1. A cleaning method using a cleaning apparatus including (1) an adhesive sheet including a base material and an adhesive surface, (2) a flexible conductive sheet in contact with the base material of the adhesive sheet, and (3) a pressing member configured to press the flexible conductive sheet onto the adhesive sheet, the pressing member including (a) a voltage applying mechanism configured to apply either of a positive or a negative voltage to the flexible conductive sheet at a point in time and (b) a pressing force controlling mechanism configured to press the adhesive sheet onto a curved surface of a portion of a vacuum processing apparatus to be cleaned by the cleaning apparatus from above the flexible conductive sheet, the cleaning method comprising:
a first step of pressing the pressing member by a pressing force controlled via the pressing force controlling mechanism so as to press the flexible conductive sheet and the adhesive sheet in order to closely adhere the adhesive surface of the adhesive sheet to the curved surface of the portion of the vacuum processing apparatus to be cleaned by the cleaning apparatus; and
a second step of applying either of a positive or a negative voltage at a point in time to the flexible conductive sheet or applying voltage having temporally changed polarity from the voltage applying mechanism;
wherein _ the first step removes particles attached to the curved surface of the portion of the vacuum processing apparatus to be cleaned by the cleaning apparatus, while the second step generates electrostatic attraction force to attract and remove particles attached to the curved surface of the portion of the vacuum processing apparatus to be cleaned by the cleaning apparatus.
2. The cleaning method according to claim 1,
the cleaning method further comprising:
a third step of removing the adhesive sheet after the second step;
a fourth step of pressing the pressing member by a pressing force controlled by the pressing force controlling mechanism, in order to press the flexible conductive sheet onto a new adhesive sheet so as to closely adhere the adhesive surface of the new adhesive sheet to the curved surface of the portion of the vacuum processing apparatus to be cleaned by the cleaning apparatus; and
a fifth step of applying a DC voltage having an opposite polarity from the polarity of a DC voltage applied to the flexible conductive sheet by the voltage applying mechanism if a DC voltage is applied in the second step;
wherein the second step includes applying either one of a positive or negative DC voltage, or applying voltage having temporally changed polarity; and
wherein _ the electrostatic attraction force generated by the fifth step attracts and removes particles charged with a polarity opposite from that of particles attracted and removed by the second step attached to the curved surface of the portion of the vacuum processing apparatus to be cleaned by the cleaning apparatus.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. Apparatus for testing a component of a drive train of a vehicle, the apparatus comprising
an output drive line for connection to an output of the component,
an input drive line for connection to an input of the component,
the input and output drive lines being operable to test the component with a predetermined combinations of drive speed and torque,
wherein each of the input and output drive lines has a coupling for engaging with a corresponding coupling of the component and each of the drive lines is mounted for movement into and out of engagement with the component,
the coupling of one of the input and output drive lines having a radially facing engagement surface and an axially facing reference surface, the engagement surface of the coupling of the drive line being for engaging with a corresponding radially facing engagement surface of the component the coupling of the component having an axially facing reference surface,
and
a controller arranged to move the said one of the drive lines towards the component so that the engagement surfaces of the coupling and component engage, with their reference surfaces spaced by a predetermined amount, and
to initiate testing of the component whilst maintaining the said engagement and the said predetermined amount of spacing.
2. Apparatus according to claim 1 wherein the controller is arranged to move the coupling of the drive line into engagement with the said corresponding coupling of the component to bring the said reference surfaces being in abutment and then to move the coupling of the drive line away from abutment by the said predetermined amount.
3. Apparatus according to claim 2, wherein the coupling of the drive line has a support member defining the said reference surface and supporting a plurality of engagement members for engaging corresponding engagement parts of the said coupling of the component, the controller being arranged to sense abutment of the reference surfaces after the engagement members engage with the said corresponding engagement parts of the component.
4. Apparatus according to claim 2, wherein the controller is arranged to move the said one of the drive lines at a predetermined rate from a preset position, at which the coupling of the drive line is not engaged with the corresponding coupling of the component, to a further position in which the couplings of the drive line and component are engaged.
5. Apparatus according to claim 4, wherein the controller is arranged to move the drive line at a rate higher than said predetermined rate from a reference position towards the component up to the said preset position.
6. Apparatus according to claim 1, wherein the said coupling is on the input drive line.
7. Apparatus according to claim 1, wherein the said coupling is on the output drive line.
8. Apparatus according to claim 1, comprising a sensor for sensing the distance between the reference surface of the drive line and the reference surface of the component, the controller being arranged to respond to the sensed distance to bring the reference surface of the coupling of the drive line to a position spaced from the reference surface of the component by the said predetermined amount.
9. Apparatus according to claim 1, further comprising a support for supporting the component in a predetermined position relative to the drive line and a sensor on the support for sensing the position of the reference surface of the component relative to the support, the controller being arranged to respond to the sensed distance to bring the reference surface of the coupling of the drive line to a position spaced from the reference surface of the component by the said predetermined amount.
10. Apparatus for testing a component of a drive train of a vehicle, the apparatus comprising
an output drive line for connection to an output of the component,
an input drive line for connection to an input of the component,
the input and output drive lines being operable to test the component with a predetermined combination of drive speed and torque,
wherein each of the input and output drive lines has a coupling for engaging with a corresponding coupling of the component and each of the drive lines is mounted for movement into and out of engagement with the component,
the coupling of one of the input and output drive lines having a radially facing engagement surface and an axially facing reference surface, the engagement surface of the coupling of the drive line being for engaging with a corresponding radially facing engagement surface of the component the coupling of the component having an axially facing reference surface, and
a controller arranged to move the said one of the drive lines towards the component so that the engagement surfaces of the coupling and component engage, and substantially zero axial force is applied to the component and
to initiate testing of the component whilst maintaining the said engagement and substantially zero axial force is applied to the component.
11. A method of testing a component of a drive train of a vehicle, using a test apparatus comprising
an output drive line for connection to an output of the component,
an input drive line for connection to an input of the component,
the input and output drive lines being operable to test the component with a predetermined combination of drive speed and torque,
wherein each of the input and output drive lines has a coupling for engaging with a corresponding coupling of the component and each of the drive lines is mounted for movement into and out of engagement with the component,
the coupling of one of the input and output drive lines having a radially facing engagement surface and an axially facing reference surface, the engagement surface of the coupling of the drive line being for engaging with a corresponding radially facing engagement surface of the component the coupling of the component having an axially facing reference surface, the method comprising,
moving the said one of the drive lines towards the component so that the engagement surfaces of the couplings of the drive line and component engage, with their reference surfaces spaced by a predetermined amount,
testing of the component whilst maintaining the said engagement and the said predetermined amount of spacing, and
moving the input drive line towards the component so that the reference surface of the coupling of the drive line moves into engagement with, and abuts, the corresponding reference surface of the component and then moving the drive line away from abutment by the said predetermined amount whilst maintaining the said engagement, and testing the component whilst maintaining the said engagement and predetermined spacing.
12. A method of testing a component of a drive train of a vehicle, using a test apparatus comprising
an output drive line for connection to an output of the component,
an input drive line for connection to an input of the component,
the input and output drive lines being operable to test the component with a predetermined combination of drive speed and torque,
wherein each of the input and output drive lines has a coupling for engaging with a corresponding coupling of the component and each of the drive lines is mounted for movement into and out of engagement with the component,
the coupling of one of the input and output drive lines having a radially facing engagement surface and an axially facing reference surface, the engagement surface of the coupling of the drive line being for engaging with a corresponding radially facing engagement surface of the component the coupling of the component having an axially facing reference surface, the method comprising,
moving the said one of the drive lines towards the component so that the engagement surfaces of the couplings of the drive line and component engage, with their reference surfaces spaced by a predetermined amount,
testing of the component whilst maintaining the said engagement and the said predetermined amount of spacing, and
measuring the distance from the reference surface of the drive line to the reference surface of the component and controlling movement of the said one of the drive lines towards the component in dependence on the measured distance so that the engagement surfaces of the couplings of the drive line and component engage, with their reference surfaces spaced by a predetermined amount.
13. A method of testing a component of a drive train of a vehicle, using a test apparatus comprising
an output drive line for connection to an output of the component,
an input drive line for connection to an input of the component,
the input and output drive lines being operable to test the component with a predetermined combination of drive speed and torque,
wherein each of the input and output drive lines has a coupling for engaging with a corresponding coupling of the component and each of the drive lines is mounted for movement into and out of engagement with the component,
the coupling of one of the input and output drive lines having a radially facing engagement surface and an axially facing reference surface, the engagement surface of the coupling of the drive line being for engaging with a corresponding radially facing engagement surface of the component the coupling of the component having an axially facing reference surface, the method comprising,
moving the said one of the drive lines towards the component so that the engagement surfaces of the couplings of the drive line and component engage, with their reference surfaces spaced by a predetermined amount,
testing of the component whilst maintaining the said engagement and the said predetermined amount of spacing, and
measuring the distance from the reference surface of the component to a reference position on a support of that component, which reference position is at a preset spacing from a reference position of the drive line and controlling movement of the drive line towards the component in dependence on the measured distance so that the engagement surfaces of the couplings of the drive line and component engage, with their reference surfaces spaced by a predetermined amount.
14. A method of testing a component of a drive train of a vehicle, using a test apparatus comprising
an output drive line for connection to an output of the component,
an input drive line for connection to an input of the component,
the input and output drive lines being operable to test the component with a predetermined combination of drive speed and torque,
wherein each of the input and output drive lines has a coupling for engaging with a corresponding coupling of the component and each of the drive lines is mounted for movement into and out of engagement with the component,
the coupling of one of the input and output drive lines having a radially facing engagement surface and an axially facing reference surface, the engagement surface of the coupling of the drive line being for engaging with a corresponding radially facing engagement surface of the component the coupling of the component having an axially facing reference surface, the method comprising,
moving the said one of the drive lines towards the component so that the engagement surfaces of the couplings of the drive line and component engage, with their reference surfaces spaced by a predetermined amount,
testing of the component whilst maintaining the said engagement and the said predetermined amount of spacing, and
testing a component with different values of spacing of the reference surfaces of the coupling and component to determine empirically the optimum spacing which provides consistent test results and using the empirically determined value as the said predetermined amount.