1. A method of fabricating an extreme ultraviolet photomask, comprising:
providing a mask comprising, in order, a substrate, a reflective layer, and a capping layer;
forming an opening in the capping layer and at least a portion of the reflective layer;
forming an absorber layer in the opening and over a top surface of the capping layer; and
removing at least a portion of the absorber layer, while leaving another portion of the absorber layer to form an absorber, wherein the absorber has a top surface lower than a top surface of the capping layer.
2. The method of claim 1, wherein the absorber has the top surface lower than a top surface of the reflective layer.
3. The method of claim 1, wherein a height difference of the top surface of the absorber and the top surface of the capping layer ranges between about 20 nm and about 50 nm.
4. The method of claim 1, wherein the reflective layer comprises alternating Mo and Si layers ranging between about 20 pairs and about 80 pairs.
5. The method of claim 1, further comprising:
forming an underlying reflective layer over the substrate; and
forming an intervening layer between the underlying reflective layer and the reflective layer.
6. The method of claim 5, wherein the intervening layer includes Cr, Ru, or a combination thereof.
7. The method of claim 5, wherein the absorber is formed on the intervening layer.
8. The method of claim 5, wherein the underlying reflective layer comprises alternating Mo and Si layers ranging between about 20 pairs and about 40 pairs.
9. The method of claim 5, wherein a thickness ratio of the reflective layer to the underlying reflective layer ranges between about 0.25 and about 1.
10. The method of claim 1, further comprising forming a planarization layer over the absorber layer.
11. The method of claim 10, wherein the planarization layer is Ag2O3, Si-containing layer, Carbon-containing layer, or combinations thereof
12. The method of claim 10, further comprising removing the planarization layer before removing the at least a portion of the absorber layer.
13. The method of claim 1, wherein the absorber layer is TaSi, TaBN, TaN, TaSiON, TaBO, or TaON.
14. The method of claim 1, wherein the absorber has a thickness ranging between about 20 nm and about 150 nm.
15. The method of claim 1, further comprising forming a hard mask layer over the capping layer.
16. The method of claim 15, further comprising removing the hard mask after forming the absorber.
17. The method of claim 1, wherein the step of removing includes a CMP process andor a dry etching process.
18. An extreme ultraviolet photomask, comprising:
a reflective layer over a substrate;
a capping layer over the reflective layer; and
an absorber in the capping layer and the reflective layer, wherein a top surface of the absorber is lower than a top surface of the capping layer.
19. A method for forming an integrated circuit comprising:
forming a photomask by
forming a reflective layer over a substrate;
forming a capping layer over the reflective layer; and
forming an absorber in the capping layer and the reflective layer, wherein a top surface of the absorber is lower than a top surface of the capping layer;
forming a layer on a substrate; and
patterning the layer using the photomask in a photolithography step.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An automotive interior component comprising:
an automotive instrument panel having an outer surface and an inner surface;
an automotive Passenger Side Inflatable Restraint (PSIR) hidden chute assembly contained behind the automotive instrument panel, wherein the PSIR hidden chute assembly has a chute and at least one PSIR door, the chute being connected to the inner surface of the automotive instrument panel; and,
a tuning clip connected to the chute and configured to engage the PSIR door;
wherein engagement of the tuning clip to the PSIR door reduces deflection of the automotive instrument panel visible on the outer surface by biasing the PSIR door upward.
2. The automotive interior component of claim 1, further comprising a plurality of tuning clips.
3. The automotive interior component of claim 2, wherein the plurality of tuning clips comprises four tuning clips.
4. The automotive interior component of claim 1, wherein the PSIR door has a protruding portion for engagement with the tuning clip.
5. The automotive interior component of claim 1, further comprising a PSIR forward door and PSIR rearward door.
6. The automotive interior component of claim 1, wherein the automotive instrument panel is bonded to the PSIR hidden chute assembly via vibration welding.
7. The automotive interior component of claim 1, wherein the tuning clip is manually engaged to the PSIR door.
8. The automotive interior component of claim 1, wherein the tuning clip has a handle portion upon which a sufficient amount of manual pressure is applied to the handle portion to engage the tuning clip to the PSIR door.
9. An apparatus for attaching an automotive Passenger Side Inflatable Restraint (PSIR) hidden chute assembly to an automotive instrument panel comprising:
a PSIR hidden chute assembly having a chute, a PSIR forward door, and a PSIR rearward door, the chute being connected to an inner surface of an automotive instrument panel; and,
a plurality of tuning clips connected to the chute and configured to engage at least one of the PSIR forward door and the PSIR rearward door;
wherein engagement of the plurality of tuning clips to the PSIR forward door and the PSIR rearward door reduces deflection of the automotive instrument panel visible on an outer surface by biasing the PSIR forward door and PSIR rearward door upward.
10. The apparatus of claim 9, wherein the plurality of tuning clips comprises four tuning clips.
11. The apparatus claim 9, wherein the PSIR forward door has a protruding portion for engagement with at least one of the plurality of tuning clips, and wherein the PSIR rearward door has a protruding portion for engagement with at least one of the plurality of tuning clips.
12. The apparatus of claim 9, wherein the automotive instrument panel is bonded to the PSIR hidden chute assembly via vibration welding.
13. The apparatus of claim 9, wherein the plurality of tuning clips are manually engaged to the PSIR forward door and the PSIR rearward door.
14. The apparatus of claim 9, wherein each of the plurality of tuning clips has a handle portion upon which a sufficient amount of manual pressure is applied to the handle portion to engage the plurality of tuning clips to the PSIR forward door and the PSIR rearward door.
15. A method for manufacturing an automotive interior component comprising:
providing an automotive instrument panel having an outer surface and an inner surface;
providing a Passenger Side Inflatable Restraint (PSIR) chute assembly having a tuning clip and a PSIR door;
aligning the automotive instrument panel to the PSIR door;
heating a connection between the PSIR chute assembly and the automotive instrument panel;
cooling the connection between the PSIR chute assembly and the automotive instrument panel; and,
engaging the tuning clip to bias the PSIR door upward, wherein engagement of the tuning clip to the PSIR door reduces deflection of the automotive instrument panel visible on the outer surface.
16. The method of claim 15, wherein the PSIR chute assembly further comprises a chute and the PSIR door comprises a protruding portion, and wherein the tuning clip is connected to the chute and configured to engage the protruding portion of the PSIR door.
17. The method of claim 15, wherein heating the connection further comprises vibration welding.
18. The method of claim 15, further comprising a plurality of four tuning clips.
19. The method of claim 15, further comprising a PSIR forward door and PSIR rearward door.
20. The method of claim 15, wherein the tuning clip has a handle portion upon which a sufficient amount of manual pressure is applied to the handle portion to engage the tuning clip to the PSIR door.