1. A chemically amplified positive-type photosensitive resin composition, comprising:
(A) an acid generator that produces an acid by being irradiated with an active ray or radiation;
(B) a resin whose solubility in alkali increases under the action of acid; and
(S) an organic solvent,
wherein the resin (B) comprises an acrylic resin (B-3) comprising a constituent unit derived from an acrylic acid ester comprising an \u2014SO2-containing cyclic group or a lactone-containing cyclic group, and
the percentage of the acrylic resin (B-3) to the total mass of resin components contained in the composition is 70% by mass or more.
2. The composition according to claim 1, that is used to form a thick resist pattern having a film thickness of 10 \u03bcm or more.
3. The composition according to claim 1, that is used to form a template that defines a plated article on a metal substrate.
4. A thick photosensitive dry film comprising a base film and a thick photosensitive resin layer formed on the base film, wherein the layer comprises the composition according to claim 1.
5. The dry film according to claim 4, wherein the layer has a film thickness of 5 to 300 \u03bcm.
6. A method of manufacturing a thick resist pattern, comprising:
laminating a thick photosensitive resin layer on a substrate, the layer comprising the composition according to claim 1;
irradiating the layer with an active ray or radiation; and
developing the layer after the exposure,
wherein a film thickness of the thick resist pattern is 10 \u03bcm or more.
7. A method of manufacturing a substrate with a template, comprising:
laminating a photosensitive resin layer on a metal substrate, the layer comprising the composition according to claim 3;
irradiating the layer with an active ray or radiation; and
developing the layer after the exposure to form the template that defines a plated article,
wherein a film thickness of the template is 10 \u03bcm or more.
8. A method of manufacturing a plated article, comprising plating the substrate with the template manufactured by the method according to claim 7 to form the plated article inside the template.
9. A thick resist pattern comprising an acid generator (A) that produces an acid by being irradiatied with an active ray or radiation, and a resin (B) whose solubility in alkali increases under the action of acid,
wherein a thickness of the thick resist pattern is 10 \u03bcm or more.
10. A layer comprising an acid generator (A) that produces an acid by irradiating with an active ray or radiation, and a resin (B) whose solubility in alkali increases under the action of acid, and optionally comprising an organic solvent (S),
wherein a thickness of the layer is from 5 \u03bcm to 300 \u03bcm.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. Method to provide a medium voltage interconnection for realizing an electrical connection between a receiving connector of a first equipment station and a receiving connector of a second equipment station, said method comprising the steps of:
providing an electrical connector mating said receiving connector at each end of a metal conductor, said metal conductor with its two connectors forming a conductive core,
providing a flexible tube made of at least an insulating layer of elastomeric material,
expanding radially said flexible tube and sliding therein said conductive core, and
releasing said flexible tube over said conductive core.
2. Method according to claim 1, further comprising the steps of:
providing said electrical connector with a substantially conical shape of which the base has a diameter relatively larger than the diameter of said metal conductor, and
connecting said base to an end of said metal conductor.
3. Method according to claim 1, further comprising the step of engaging one end of said flexible tube into an inner side of a conical bushing means made of insulating material and provided with said receiving connector so as to bring the electrical connector of the conductive core into contact with said receiving connector and said insulating layer of said flexible tube into contact with said inner side of said bushing means.
4. Method according to claim 1, comprising the steps of providing said flexible tube with, coaxially starting from the center:
a first semiconductive layer,
an insulating layer made of elastomeric material, and
a second semiconductive layer.
5. Method according to claim 3, comprising the steps of providing said flexible tube with, coaxially starting from the center:
a first semiconductive layer,
an insulating layer made of elastomeric material, and
a second semiconductive layer, and further comprising the step of removing partially said second semiconductive layer at the end of said flexible tube prior to the step of engaging said end of said flexible tube into said bushing means.
6. Method according to claim 4, comprising the steps of:
providing a ring groove into said first semiconductive layer, and
providing a ring groove partially into said insulating layer.
7. Method according to claim 1, further comprising the steps of:
providing an external locking ring onto at least one electrical connector of said conductive core, and
providing into said flexible tube at least one internal ring groove for receiving the locking ring of said electrical connector when the tube is released over said conductive core.
8. Method according to claim 1, wherein said flexible tube has the same length as said conductive core.
9. Medium voltage interconnection, said interconnection being made according to claim 1 and adapted to electrically connect a receiving connector of a first equipment station and a receiving connector of a second equipment station, said interconnection comprising a conductive core including a metal conductor with, at each end thereof, an electrical connector adapted to mate said receiving connector, and a flexible tube having at least an insulating layer made of elastomeric material and covering the whole conductive core.
10. Medium voltage interconnection according to claim 9, wherein said elastomeric material is a synthetic terpolymer of ethylene, propylene and diene EPDM.
11. Medium voltage interconnection according to claim 9, wherein said elastomeric material is a silicone.
12. Medium voltage interconnection according to claim 9, wherein said electrical connector has a substantially conical shape of which the base is connected to said metal conductor, said base having a diameter relatively larger than the diameter of said metal conductor.
13. Medium voltage interconnection according to claim 12, wherein one end of said flexible tube is adapted to be engaged into an inner side of a conical bushing means made of insulating material and provided with said receiving connector, the electrical connector of said conductive core being adapted to be brought into electrical contact with said receiving connector, and said insulating layer of said flexible tube being adapted to be brought into contact with said inner side of said bushing means.
14. Medium voltage interconnection according to claim 13, wherein said interconnection is provided with a fixing ring located over said conductive core and over said flexible tube, said fixing ring being adapted to abut against the base of the conical electrical connector and to be fixed to said bushing means.
15. Medium voltage interconnection according to claim 9, wherein said flexible tube is a multi-layer tube comprising, coaxially starting from the center, a first semiconductive layer, an insulating layer made of elastomeric material, and a second semiconductive layer.
16. Medium voltage interconnection according to claim 9, wherein the electrical connector of said conductive core is provided with an external locking ring mating in an internal ring groove in the insulating layer of said flexible tube.