1. A power circuit for feeding a load current to a load in which said load current repeats periodically and alternates a burst flow in a burst period and a non-burst flow in a non-burst period comprising:
a power source section made up of a direct current power source having one terminal connected to a negative polarity;
a source power controlling section to control a current fed from a second terminal of said power source section connected to an input terminal to limit voltage drop in said power source section and to feed said current to a load connected to an output terminal; and
an energy storing section having a storage capacitor connected between said output terminal and a negative polarity;
wherein said source power controlling section is provided with a current controlling circuit to control a resistance value of a detecting resistor section, said detecting resistor section having one terminal connected to said negative polarity, according to a result of detection of a voltage input from said power source section, and a switching circuit which has a circuit part comprising a switching device connected between an input terminal and an output terminal of said source power controlling section and a capacitor connected between said output terminal of said source power controlling section and a negative polarity, and which controls a flowing period of an output current by exerting control on said switching device according to a control signal produced by detecting a change in an input power voltage using a voltage value occurring at another terminal of said detecting resistor; and
wherein a circuit constant of said source power controlling section, electrostatic capacity and internal resistance of said storage capacitor are determined by following equations:
T1+T2\u2266Tload
\u2003where \u201cT1+T2\u201d denotes a flowing period (Sec) of a power current and \u201cTload\u201d denotes a load period (Sec):
Vo2\u2267IC\xd7{Rc+(Tload\xd7Don)(C\xd7100)}=Vo3
\u2003where \u201cVo\u201d denotes a voltage (V) of said storage capacitor when there is no load current, \u201cIC\u201d denotes a current (A) of said storage capacitor, \u201cRc\u201d denotes an internal resistance (\u03a9) of said storage capacitor, \u201cDon\u201d denotes a duty ratio (%) of a load, \u201cC\u201d denotes a capacity (F) of a storage capacitor, and \u201cVo3\u201d denotes an amount of a voltage drop (V) of a storage capacitor voltage occurring during a burst period.
2. The power circuit according to claim 1, wherein said power source section comprises a secondary cell connected between an output terminal and said negative polarity and connected to a charging power source through a charging circuit, and a primary cell being connected to said negative polarity and to said output terminal through a charging preventing circuit used to prevent charging from said charging power source.
3. The power circuit according to claim 1, wherein said power source section comprises a secondary cell connected between an output of a charging circuit and said negative polarity and connected to an output terminal through a charging preventing switch, and a primary cell being connected between said output terminal and said negative polarity.
4. The power circuit according to claim 1, wherein said power source section comprises a fuel tank, a fuel cell to generate power using fuel fed from said fuel tank, and a direct current smoothing controlling section to stabilize a voltage output from said fuel cell and to feed it to an output terminal.
5. The power circuit according to claim 1, wherein said power source section comprises a current setting resistor to set a value of an output current, an operational amplifier to amplify a detected voltage of said current setting resistor, and a switching circuit to control a power current according to an output of said operational amplifier.
6. The power circuit according to claim 1, wherein a storage capacitor in said energy storing section comprises an electric double layer capacitor.
7. The power circuit according to claim 6, wherein said storage capacitor has a capacitor discharging circuit used to cause a charge of said storage capacitor to be shorted through a discharging resistor when a predetermined relationship, determined by comparing a terminal voltage of said storage capacitor with a power voltage, exists.
8. A power circuit for feeding a load current to a load in which said load current repeats periodically and alternately a burst flow in a burst period and a non-burst flow in a non-burst period comprising:
a power source section made up of a direct current power source having one terminal connected to a negative polarity;
a source power controlling section to control a current fed from a second terminal of said power source section being connected to an input terminal to limit voltage drop in said power source section and to feed said current to a load connected to an output terminal; and
an energy storing section having a storage capacitor connected between said output terminal and a negative polarity;
wherein said source power controlling section is provided with a current controlling circuit to control a resistance value of a detecting resistor section, said detecting resistor section having one terminal connected to said negative polarity, according to a result of detection of a voltage input from said power source section, and a switching circuit which has a step-up DC\u2014DC (direct current to direct current) converter circuit comprising a voltage detecting circuit to detect a voltage of an output terminal, a coil and diode connected in series between an input terminal and an output terminal of said source power controlling section, a capacitor connected between said output terminal of said source power controlling section and a negative polarity, and a switching device connected between a connection point of said coil and said diode and another terminal of said detecting resistor section, and which controls a flowing period of an output current by exerting control on said switching device according to a control signal produced by detecting a change in a current through said switching device using a voltage value at said other terminal of said detecting resistor section and a voltage at said output terminal; and
wherein a circuit constant of said source power controlling section, electrostatic capacity and internal resistance of said storage capacitor are determined by following equations:
T1+T2\u2266Tload
\u2003where \u201cT1+T2\u201d denotes a flowing period (Sec) of a power current and \u201cTload\u201d denotes a load period (Sec):
Vo2\u2267IC\xd7{Rc+(Tload\xd7Don)(C\xd7100)}=Vo3
\u2003where \u201cVo\u201d denotes a voltage (V) of said storage capacitor when there is no load current, \u201cIC\u201d denotes a current (A) of said storage capacitor, \u201cRc\u201d denotes an internal resistance (\u03a9) of said storage capacitor, \u201cDon\u201d denotes a duty ratio (%) of a load, \u201cC\u201d denotes a capacity (F) of a storage capacitor, and \u201cVo3\u201d denotes an amount of a voltage drop (V) of a storage capacitor voltage occurring during a burst period.
9. The power circuit according to claim 8, wherein said power source section comprises a secondary cell being connected between an output terminal and said negative polarity and being connected to a charging power source through a charging circuit, and of a primary cell being connected to said output terminal and said negative polarity through a charging preventing circuit used to prevent charging caused by an output from said charging power source.
10. The power circuit according to claim 8, wherein said power source section comprises a secondary cell being connected between an output of a charging circuit and said negative polarity and being connected to an output terminal through a charging preventing switch and of a primary cell being connected between said output terminal and said negative polarity.
11. The power circuit according to claim 8, wherein said power source section comprises a fuel tank, a fuel cell to generate power using fuel fed from said fuel tank, and a direct current smoothing controlling section to stabilize a voltage output from said fuel cell and to feed it to an output terminal.
12. The power circuit according to claim 8, wherein said power source section comprises a current setting resistor to set a value of an output current, an operational amplifier to amplify a detected voltage of said current setting resistor, and a switching circuit to control a power current according to an output of said operational amplifier.
13. The power circuit according to claim 8, wherein a storage capacitor in said energy storing section comprises an electric double layer capacitor.
14. The power circuit according to claim 13, wherein said storage capacitor has a capacitor discharging circuit used to cause a charge of said storage capacitor to be shorted through a discharging resistor when a predetermined relationship, determined by comparing a terminal voltage of said storage capacitor with a power voltage, exists.
15. A power circuit for feeding a load current to a load in which said load current repeats periodically and alternately a burst flow in a burst period and a non-burst flow in a non-burst period comprising:
a power source section made up of a direct current power source-having one terminal connected to a negative polarity;
a source power controlling section to control a current fed from a second terminal of said power source section connected to an input terminal to limit voltage drop in said power source section and to feed said current to a load connected to an output terminal;
an energy storing section having a storage capacitor connected between said output terminal and a negative polarity; and
wherein said source power controlling section is provided with a current controlling circuit to control a resistance value of a detecting resistor section, said detecting resistor section having one terminal connected to an input terminal of said source power controlling section, according to a result of detection of a voltage input from said power source section, and a switching circuit which has a step-down DC\u2014DC converter circuit comprising a voltage detecting circuit for detecting a voltage of an output terminal, a switching device and a coil connected in series between another terminal of said detecting resistor section and an output terminal, a capacitor connected between the output terminal and said negative polarity, and a diode connected between said negative polarity and a connection point between said switching device and said coil, and which controls a flowing period of an output current by exerting control on said switching device according to a control signal produced by detecting a change in an input current based on a voltage across said detecting resistor section, and a voltage at said output terminal; and
wherein a circuit constant of said source power controlling section, electrostatic capacity and internal resistance of said storage capacitor are determined by following equations:
T1+T2\u2266Tload
\u2003where \u201cT1+T2\u201d denotes a flowing period (Sec) of a power current and \u201cTload\u201d denotes a load period (Sec):
Vo2\u2267IC \xd7{Rc+(Tload\xd7Don)(C\xd7100)}=Vo3
\u2003where \u201cVo\u201d denotes a voltage (V) of said storage capacitor when there is no load current, \u201cIC\u201d denotes a current (A) of said storage capacitor, \u201cRc\u201d denotes an internal resistance (\u03a9) of said storage capacitor, \u201cDon\u201d denotes a duty ratio (%) of a load, \u201cC\u201d denotes a capacity (F) of a storage capacitor, and \u201cVo3\u201d denotes an amount of a voltage drop (V) of a storage capacitor voltage occurring during a burst period.
16. The power circuit according to claim 15, wherein said power source section comprises a secondary cell being connected between an output terminal and said negative polarity and being connected to a charging power source through a charging circuit, and of a primary cell being connected to said output terminal and said negative polarity through a charging preventing circuit used to prevent charging caused by an output from said charging power source.
17. The power circuit according to claim 15, wherein said power source section comprises a secondary cell being connected between an output of a charging circuit and said negative polarity and being connected to an output terminal through a charging preventing switch and of a primary cell being connected between said output terminal and said negative polarity.
18. The power circuit according to claim 15, wherein said power source section comprises a fuel tank, a fuel cell to generate power using fuel fed from said fuel tank, and a direct current smoothing controlling section to stabilize a voltage output from said fuel cell and to feed it to an output terminal.
19. The power circuit according to claim 15, wherein said power source section comprises a current setting resistor to set a value of an output current, an operational amplifier to amplify a detected voltage of said current setting resistor, and a switching circuit to control a power current according to an output of said operational amplifier.
20. The power circuit according to claim 15, wherein a storage capacitor in said energy storing section comprises an electric double layer capacitor.
21. The power circuit according to claim 20, wherein said storage capacitor has a capacitor discharging circuit used to cause a charge of said storage capacitor to be shorted through a discharging resistor when a predetermined relationship, determined by comparing a terminal voltage of said storage capacitor with a power voltage, exists.
22. A method for controlling a power circuit to feed a load current to a load, in which said load current repeats periodically and alternately a burst flow in a burst period and a non-burst flow in a non-burst period, which has a power source section made up of a direct current power source with one terminal connected to a negative polarity, a source power controlling section to control a current fed from said power source section, connected to an input terminal, and to feed said current to a load connected to an output terminal, and an energy storing section having a storage capacitor connected between said output terminal and a negative polarity, said method comprising:
a step of controlling a resistance value of a detecting resistor section, said detecting resistor section having one terminal connected to said negative polarity, according to a result of detection of a voltage input from said power source section; and
a step of controlling a flowing period of an output current by exerting control on a switching device in response to a control signal produced by detecting a change in an input power voltage using a voltage value occurring at another terminal of said detecting resistor section, wherein said switching device is connected between an input terminal and an output terminal and a capacitor is connected between said output terminal and a negative polarity; and
wherein a circuit constant of said source power controlling section, electrostatic capacity and internal resistance of said storage capacitor are determined by following equations:
T1+T2\u2266Tload
\u2003where \u201cT1+T2\u201d denotes a flowing period (Sec) of a power current and \u201cTload\u201d denotes a load period (Sec):
Vo2\u2267IC\xd7{Rc+(Tload\xd7Don)(C\xd7100)}=Vo3
where \u201cVo\u201d denotes a voltage (V) of said storage capacitor when there is no load current, \u201cIC\u201d denotes a current (A) of said storage capacitor, \u201cRc\u201d denotes an internal resistance (\u03a9) of said storage capacitor, \u201cDon\u201d denotes a duty ratio (%) of a load, \u201cC\u201d denotes a capacity (F) of a storage capacitor, and \u201cVo3\u201d denotes an amount of a voltage drop (V) of a storage capacitor voltage occurring during a burst period.
23. A method for controlling a power circuit to feed a load current to a load, in which said load current repeats periodically and alternately a burst flow in a burst period and a non-burst flow in a non-burst period, which has a power source section made up of a direct current power source having one terminal connected to a negative polarity, a source power controlling section to control a current fed from said power source section and connected to an input terminal of said source power controlling section, and to feed said current to a load connected to an output terminal of said source power controlling section, and an energy storing section having a storage capacitor connected between said output terminal and a negative polarity, said method comprising:
a step of controlling a resistance value of a detecting resistor section having one terminal connected to said negative polarity, according to a result of detection of a voltage input from said power source section; and
a step of controlling a flowing period of an output current by exerting control on a switching device according to a control signal produced by detecting a change in a current of said switching device using a voltage value at another terminal of said detecting resistor section, and a voltage at said output terminal in a step-up DC\u2014DC converter circuit comprising a coil and diode connected in series between an input terminal and an output terminal, a capacitor connected between said output terminal and a negative polarity, and a switching device connected between a connection point of said coil and said diode and said other terminal of said detecting resistor section; and
wherein a circuit constant of said source power controlling section, electrostatic capacity and internal resistance of said storage capacitor are determined by following equations:
T1+T2\u2266Tload
\u2003where \u201cT1+T2\u201d denotes a flowing period (Sec) of a power current and \u201cTload\u201d denotes a load period (Sec):
Vo2\u2267IC\xd7{Rc+(Tload\xd7Don)(C\xd7100)}=Vo3
\u2003where \u201cVo\u201d denotes a voltage (V) of said storage capacitor when there is no load current, \u201cIC\u201d denotes a current (A) of said storage capacitor, \u201cRc\u201d denotes an internal resistance (\u03a9) of said storage capacitor, \u201cDon\u201d denotes a duty ratio (%) of a load, \u201cC\u201d denotes a capacity (F) of a storage capacitor, and \u201cVo3\u201d denotes an amount of a voltage drop (V) of a storage capacitor voltage occurring during a burst period.
24. A method for controlling a power circuit to feed a load current to a load, in which said load current repeats periodically and alternately a burst flow in a burst period and a non-burst flow in a non-burst period, which has a power source section made up of a direct current power source having one terminal connected to a negative polarity, a source power controlling section to control a current fed from said power source section connected to an input terminal of said power controlling section, and to feed said current to a load connected to an output terminal of said power controlling section, and an energy storing section having a storage capacitor connected between said output terminal and said negative polarity, said method comprising:
a step of controlling a resistance value of a detecting resistor section having one terminal connected to an input terminal according to a result of detection of a voltage input from said power source section; and
a step of controlling a flowing period of an output current by exerting control on a switching device according to a control signal produced by detecting a change in an input current based on a voltage across said detecting resistor section, and a voltage at said output terminal of a step-down DC\u2014DC converter circuit comprising a switching device and a coil connected in series between another terminal of said detecting resistor and an output terminal, a capacitor connected between the output terminal and said negative polarity, and a diode connected between a connection point between said switching device and said coil and said negative polarity; and
wherein a circuit constant of said source power controlling section, electrostatic capacity and internal resistance of said storage capacitor are determined by following equations:
T1+T2\u2266Tload
\u2003where \u201cT1+T2\u201d denotes a flowing period (Sec) of a power current and \u201cTload\u201d denotes a load period (Sec):
Vo2\u2267IC\xd7{Rc+(Tload\xd7Don)(C\xd7100)}=Vo3
\u2003where \u201cVo\u201d denotes a voltage (V) of said storage capacitor when there is no load current, \u201cIC\u201d denotes a current (A) of said storage capacitor, \u201cRc\u201d denotes an internal resistance (\u03a9) of said storage capacitor, \u201cDon\u201d denotes a duty ratio (%) of a load, \u201cC\u201d denotes a capacity (F) of a storage capacitor, and \u201cVo3\u201d denotes an amount of a voltage drop (V) of a storage capacitor voltage occurring during a burst period.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method of imprint lithography, comprising:
imprinting, via a patterned mask, a pattern into a resist layer on a substrate; and
overlaying a cladding layer over said imprinted resist layer,
wherein a portion of the cladding layer is used as a hard mask for a subsequent processing.
2. The method of claim 1, where said overlaying comprises spinning-on said cladding layer on top of said imprinted resist layer.
3. The method of claim 1, wherein said overlaying comprises depositing the cladding layer by evaporation.
4. The method of claim 1, wherein said overlaying comprises depositing the cladding layer by sputtering.
5. The method of claim 1, further comprising:
adjusting a thickness of the cladding layer via chemical mechanical polishing (CMP).
6. The method of claim 1, wherein said cladding layer comprises a planarizing cladding layer.
7. The method of claim 1, wherein a transfer of the imprinted pattern is performed in a plurality of etches,
wherein a first etch, which is selective to the cladding layer, partially etches the cladding layer to expose elevated portions of the imprint layer,
wherein said first etch comprises one of a reactive ion etch, sputter etch, plasma etch, wet chemical etch and a chemical downstream etch,
wherein a second etch, which is selective to the imprint layer and not selective to the cladding layer, etches the portions of the imprint layer that were exposed in the first etch to a substrate under said cladding layer, and
wherein said second etch comprises one of a reactive ion etch, sputter etch, plasma etch, a wet chemical etch and a chemical downstream etch.
8. The method of claim 7, wherein a third process modifies the substrate, said third process comprising a further processing comprising one of an etch, a deposit, and an implanting of a material.
9. The method of claim 1, wherein said imprint resist comprises a cross-linked organic acrylate, and wherein said cladding layer comprises a silated planarizing resist.
10. The method of claim 1, wherein the cladding layer is applied in a liquid form.
11. The method of claim 7, wherein said first etch comprises one of a reactive ion etch (ME) and an isotropic etch, thereby to etch the cladding layer to expose tops of imprinted features.
12. The method of claim 7, wherein said second etch comprises a deeper etch than said first etch.
13. The method of claim 1, further comprising:
supporting said patterned mask by a plurality of feet.
14. The method of claim 13, wherein said feet comprise support spacers placed on the mask surface in unpatterned regions thereof.
15. The method of claim 13, wherein said feet are placed by one of evaporating and sputtering a mechanically stable material through a mask, a thickness of the feet being within a range of about 3 to about 5 times a minimum feature size being printed.
16. An imprint lithography method, comprising:
placing a planarizing, cladding layer over an imprinted layer,
wherein a portion of said cladding layer is used as a hard mask for a subsequent processing.
17. The method of claim 16, wherein said imprinted layer is placed using
an imprint process wherein the imprint mask is mechanically supported with a plurality of feet.