1. A pattern writing apparatus, comprising:
a storage device configured to input and store pattern data of a mask pattern of each of a plurality of sub-regions created by dividing a pattern region of a desired pattern that is to be formed on a semiconductor substrate, the pattern data is input from outside;
a merge processing unit, configured by hardware, software for a computer, or a combination of hardware and software, to read the pattern data of the mask pattern of each of the sub-regions and to merge the mask pattern of each of the sub-regions to be rearranged according to the desired pattern to produce a merged mask pattern;
a correction amount calculation unit, configured by hardware, the software, or a combination of hardware and the software, to calculate a correction amount to correct a pattern dimension error, by loading effect, in each of a plurality of mesh regions created by dividing the merged mask pattern; and
a pattern writing unit to write the mask pattern corrected by the correction amount for each of the mesh regions in an independent separate position on a mask substrate for each of the sub-regions by irradiating a resist layer formed on the mask substrate with a charged particle beam.
2. The apparatus according to claim 1, wherein the storage unit further inputs and stores divided region information indicating a position of each of the sub-regions and illumination light information indicating a shape of illumination light paired with the mask pattern for each of the sub-regions, and
the pattern writing unit writes the mask pattern for each of the sub-regions in the independent separate position on the mask substrate for each of the sub-regions and writes a code graphic pattern indicating the divided region information and the illumination light information in a position on the mask substrate that does not overlap with the mask pattern of each of the sub-regions.
3. The apparatus according to claim 2, further comprising:
a mask information writing data generation unit that inputs condition data including the illumination light information and pupil surface information and multiple exposure information including the divided region information and information indicating region division for each of the sub-regions to generate pattern writing data of the code graphic pattern indicating the divided region information and the information indicating the region division indicated by the multiple exposure information and the illumination light information and the pupil surface information indicated by the condition data.
4. The apparatus according to claim 1, wherein the storage device further inputs and stores divided region information indicating a position of each of the sub-regions and illumination light information indicating a shape of illumination light paired with the mask pattern for each of the sub-regions,
the pattern writing unit writes the mask pattern for each of the sub-regions in the independent separate position on the mask substrate for each of the sub-regions and writes a code graphic pattern indicating the divided region information and the illumination light information in a position on the mask substrate that does not overlap with the mask pattern of each of the sub-regions, and the apparatus further comprising:
a mask information writing data generation unit that inputs condition data including the illumination light information and pupil surface information and multiple exposure information including the divided region information and information indicating region division for each of the sub-regions to generate pattern writing data of the code graphic pattern indicating the divided region information and the information indicating the region division indicated by the multiple exposure information and the illumination light information and the pupil surface information indicated by the condition data.
5. A transfer apparatus, comprising:
a reading unit, configured by hardware, software for a computer, or a combination of hardware and software, to optically read first divided region information indicating positions of a plurality of sub-regions created by dividing a pattern region of a desired pattern that is to be formed on a semiconductor substrate and a plurality of pieces of first illumination light information indicating a shape of illumination light to be paired with a mask pattern within each of the sub-regions of a mask, the reading unit using a reading apparatus to optically read a code graphic pattern formed on the mask;
a judgment unit, configured by hardware, the software, or a combination of hardware and the software, to input a plurality of pieces of second illumination light information indicating the mask pattern within each of the sub-regions and the shape of the illumination light paired for each of the sub-regions to judge whether the first illumination light information and the second illumination light information match for each of the sub-regions; and
an exposure unit to make multiple exposures of the semiconductor substrate in such a way that partial patterns of the sub-regions are sequentially transferred by transferring the mask pattern within the sub-regions to the semiconductor substrate with the illumination light in the shape indicated by the first illumination light information judged to match the second illumination light information within each of the sub-regions.
6. The apparatus according to claim 5, further comprising: a condition setting unit configured to set the shape of the illumination light, which is a condition for the sub-region to be transferred of the plurality of sub-regions.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A face protector, comprising:
a face plate having portions configured to protect the forehead, cheeks, jaw, chin, mouth, ears, and nose of a wearer, the face plate having a front opening configured for positioning over the eyes of a wearer and extending rearwardly over opposite sides of the face towards the ears of a wearer; and
a lens-in-lens assembly secured in the front opening of the face plate;
the lens-in-lens assembly comprising a first, retainer lens secured in the front opening and substantially flush with at least the forehead portion of the face plate, the first lens being of shape and dimensions which substantially match the shape and dimensions of the front opening, a second lens of smaller dimensions behind the first lens to provide a lens-in-a-lens configuration, a back cover behind the second lens, and a retainer assembly configured to releasably secure the second lens and back cover to the first lens; and
at least one magnifying lens configured for selective releasable attachment to the lens-in-lens assembly behind the back cover, wherein the back cover comprises an outer frame and a fastener mechanism extending rearward from the outer frame and configured to releasably secure the magnifying lens to a rear face of the outer frame.
2. The face protector of claim 1, wherein the lens assembly further comprises a spacer between the back cover and second lens.
3. The face protector of claim 2, wherein the spacer comprises an outer frame with a central opening aligned with the second lens.
4. The face protector of claim 2, wherein the lens assembly further comprises an at least substantially transparent lens protector secured behind the second lens between the spacer and second lens.
5. The face protector of claim 2, wherein the spacer comprises a resilient gasket, whereby second lenses of different lens properties and different depths may be selectively secured behind the first lens.
6. The face protector of claim 1, wherein the outer frame has a recessed, rearwardly facing seat with a peripheral rim configured to receive the magnifying lens.
7. The face protector of claim 1, wherein the second lens is an automatic darkening filter (ADF) lens, and the first lens has a cover portion of at least substantially transparent material in front of the second lens.
8. The face protector of claim 7, wherein the first lens has a central opening in front of the second lens and the cover portion comprises a separate front cover member secured in the central opening.
9. The face protector of claim 1, wherein the first lens is releasably secured in the front opening of the face plate.
10. The face protector of claim 1, further comprising a set of interchangeable automatic darkening filter (ADF) second lenses of identical shape and different shades for selectively securing to the first lens.
11. The face protector of claim 1, wherein the first lens is curved and the second lens is at least substantially flat.
12. The face protector of claim 11 wherein the second lens is rectangular.
13. The face protector of claim 12, wherein the dimensions of the second lens are in the range from approximately 2 inches to 4.5 inches in height and approximately 4.0 to 5.0 inches in width.
14. The face protector of claim 11, wherein the first lens has a cover portion of rectangular peripheral shape aligned with the second lens, the cover portion being at least substantially transparent.
15. The face protector of claim 14, wherein the cover portion comprises a front cover member having an outer surface substantially flush with the first lens, and the first lens has an opening in which the cover member is secured.
16. The face protector of claim 14, wherein the first lens has a rearwardly extending receiving section adjacent the cover portion and the retainer assembly comprises releasable fasteners configured to releasably secure the second lens to the receiving section of the first lens.
17. A lens assembly for securing in an opening in a face plate of a face protector, comprising:
a first, retainer lens configured to be secured in the front opening of a face plate and having a curvature substantially matching the curvature of the face plate, the first lens having a central portion extending across the face of a wearer of the face protector and side portions configured to provide peripheral vision to the wearer;
a second lens of smaller dimensions behind the first lens to provide a lens-in-a-lens configuration;
a back cover behind the second lens, the back cover comprising at least an outer frame; and
releasable fasteners configured to releasably secure the back cover and second lens to the first lens; and
at least one magnifying lens for selective, releasable attachment behind the back cover and the outer frame has a rearwardly projecting fastener mechanism configured for releasably securing the magnifying lens to the outer frame.
18. The lens assembly of claim 17, wherein the fastener mechanism comprises at least one spring clip configured for releasable snap engagement with an outer rim of the magnifying lens.
19. The lens assembly of claim 17, further comprising a plurality of magnifying lenses having different magnifications for selective, releasable attachment behind the back cover.
20. The lens assembly of claim 17, further comprising at least one spacer mounted between the second lens and back cover.
21. The lens assembly of claim 20, further comprising an at least substantially transparent lens protector secured between the second lens and spacer, the lens protector being of peripheral shape substantially matching the peripheral shape of the second lens.
22. The lens assembly of claim 20, wherein the spacer comprises an outer frame of elastomeric material having a central opening aligned with the second lens.
23. The lens assembly of claim 22, wherein the outer frame of the spacer has a pair of light blocking projections extending outwards from opposite sides of the frame.
24. The lens assembly of claim 17, further comprising at least one set of interchangeable lenses having different lens properties corresponding to one of said lenses, said one lens being releasably secured in said lens assembly and being interchangeable with other lenses in said one set of interchangeable lenses.
25. The lens assembly of claim 24, wherein the different lens properties comprise at least lens shade.
26. The lens assembly of claim 24, wherein said set of interchangeable lenses comprise automatic darkening filter (ADF) lenses of different shades.
27. The lens assembly of claim 17, further comprising first and second sets of interchangeable lenses having different lens properties and said first and second lenses are selected from the respective first and second set of interchangeable lenses.
28. The lens assembly of claim 17, further comprising a set of interchangeable second lenses having different lens properties for selectively securing between the first lens and back cover, at least some of said second lenses being of different depths, the assembly further comprising a spacer of flexible material between the second lens and back cover for accommodating second lenses of varying depth.
29. The lens assembly of claim 17, wherein the second lens is an automatic darkening filter (ADF) lens, and the first lens has a cover portion of at least substantially transparent material in front of the second lens.
30. A method of using a face protector with an interchangeable lens assembly, comprising:
securing a lens assembly in a front opening in a face plate configured to extend over the face of a wearer to protect the forehead, cheeks, jaw, chin, mouth, ears and nose of a wearer while the lens assembly protects the eyes and areas surrounding the eyes, the lens assembly having a first lens which fits the face plate front opening, a second lens of smaller dimensions behind the first lens, a back cover secured behind the second lens, at least one magnifying lens configured for selective releasable attachment behind the back cover, wherein the back cover comprises an outer frame and a fastener mechanism extending rearward from the outer frame and configured to releasably secure the magnifying lens to a rear face of the outer frame;
applying the assembled face protector to a wearer’s head with the second lens extending in front of the wearer’s eyes when looking forwards and the first lens extending over at least part of the sides of the wearer’s face on each side of the wearer’s eyes to provide peripheral vision to the wearer;
wearing the face protector during an activity; and
removing the face protector after the activity.
31. The method of claim 30, further comprising releasably securing a selected magnifying lens behind the back cover before applying the assembled face protector to a wearer’s head, whereby objects viewed by the wearer through the lens assembly are magnified.