1. A rail-guided power tool comprising:
a guide carriage;
at least one carrying handle and one device head arranged on the guide carriage, the guide carriage movable by an adjustment mechanism from a locked position to a released position, the guide carriage being engaged with a guide rail via at least one adjustable guide roller in the locked position and the at least one adjustable guide roller being at a distance from the guide rail in the released position; and
an unlocking mechanism comprising an actuator, a transmitter and an unlocking device, the unlocking mechanism being formed as one piece.
2. The power tool as recited in claim 1 wherein the unlocking mechanism is a single metal part.
3. The power tool as recited in claim 1 wherein the actuator is pre-tensioned in the locked position by a spring element.
4. The power tool as recited in claim 3 wherein the spring element is integrated into the one-piece unlocking mechanism.
5. The power tool as recited in claim 1 wherein the at least one adjustable guide roller is arranged in the locked position in such a way that a dead center position is passed.
6. The power tool as recited in claim 1 wherein, in the locked position, the at least one adjustable guide roller has a setting mechanism for setting the play between the at least one guide roller and the guide rail.
7. The power tool as recited in claim 1 wherein the adjustment mechanism has a slide rod coupled via a coupling element to the carrying handle.
8. The power tool according to claim 7 wherein the slide rod has at least one guide element coupled to the at least one adjustable guide roller.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
What is claimed is:
1. A fuse structure, comprising:
an optimal position of laser spot defined above a substrate;
a first conductive layer formed on part of the substrate;
a dielectric layer formed on the substrate and the first conductive layer;
a second conductive layer comprising the position of laser spot formed on part of the dielectric layer;
a third conductive layer formed on the part of the dielectric layer placed above the first conductive layer, wherein the third conductive layer is insulated from the first and second conductive layers; and
at least one conductive plug penetrating the dielectric layer, to electrically connect the first conductive layer and the second conductive layer:
2. The fuse structure according to claim 1, wherein the material of the first conductive layer is tungsten.
3. The fuse structure according to claim 1, wherein the material of the second conductive layer is Al, AlCu alloy or poly-silicon.
4. The fuse structure according to claim 1, wherein the material of the third conductive layer is Al, AlCu alloy or poly-silicon.
5. The fuse structure according to claim 1, wherein the material of the dielectric layer is SiO2.
6. The fuse structure according to claim 1, wherein the material of the conductive plug is tungsten.
7. The fuse structure according to claim 1, further comprising a passivation layer having a window formed on the second conductive layer and the third conductive layer;
wherein the window exposes the second conductive layer comprising the position of laser spot, part of the third conductive layer and part of the dielectric layer.
8. The fuse structure according to claim 7, wherein the material of the passivation layer is PE-TEOS SiO2 or SiN.
9. A fuse window having a plurality of fuse structures, each of the fuse structures comprising:
an optimal position of laser spot defined above a substrate;
a first conductive layer formed on part of the substrate;
a dielectric layer formed on the substrate and the first conductive layer;
a second conductive layer comprising the position of laser spot formed on part of the dielectric layer;
a third conductive layer formed on the part of the dielectric layer placed above the first conductive layer, wherein the third conductive layer is insulated from the first and second conductive layer; and
at least one conductive plug penetrating the dielectric layer, for electrically connecting the first conductive layer and the second conductive layer;
wherein each of the fuse structures has its own position of laser spot on the second conductive layer, and the fuse structures are insulated from one another, and the laterals of the second conductive layer having the position of laser spot of any the fuse structures correspond to the third conductive layer of the adjoining fuse structure.
10. The fuse window according to claim 9, wherein the material of the first conductive layer is tungsten.
11. The fuse window according to claim 9, wherein the material of the second conductive layer is Al, AlCu alloy or poly-Silicon.
12. The fuse window according to claim 9, wherein the material of the third conductive layer is Al, AlCu alloy or poly-silicon.
13. The fuse window according to claim 9, wherein the material of the dielectric layer is SiO2.
14. The fuse window according to claim 9, wherein the material of the conductive plug is tungsten.
15. A fuse structure, comprising:
an optimal position of laser spot defined above a substrate;
a first conductive layer formed on part of the substrate;
a dielectric layer formed on the substrate and the first conductive layer;
a second conductive layer comprising the position of laser spot formed on the dielectric layer; and
at least one conductive plug penetrating the dielectric layer, to electrically connect the first conductive layer and the second conductive layer.
16. The fuse structure according to claim 15, wherein the material of the first conductive layer is tungsten.
17. The fuse structure according to claim 15, wherein the material of the second conductive layer is Al, AlCu alloy or poly-silicon.
18. The fuse structure according to claim 15, wherein the material of the dielectric layer is SiO2.
19. The fuse structure according to claim 15, wherein the material of the conductive plug is tungsten.
20. The fuse structure according to claim 15, further comprising a passivation layer having a window formed on the second conductive layer;
wherein the window exposes the second conductive layer comprising the position of laser spot.
21. The fuse structure according to claim 20, wherein the material of the passivation layer is PE-TEOS SiO2 or SiN.
22. A fuse window having a plurality of fuse structures, Each fuse structure comprising:
an optimal position of laser spot defined above a substrate;
a first conductive layer formed on part of the substrate;
a dielectric layer formed on the substrate and the first conductive layer;
a second conductive layer comprising the position of laser spot formed on part of the dielectric layer; and
at least one conductive plug penetrating the dielectric layer, to electrically connect the first conductive layer and the second conductive layer;
wherein each fuse structure has its own the position of laser spot on the second conductive layer, and the fuse structures are insulated from one another, and the laterals of the portion of the second conductive layer having the position of laser spot of any the fuse structure correspond to the portion of the second conductive layer having no position of laser spot of the adjoining fuse structure.
23. The fuse window according to claim 22, wherein the material of the first conductive layer is tungsten.
24. The fuse window according to claim 22, wherein the material of the second conductive layer is Al, AlCu alloy or poly-silicon.
25. The fuse window according to claim 22, wherein the material of the dielectric layer is SiO2.
26. The fuse window according to claim 22, wherein the material of the conductive plug is tungsten.