1. Coherent scatter computer tomography apparatus for examination of an object of interest, comprising:
a source of radiation;
a first radiation detector; and
a second radiation detector; wherein the source of radiation generates a radiation beam adapted to penetrate the object of interest in a fan plane and wherein the source of radiation is inclined with respect to the fan plane; wherein the coherent scatter computer tomography apparatus further comprises a collimator arranged between the source of radiation and the object of interest, wherein the collimator comprises a plurality of collimator portions that collimate the radiation beam in a direction substantially perpendicular to the fan plane, wherein the first radiation detector is arranged opposite to the source of radiation in the fane plane; wherein the first radiation detector is arranged to detect a first radiation of the collimated radiation beam; wherein the second radiation detector is arranged opposite to the source of radiation with an offset from the fan plane in a direction normal to the fan plane; wherein the second radiation detector is arranged to detect a second radiation of the collimated radiation beam scattered from a location in the object of interest; wherein at the location, the second radiation has a dimension in the direction normal to the fan plane; wherein a scatter angle between photons of the second radiation scattered at the location along the dimension from the fan plane is constant.
2. The coherent scatter computer tomography apparatus of claim 1, wherein the radiation beam is focused at a focus point by the collimator; wherein the focus point is at a distance from the source of radiation; and wherein the second radiation detector is arranged at the distance from the source of radiation.
3. The coherent scatter computer tomography apparatus of claim 1, wherein the collimator is adapted to collimate the radiation beam such that the radiation beam is focused at a focus point being at the same distance form the source of radiation as the second radiation detector.
4. The coherent scatter computer tomography apparatus of claim 3, wherein the collimator comprises a first plurality of high-Z material sheets and a second plurality of tapered plastic layers sandwiched between the first plurality of high-Z material sheets, wherein each of the first plurality of high-Z material sheets and each of the second plurality of tapered plastic layers have an inclination with respect to each other of the first plurality of high-Z material sheets and other each of the second plurality of tapered plastic layers.
5. The coherent scatter computer tomography apparatus of claim 3, wherein the collimator comprises a first plurality of high-Z material sheets and a second plurality of plastic layers sandwiched between the first plurality of high-Z material sheets; wherein the focusing of the radiation beam at the focus point is performed by deforming the plastic layers by applying inhomogeneous mechanical pressure onto the collimator such that each of the first plurality of high-Z material sheets and each of the second plurality of tapered plastic layers have an inclination with respect to each other of the first plurality of high-Z material sheets and other each of the second plurality of tapered plastic layers.
6. The coherent scatter computer tomography apparatus of claim 1, wherein each of the first and second detectors comprises a line of detector elements, each of these lines being arranged in parallel to the fan plane.
7. A method of examining an object of interest with a coherent scatter computer tomography apparatus, the method comprising the acts of:
generating a radiation beam penetrating the object of interest in a fan plane, wherein the radiation beam is generated as stacked collimated beams that are stacked in a direction substantially perpendicular to the fan plan and wherein a source of the radiation beam is inclined with respect to the fan plane;
detecting a first radiation of the radiation beam transmitted through the object of interest;
detecting a second radiation of the radiation beam scattered from a location in the object of interest; wherein the location has an offset from the fan plane in a direction normal to the fan plane; wherein at the location, the second radiation has a dimension in the direction normal to the fan plane; wherein the radiation beam is generated such that a scatter angle between photons of the second radiation scattered at the location along the dimension from the fan plane is constant.
8. The method of claim 7, wherein the collimated beams are focused at a focus point having the same distance from a source of radiation as a point where the second radiation is detected.
9. A software program stored on a computer-readable medium for controlling a computer tomography apparatus, wherein, when the software is executed on a processor of the computer tomography apparatus, the computer tomography apparatus performs the following operation:
generating a radiation beam penetrating the object of interest in a fan plane, wherein the radiation beam is generated as stacked collimated beams that are stacked in a direction substantially perpendicular to the fan plan and wherein a source of the radiation beam is inclined with respect to the fan plane;
detecting a first radiation of the radiation beam transmitted through the object of interest;
detecting a second radiation of the radiation beam scattered from a location in the object of interest; wherein the location has an offset from the fan plane in a direction normal to the fan plane; wherein at the location, the second radiation has a dimension in the direction normal to the fan plane; wherein the radiation beam is generated such that a scatter angle between photons of the second radiation scattered at the location along the dimension from the fan plane is constant.
10. The coherent scatter computer tomography apparatus of claim 4, wherein the second plurality of tapered plastic layers form tapers that vary with respect to each other such that a beam path through one of the collimator portions varies in length with respect to another one of the collimator portions.
11. The coherent scatter computer tomography apparatus of claim 1, wherein the second radiation detector is portion of a flat radiation detector.
12. The coherent scatter computer tomography apparatus of claim 1, comprising a table of reconstruction scatter functions, wherein the coherent scatter computer tomography apparatus is configured to determine a scatter function from the detected first and second radiation and is configured to compare the determined scatter function to the table of reconstruction scatter functions.
13. The method of claim 7 comprising an act of providing a collimator arranged between the source of radiation and the object of interest, wherein the collimator comprises a plurality of collimator portions that inclined with respect to each other and that collimate the radiation beam in a direction substantially perpendicular to the fan plane.
14. The method of claim 7, comprising an acts of:
determining a scatter function from the detected first and second radiation; and
comparing the determined scatter function to a table of reconstruction scatter functions.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A detection system capable of automatically adjusting a gray scale, comprising:
a detection lens, wherein the detection lens is configured to collect a mask alignment image and a substrate alignment image respectively formed by images of a mask alignment mark on a mask and a substrate alignment mark on the glass substrate; and
an automatic filter device provided in a light path in which the detection lens forms the substrate alignment image, wherein the automatic filter device comprises an automatic gray scale detection module, a control module and a filter,
wherein the automatic gray scale detection module is configured to detect a gray scale of the substrate alignment image formed by the detection lens, the control module is configured to add or remove the filter according to the gray scale of the substrate alignment image detected by the automatic gray scale detection module, and the filter is configured to filter out a portion of light in the optical path to reduce the gray scale of the substrate alignment image.
2. The detection system capable of automatically adjusting a gray scale according to claim 1, wherein the filter is provided in front of the detection lens.
3. The detection system capable of automatically adjusting a gray scale according to claim 1, wherein the filter can be red, blue or green.
4. The detection system capable of automatically adjusting a gray scale according to claim 3, wherein the filter has the same color as that of a color layer required to be fabricated in the process where the detection system is applied.
5. The detection system capable of automatically adjusting a gray scale according to claim 1, further comprising:
a light source configured to emit light for irradiating on the substrate alignment mark of the glass substrate and the mask alignment mark of the mask so that a recognizable degree of the substrate alignment mark and the mask alignment mark is improved.
6. The detection system capable of automatically adjusting a gray scale according to claim 5, further comprising:
a semi-transparent reflector provided between the detection lens and the mask, wherein the semi-transparent reflector is configured to reflect the light emitted by the light source to irradiate on the mask alignment mark and the substrate alignment mark.
7. A method of automatically adjusting a gray scale of a detection system, comprising:
detecting a gray scale of a substrate alignment image formed by a detection lens; and
adding or removing a filter in a light path in which the detection lens forms the substrate alignment image according to the gray scale of the substrate alignment image so as to change the gray scale of the substrate alignment image.
8. The method according to claim 7, wherein the filter is added manually or automatically.
9. A method of aligning a mask with a glass substrate, using a plurality of detection systems to align a plurality of mask alignment marks on a mask with a plurality of corresponding substrate alignment marks on the glass substrate to align the mask with the glass substrate, and comprising:
detecting gray scales of the substrate alignment images formed by the detection lenses of the detection systems; and
when the substrate alignment images of the detection systems have inconsistent gray scales, adding a filter in the light path in which the detection lens forms the substrate alignment image having a high gray scale in the detection system to reduce the gray scale of the substrate alignment image so that the gray scales of the substrate alignment images formed by the detection lenses in the detection systems are consistent.
10. The method of aligning the mask with the glass substrate according to claim 9, wherein, if a filter is required to be added in the light path in which the detection lens forms the substrate alignment image, a color of the filter is the same as that of a color layer required to be fabricated in the process where the detection system is applied.
11. The method of aligning the mask with the glass substrate according to claim 9, wherein, if a filter is required to be added in the light path in which the detection lens forms the substrate alignment image, the filter is provided in front of the detection lens.
12. The method of aligning the mask with the glass substrate according to claim 11, wherein the filter is added manually or automatically.
13. The detection system capable of automatically adjusting a gray scale according to claim 2, wherein the filter can be red, blue or green.
14. The detection system capable of automatically adjusting a gray scale according to claim 13, wherein the filter has the same color as that of a color layer required to be fabricated in the process where the detection system is applied.
15. The detection system capable of automatically adjusting a gray scale according to claim 1, wherein the filter has the same color as that of a color layer required to be fabricated in the process where the detection system is applied.
16. The detection system capable of automatically adjusting a gray scale according to claim 2, wherein the filter has the same color as that of a color layer required to be fabricated in the process where the detection system is applied.
17. The detection system capable of automatically adjusting a gray scale according to claim 2, further comprising:
a light source configured to emit light for irradiating on the substrate alignment mark of the glass substrate and the mask alignment mark of the mask so that a recognizable degree of the substrate alignment mark and the mask alignment mark is improved.
18. The detection system capable of automatically adjusting a gray scale according to claim 3, further comprising:
a light source configured to emit light for irradiating on the substrate alignment mark of the glass substrate and the mask alignment mark of the mask so that a recognizable degree of the substrate alignment mark and the mask alignment mark is improved.
19. The detection system capable of automatically adjusting a gray scale according to claim 4, further comprising:
a light source configured to emit light for irradiating on the substrate alignment mark of the glass substrate and the mask alignment mark of the mask so that a recognizable degree of the substrate alignment mark and the mask alignment mark is improved.
20. The detection system capable of automatically adjusting a gray scale according to claim 19, further comprising:
a semi-transparent reflector provided between the detection lens and the mask, wherein the semi-transparent reflector is configured to reflect the light emitted by the light source to irradiate on the mask alignment mark and the substrate alignment mark.