1. The method of forming a coil on a substrate, comprising the steps of:
providing a one-piece silicon wafer substrate having a first surface and a second surface;
etching a continuous wound recess into said substrate from said first surface by a deep reactive ion etched technique;
etching a continuous wound recess into said substrate from said second surface by a deep reactive ion etched technique;
forming a dielectric coating on the portions of said substrate that face into said recesses; and
depositing an electrically-conductive material in said recesses to form two series-connected oppositely-wound coils;
thereby to form a coil on said substrate.
2. The method as set forth in claim 1 wherein each surface is substantially planar.
3. The method as set forth in claim 1 wherein each recess has a substantially rectangular transverse cross-section.
4. The method as set forth in claim 3 wherein each recess has a transverse depth-to-width ratio of at least about 10.
5. The method as set forth in claim 1 wherein each recess has a transverse width of about 9 microns.
6. The method as set forth in claim 1 wherein each recess has a transverse depth of about 100 microns.
7. The method as set forth in claim 1 wherein the spacing between adjacent convolutions of each recess is about 5 microns.
8. The method as set forth in claim 1 wherein said dielectric coating is silicon dioxide.
9. The method as set forth in claim 8 wherein said silicon dioxide coating is formed by heating said etched substrate in a steam autoclave.
10. The method as set forth in claim 1 wherein said coating has a thickness of not greater than about 1 micron.
11. The method as set forth in claim 1 wherein each recess is wound in a generally rectangular pattern.
12. The method as set forth in claim 1 and further comprising the additional step of:
depositing a seed layer in each recess before said electrically-conductive material is deposited thereon.
13. The method as set forth in claim 12 wherein said seed layer includes titanium and copper.
14. The method as set forth in claim 1 wherein said electrically-conductive material is copper.
15. The method as set forth in claim 14 wherein said copper material is electroplated in said recess.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An integrated refinery process for the production of high quality gasoline blending components having low volatility comprising:
(a) providing a first ethylene-containing refinery stream;
(b) separating a C2+fraction from said first stream to produce a second refinery stream richer in ethylene than said first stream;
(c) providing an isopentane-containing refinery stream;
(d) contacting said isopentane-containing refinery stream with said second refinery stream in the presence of an ionic liquid catalyst in an alkylation zone under alkylation conditions; and
(e) recovering high quality gasoline blending components of low volatility from said alkylation zone.
2. A process according to claim 1, wherein the ethylene-containing refinery stream comprises offgas from a FCC unit.
3. A process according to claim 1, wherein the ethylene-containing refinery stream comprises FCC de-ethanizer overhead.
4. A process according to claim 1, wherein the ionic liquid catalyst comprises a hydrocarbyl substituted pyridinium chloride or a hydrocarbyl substituted imidazolium chloride.
5. A process according to claim 4, wherein the ionic liquid catalyst comprises an alkyl substituted pyridinium chloride or an alkyl substituted imidazolium chloride.
6. A process according to claim 5, wherein the ionic liquid catalyst is selected from the group consisting of 1-butyl-4-methyl-pyridinium chloroaluminate (BMP), 1-butyl-pyridinium chloroaluminate (BP), 1-butyl-3-methyl-imidazolium chloroaluminate BMIM) and 1-H-pyridinium chloroaluminate (HP).
7. A process according to claim 1, further comprising blending the high quality gasoline blending components into gasoline.
8. A process according to claim 1, wherein the isopentane-containing stream comprises isopentane extracted from an FCC unit, isopentane extracted from a hydrocracking unit, C5 and C6 streams derived from distillation of crude oil, or C5 and C6 streams extracted from a reformer.
9. A process according to claim 1, wherein the ionic liquid catalyst further comprises an HCl co-catalyst.
10. A process according to claim 1, wherein the first ethylene-containing refinery stream comprises ethylene, propylene, butylenes and pentenes.
11. A process according to claim 1, wherein the first refinery stream contains hydrogen and further comprises separating a C2\u2212 fraction from the first refinery stream which is richer in hydrogen than said first stream; and recovering hydrogen from the C2\u2212 fraction.
12. A process according to claim 1, further comprising:
(f) providing a third refinery stream comprising at least one olefin selected from the group consisting of ethylene, propylene, butylenes, pentenes and mixtures thereof;
(g) providing a fourth refinery stream comprising at least one isoparaffin selected from the group consisting of isobutane, isopentane and mixtures thereof;
(h) contacting said third and fourth refinery streams with an ionic liquid catalyst in a second alkylation zone under alkylation conditions; and
(i) recovering gasoline blending components from the second alkylation zone.
13. A method of improving the operating efficiency of a refinery by reducing fuel gas production and simultaneously producing high quality gasoline blending components of low volatility comprising:
(a) providing a first refinery stream comprising hydrogen and C2-C5 olefins;
(b) separating a C2+ fraction from said first stream to produce a second refinery stream richer in olefins than said first stream and a third refinery stream richer in hydrogen than said first stream;
(c) providing an isopentane-containing refinery stream;
(d) contacting said isopentane-containing refinery stream with said second refinery stream in the presence of an ionic liquid catalyst in an alkylation zone under alkylation conditions;
(e) recovering high quality gasoline blending components of low volatility from said alkylation zone; and
(f) recovering hydrogen from said third refinery stream.
14. A method according to claim 13, wherein the ethylene-containing refinery stream comprises offgas from a FCC unit.
15. A method according to claim 13, wherein the ethylene-containing refinery stream comprises FCC de-ethanizer overhead.
16. A method according to claim 13, wherein the ionic liquid catalyst comprises a hydrocarbyl substituted pyridinium chloride or a hydrocarbyl substituted imidazolium chloride.
17. A process according to claim 16, wherein the ionic liquid catalyst comprises an alkyl substituted pyridinium chloride or an alkyl substituted imidazolium chloride.
18. A process according to claim 17, wherein the ionic liquid catalyst is selected from the group consisting of 1-butyl-4-methyl-pyridinium chloroaluminate (BMP), 1-butyl-pyridinium chloroaluminate (BP), 1-butyl-3-methyl-imidazolium chloroaluminate BMIM) and 1-H-pyridinium chloroaluminate (HP).
19. A method according to claim 13, further comprising blending the high quality gasoline blending components into gasoline.
20. A method according to claim 13, wherein the isopentane-containing stream comprises isopentane extracted from an FCC unit, isopentane extracted from a hydrocracking unit, C5 and C6 streams derived from distillation of crude oil, or C5 and C6 streams extracted from a reformer.
21. A method according to claim 13, wherein the ionic liquid catalyst further comprises an HCl co-catalyst.
22. A method according to claim 13, wherein the first ethylene-containing refinery stream comprises ethylene, propylene, butylenes and pentenes.
23. A method according to claim 13, further comprising:
(g) providing a third refinery stream comprising at least one olefin selected from the group consisting of ethylene, propylene, butylenes, pentenes and mixtures thereof;
(h) providing a fourth refinery stream comprising at least one isoparaffin selected from the group consisting of isobutane, isopentane and mixtures thereof;
(i) contacting said third and fourth refinery streams with an ionic liquid catalyst in a second alkylation zone under alkylation conditions; and
(j) recovering gasoline blending components from the second alkylation zone.
24. A high quality gasoline blending composition having low volatility prepared by a process comprising:
(a) providing a first ethylene-containing refinery stream;
(b) separating a C2+ fraction from said first stream to produce a second refinery stream richer in ethylene than said first stream;
(c) providing an isopentane-containing refinery stream;
(d) contacting said isopentane-containing refinery stream with said second refinery stream in the presence of an ionic liquid catalyst in an alkylation zone under alkylation conditions; and
(e) recovering high quality gasoline blending components of low volatility from said alkylation zone.
25. A composition according to claim 24, wherein the ethylene-containing refinery stream comprises offgas from a FCC unit.
26. A composition according to claim 24, wherein the ethylene-containing refinery stream comprises FCC de-ethanizer overhead.
27. A composition according to claim 24, wherein the ionic liquid catalyst comprises a hydrocarbyl substituted pyridinium chloride or a hydrocarbyl substituted imidazolium chloride.
28. A composition according to claim 27, wherein the ionic liquid catalyst comprises an alkyl substituted pyridinium chloride or an alkyl substituted imidazolium chloride.
29. A process according to claim 28, wherein the ionic liquid catalyst is selected from the group consisting of 1-butyl-4-methyl-pyridinium chloroaluminate (BMP), 1-butyl-pyridinium chloroaluminate (BP), 1-butyl-3-methyl-imidazolium chloroaluminate BMIM) and 1-H-pyridinium chloroaluminate (HP).
30. A composition according to claim 24, wherein the isopentane-containing stream comprises isopentane extracted from an FCC unit, isopentane extracted from a hydrocracking unit, C5 and C6 streams derived from distillation of crude oil, or C5 and C6 streams extracted from a reformer.
31. A composition according to claim 24, wherein the ionic liquid catalyst further comprises an HCl co-catalyst.
32. A composition according to claim 24, wherein the first ethylene-containing refinery stream comprises ethylene, propylene, butylenes and pentenes.