surface of the sealing plate form a pattern which is an image of the pattern of a plurality of die cutting knives of the die cutting unit so that both patterns are congruent.
5. A sealing and cutting unit according to claim 3 wherein the planar substrate material is moved by drive means in an intermittent manner from the sealing unit into the die cutting unit.
6. A sealing and cutting unit according to claim 2 wherein the planar substrate material is moved by drive means in an intermittent manner from the sealing unit into the die cutting unit.
7. A sealing and cutting unit according to claim 1 wherein the depressed region of the sealing plate is wider than the die cutting knife of the die cutting unit such that the area of reduced heating surrounds the cut of the die cutting unit on all sides.
8. A sealing and cutting unit according to claim 1 wherein the sealing plate is formed from metal which is routed on its active surface to form the depressed regions and wherein the active surface is coated with a scratch proof plastic material.
9. A sealing and cutting unit according to claim 1 wherein it forms part of an opening forming assembly for a filling machine for liquid packaging and the substrate material is a carrier material web provided with a ply of plastic layers with score lines for the production of a packaging with a tear tab over an opening, and the pattern for the die cutting knife is a circle.
10. A sealing and cutting unit according to claim 1 wherein the portion on the back plate is a flat portion.