1. A structure comprising:
a wafer having an edge and extreme edges; and
a trough andor via formed within a dielectric on the wafer, wherein
the trough andor via has a barrier of TaN (tantalum nitride) with a mol percentage of nitride (N) with respect to a total Ta plus N being from about 25% to 90%, and
the edge and extreme edges of the wafer have TaN deposited thereon with the mol percentage of N with respect to the total Ta plus N being from about 25% to 90%.
2. The structure of claim 1, wherein the mol percentage of N with respect to the total Ta plus N is from about 30% to 35% at the edge and extreme edges of the wafer.
3. The structure of claim 1, wherein the N leaks from a back side of the wafer to a surface of the wafer.
4. The method of claim 3, wherein the mol percentage of the N is in a range of about 30% to 35%.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A fixing device for fixing a toner image to a recording medium, comprising:
an endless belt moving in a first direction;
a heating member for heating the endless belt;
a first pressing member contacting with the endless belt and extending the endless belt together with the heating member;
a second pressing member for pressing the endless belt and sandwiching the endless belt together with the first pressing member; and
a thermal conductive member, contacting with an inner surface of the endless belt and disposed along a second direction crossing the first direction,
wherein said thermal conductive member is configured so that a center portion of the thermal conductive member contacts with the endless belt over a distance shorter than that of an end portion of the thermal conductive member along the first direction.
2. The fixing device according to claim 1, wherein said thermal conductive member includes the center portion having a contacting portion contacting with the endless belt and a non-contacting portion not contacting with the endless belt.
3. The fixing device according to claim 1, wherein said heating member is formed in a plate shape.
4. The fixing device according to claim 1, further comprising a supporting member for supporting the heating member, said supporting member and said first pressing member extending the endless belt.
5. The fixing device according to claim 1, wherein said heating member is disposed at an upstream side of the second pressing member in the first direction.
6. The fixing device according to claim 4, wherein said supporting member is adopted to support the thermal conductive member.
7. The fixing device according to claim 1, wherein said thermal conductive member is disposed at an upstream side of the heating member in the first direction.
8. The fixing device according to claim 1, wherein said thermal conductive member is adopted to support the heating member and extend the endless belt.
9. An image forming apparatus comprising the fixing device according to claim 1.
10. The fixing device according to claim 1, wherein said thermal conductive member includes the center portion having a contacting portion contacting with the endless belt at a middle thereof in the first direction, a first non-contacting portion not contacting with the endless belt on an upstream side thereof in the first direction, and a second non-contacting portion not contacting with the endless belt on a downstream side thereof in the first direction.
11. The fixing device according to claim 10, wherein said first non-contacting portion has a length in the first direction greater than that of the second non-contacting portion.
12. The fixing device according to claim 10, wherein said heating member is disposed between the first non-contacting portion and the second non-contacting portion.