1. A control apparatus for an electric vehicle comprising:
a power conversion means for converting a voltage supplied by a DC power supply into a system voltage appearing on a power supply line;
a MG unit as a motor driving unit including an inverter connected to the power supply line and an AC motor driven by the inverter;
a system voltage control means for executing system voltage stabilization control of adjusting an input power different from a power required in generation of a torque in the AC motor employed in the MG unit in order to suppress variations in the system voltage; and
a rotation speed detection means for detecting a rotation speed of the AC motor,
wherein, the system voltage control means selects, during execution of the system voltage stabilization control, a leading side or a lagging side, on which at least one of a current flowing to the AC motor and a voltage applied to the AC motor is to be adjusted, in accordance with at least one of the rotation speed detected by the rotation speed detection means and a torque generated in the AC motor.
2. The control apparatus according to claim 1, wherein the system voltage control means selects, during execution of the system voltage stabilization control:
the leading side, on which a current flowing to the AC motor or a voltage applied to the AC motor is to be adjusted, if the rotation speed of the AC motor is lower than a predetermined speed value and a torque generated in the AC motor is lower than a predetermined torque value; and
the lagging side, on which the current flowing to the AC motor or the voltage applied to the AC motor is to be adjusted, if the rotation speed of the AC motor is higher than the predetermined speed value or the torque generated in the AC motor is greater than the predetermined torque value.
3. The control apparatus according to claim 1, further comprising:
a target voltage setting means for setting a target value of the system voltage;
a voltage detection means for detecting the system voltage; and
a power operation quantity computation means for computing a power operation quantity of an input power of the MG unit on the basis of a value set by the target voltage setting means as the target value and a value detected by the voltage detection means as the system voltage,
wherein the system voltage control means controls the system voltage through adjustment of the input power of the MG unit on the basis of a quantity computed by the power operation quantity computation means as the power operation quantity.
4. The control apparatus according to claim 3, further comprising:
a first low frequency component passing means for passing only components included in the system voltage detected by the voltage detection means as components each having a frequency lower than a predetermined value,
wherein the power operation quantity computation means computes a power operation quantity of the input power of the MG unit on the basis of the components passed by the first low frequency component passing means as components, which are included in the system voltage as components each having a frequency lower than the predetermined value.
5. The control apparatus according to claim 4, further comprising:
a conversion power control means for controlling the conversion power, which is the input or output power of the power conversion means.
6. The control apparatus according to claim 5, further comprising:
a conversion power command value computation means for computing a command value of the conversion power of the power conversion means;
a conversion power detection means for detecting a value as a detected value of the conversion power; and
a conversion power control quantity computation means for computing a control quantity of the conversion power on the basis of the value computed by the conversion power command value computation means as the command value of the converted power and the value detected by the conversion power detection means as the detected value of the conversion power,
wherein the conversion power control means controls the conversion power on the basis of a control quantity computed by the conversion power control quantity computation means.
7. The control apparatus according to claim 6, wherein:
the conversion power command value computation means computes the command value of the conversion power on the basis of a power including at least a sum of input powers of all MG units connected to the power supply line.
8. The control apparatus according to claim 7, further comprising:
a second low frequency component passing means for passing only power components included in the power including at least a total value of input powers of all the MG units connected to the power supply line as components each having a frequency lower than a predetermined value,
wherein the conversion power command value computation means computes the command value of the conversion power on the basis of the power components passed by the second low frequency component passing means as power components each having a frequency lower than the predetermined value.
9. The control apparatus according to claim 8, further comprising:
a current detection means for detecting an output current of the power conversion means,
wherein the conversion power detection means computes a detected value of the conversion power on the basis of a value set by the target voltage setting means as the target value of the system voltage or the system voltage detected by the voltage detection means and the current detected by the current detection means as the output current of the power conversion means.
10. The control apparatus according to claim 9, further comprising:
a third low frequency component passing means for passing only components included in the output current of the power conversion means as components each having a frequency lower than a predetermined value, wherein the conversion power detection means computes a detected value of the conversion power on the basis of the components passed by the third low frequency component passing means as output current components each having a frequency lower than a predetermined value.
11. A control apparatus for an electric vehicle comprising:
a power conversion means for converting a voltage supplied by a DC power supply into a system voltage appearing on a power supply line;
a MG unit as a motor driving unit including an inverter connected to the power supply line and an AC motor driven by the inverter; and
a system voltage control means for executing system voltage stabilization control of adjusting an input power different from a power required in generation of a torque in the AC motor employed in the MG unit in order to suppress variations in the system voltage,
wherein the system voltage control means sets, during execution of the system voltage stabilization control, at least one of a current flowing to the AC motor and a voltage applied to the AC motor to a strong magnetic field side, when a torque generated by the AC motor is substantially zero.
12. The control apparatus according to claim 11, further comprising:
a target voltage setting means for setting a target value of the system voltage; and
a voltage detection means for detecting the system voltage,
wherein the system voltage control means computes a power operation quantity of an input power of the MG unit on the basis of a value set by the target voltage setting means as the target value and a value detected by the voltage detection means as the system voltage, and controls the system voltage through adjustment of the input power of the MG unit.
13. The control apparatus according to claim 12, further comprising:
a low frequency component passing means for passing only components included in the system voltage detected by the voltage detection means as components each having a frequency lower than a predetermined value,
wherein the system voltage control means computes the power operation quantity of the input power of the MG unit on the basis of the components passed by the low frequency component passing means as components, which are included in the system voltage as components each having a frequency lower than the predetermined value.
14. The control apparatus according to claim 11, further comprising:
a conversion power control means for controlling the conversion power, which is the input or output power of the power conversion means.
15. The control apparatus according to claim 14, further comprising:
a conversion power command value computation means for computing a command value of the conversion power of the power conversion means; and
a conversion power detection means for detecting a value as a detected value of the conversion power,
wherein the conversion power control means computes a control quantity of the conversion power on the basis of the value computed by the conversion power command value computation means as the command value of the converted power and the value detected by the conversion power detection means as the detected value of the conversion power, and controls the conversion power on the basis of the control quantity computed by the conversion power control quantity computation means.
16. The control apparatus according to claim 15, wherein:
the conversion power command value computation means computes the command value of the conversion power on the basis of input powers of all electric loads including the MG unit connected to the power supply line.
17. The control apparatus according to claim 16, further comprising:
a low frequency component passing means for passing only power components in the input powers of the all electric loads as components each having a frequency lower than a predetermined value,
wherein the conversion power command value computation means computes the command value of the conversion power on the basis of the power components passed by the low frequency component passing means as power components each having a frequency lower than the predetermined value.
18. The control apparatus according to claim 15, further comprising:
at least one of a target voltage setting means for setting a target value of the system voltage and a voltage detection means for detecting the system voltage; and
a current detection means for detecting an output current of the power conversion means,
wherein the conversion power detection means computes a detected value of the conversion power on the basis of a value set by the target voltage setting means as the target value of the system voltage or the system voltage detected by the voltage detection means and the current detected by the current detection means as the output current of the power conversion means.
19. The control apparatus according to claim 18, further comprising:
a low frequency component passing means for passing only components included in the output current of the power conversion means as components each having a frequency lower than a predetermined value,
wherein the conversion power detection means computes a detected value of the conversion power on the basis of the components passed by the low frequency component passing means as output current components each having a frequency lower than a predetermined value.
20. The control apparatus according to claim 11, further comprising:
a rotation speed detection means for detecting a rotation speed of the AC motor,
wherein the system voltage control means selects, during execution of the system voltage stabilization control, a leading side or a lagging side, on which at least one of the current flowing to the AC motor and the voltage applied to the AC motor is to be adjusted, in accordance with at least one of the rotation speed detected by the rotation speed detection means and the torque generated in the AC motor, when the torque generated by the AC motor is not substantially zero.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A pellicle characterized by being provided with a silicon crystal film, the absorption coefficient of which is 0.005nm or lower with respect to light having a wavelength of 13.5 nm, as a pellicle film.
2. The pellicle according to claim 1, wherein said silicon crystal film is a single-crystal silicon film.
3. The pellicle according to claim 2, wherein said single-crystal silicon film is obtained by thin-filming an SOI substrate.
4. The pellicle according to claim 2, wherein the crystal plane orientation of said single-crystal silicon film is a (100) plane.
5. The pellicle according to claim 1, wherein said pellicle is provided with a protective film on at least one principal surface of said silicon crystal film.
6. The pellicle according to claim 5, wherein the absorption coefficient of said protective film with respect to light having a wavelength of 13.5 nm is 0.05nm or lower.
7. The pellicle according to claim 5, wherein said protective film is made of at least one material selected from the group consisting of SiC, SiO2, Si3N4, SiON, Y2O3, YN, Mo, Ru and Rh.
8. A method for manufacturing a pellicle, characterized by comprising the steps of connecting a pellicle film holding means to one principal surface of a substrate where a silicon crystal film is formed, and forming said silicon crystal film into a pellicle film by removing a supporting substrate from the other principal surface side of said substrate, wherein the absorption coefficient of said silicon crystal film with respect to light having a wavelength of 13.5 nm is 0.005nm or lower.
9. The method for manufacturing a pellicle according to claim 8, wherein said substrate is SOI, SOQ or SOG.
10. The method for manufacturing a pellicle according to claim 8, further including a step of forming a protective film on at least one surface of said silicon crystal film.
11. The method for manufacturing a pellicle according to claim 10, wherein said forming of said protective film is carried out by coating a film made of at least one material selected from the group consisting of SiC, SiO2, Si3N4, SiON, Y2O3, YN, Mo, Ru and Rh.
12. The method for manufacturing a pellicle according to claim 11, wherein said method for coating said protective film is a gas cluster ion beam deposition method.