1: A method of producing \u03b1 crystal structure-based alumina films, comprising:
in forming alumina films on substrates by sputtering of an aluminum metal target in an oxidizing gas-containing atmosphere, carrying out film formation intermittently in a plurality of substeps while restricting a thickness of the film formed in each substep to at most 5 nm.
2: A production method as set forth in claim 1, wherein the thickness of the film formed in each substep is not greater than 2 nm in an early stage of film formation and then is increased in middle and later stages of film formation as compared with the film thickness per substep in an early stage of film formation.
3: A method of producing \u03b1 crystal structure-based alumina films, comprising:
in forming alumina films on substrates by sputtering of an aluminum metal target in an oxidizing gas-containing atmosphere, a turntable is disposed to face a direction of sputtering of the aluminum metal target, substrates are fixed to said turntable and the alumina film formation on the substrates is carried out intermittently in a plurality of substeps while said turntable is rotated, a thickness of the film formed in each substep being restricted to at most 5 nm.
4: A method of producing \u03b1 crystal structure-based alumina films comprising:
in forming alumina films on substrates by sputtering of an aluminum metal target in an oxidizing gas-containing atmosphere, a turntable is disposed to face a direction of sputtering of the aluminum metal target, satellite rotary members are disposed on said turntable, substrates are fixed to said satellite rotary members, and the alumina film formation on the substrates is carried out intermittently in a plurality of substeps while said turntable and satellite rotary members are rotated, a thickness of the film formed in each substep being restricted to at most 5 nm.
5: A method of producing \u03b1 crystal structure-based alumina films, comprising:
in forming alumina films on substrates by sputtering of an aluminum metal target in an oxidizing gas-containing atmosphere, a turntable is disposed to face a direction of sputtering of the aluminum metal target, satellite rotary members are disposed on said turntable, further rotary members, are fitted to said satellite rotary members, substrates are fixed to said further rotary members and the alumina film formation on the substrates is carried out intermittently in a plurality of substeps while said turntable, satellite rotary members and further rotary members are rotated, a thickness of the film formed in each substep being restricted to at most 5 nm.
6: A production method as set forth in claim 3, wherein the intermittent film formation cycles are controlled by adjusting a revolution speed of said turntable, satellite rotary members, or further rotary members.
7: A production method as set forth claim 3, wherein a revolution speed of said turntable is not smaller than 3 rpm.
8: A production method asset forth in claim 4, wherein a revolution speed of said satellite rotary members is not smaller than 20 rpm.
9: A production method as set forth in claim 1, wherein an alumina film is formed intermittently on the substrate disposed to face a direction of sputtering of the aluminum metal target while reciprocally moving said substrate to cross the direction of sputtering.
10: A production method as set forth in claim 1, wherein the substrate is disposed to face a direction of sputtering of the aluminum metal target, a shutter is disposed between the aluminum metal target and the substrate, and an alumina film is formed on the substrate intermittently while opening and closing said shutter.
11: A production method as set forth in claim 1, wherein the aluminum metal target is sputtered intermittently against the substrate disposed to face a direction of sputtering of said aluminum metal target to thereby cause intermittent alumina film formation on said substrate.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A feed supplement comprising:
(i) a culture obtainable by inoculating and cultivating Lactobacillus gasseri OLL 2716 (FERM BP-6999) in a medium containing a whey protein derivative, wherein the whey protein derivative is selected from the group consisting of a whey protein concentrate (WPC), a whey protein isolate (WPI), a hydrolysate of the whey protein concentrate, and a hydrolysate of the whey protein isolate;
(ii) Lactobacillus gasseri OLL 2716 (FERM BP-6999) bodies isolated from the culture (i); and
(iii) a supernatant of the culture (i), wherein the supernatant is obtained by removing solid matters from the culture (i);
wherein feed supplement has one or more of intestinal flora-balancing activity, anti-diarrhea activity, antioxidant activity, weight increasing activity and growth promoting activity when fed to the calves.
2. The feed supplement according to claim 1, wherein the culture, the Lactobacillus gasseri OLL 2716 (FERM BP-6999) bodies isolated from the culture, and the supernatant of the culture are in the form of at least one of a concentrated product, a pasted product, a dried product, a liquid product, a diluted product and a sterilized product.
3. The feed supplement according to claim 2, wherein the dried product is at least one of a spray-dried product, a freeze-dried product, a vacuum-dried product and a drum-dried product.
4. The feed supplement according to claim 1, which further comprises an excipient.
5. The feed supplement according to claim 4, wherein the excipient is at least one of a starch, a dextrin, a milk component, and a silicic acid.
6. The feed supplement according to claim 1, wherein the Lactobacillus gasseri OLL 2716 (FERM BP-6999) bodies are crushed after isolation from the culture.
7. A method of improving an intestinal flora, which comprises administering an effective amount of the feed supplement according to claim 1 to calves during a period from after birth to a weaning stage.
8. A method for improving intestinal flora-balancing activity, antidiarrhea activity, antioxidant activity, weight-increasing activity, and growth-promoting activity of calves by administering to the calves the feed supplement of claim 1.