1. A pattern forming apparatus comprising:
a drawing chamber configured to accommodate a drawing substrate on which a pattern is drawn;
a first temperature controller configured to control a temperature of the drawing chamber;
a constant-temperature member arranged in a position for providing andor absorbing heat with the drawing substrate when the pattern is drawn on the drawing substrate; and
a second temperature controller configured to control a set temperature of the constant-temperature member such that a temperature of the drawing substrate becomes substantially constant when the pattern is drawn.
2. The pattern forming apparatus according to claim 1, wherein the constant-temperature member has a circulation path through which a coolant circulates, and the second temperature controller controls a temperature of the coolant circulating through the circulation path to be substantially constant.
3. The pattern forming apparatus according to claim 2, further comprising:
a first temperature measuring device configured to measure a temperature of a dummy substrate when the pattern is drawn on the dummy substrate;
a storage circuit configured to store the temperature of the dummy substrate measured by the first temperature measuring device while the dummy substrate is varying in position;
a computing circuit configured to compute temperature distribution of the dummy substrate based on the temperature stored in the storage circuit; and
a main control circuit configured to control the second temperature controller based on the temperature distribution.
4. The pattern forming apparatus according to claim 3, wherein the dummy substrate comprises a material which is substantially the same as a material of the drawing substrate and formed in substantially a same shape as a shape of the drawing substrate.
5. The pattern forming apparatus according to claim 3, wherein the first temperature measuring device is attached to the dummy substrate.
6. The pattern forming apparatus according to claim 3, further comprising:
an energy beam optical system configured to draw the pattern, the energy beam optical system supplying a correction value to drawing data to draw the pattern based on the temperature measured by the first temperature measuring device.
7. The pattern forming apparatus according to claim 1, wherein the constant-temperature member has a circulation path through which a coolant circulates, and the second temperature controller controls a temperature of the coolant circulating through the circulation path in accordance with the temperature of the drawing substrate.
8. The pattern forming apparatus according to claim 7, further comprising:
a second temperature measuring device configured to measure the temperature of the drawing substrate when the pattern is drawn; and
a main control circuit configured to control the second temperature controller based on the temperature measured by the second temperature measuring device.
9. The pattern forming apparatus according to claim 8, wherein the second temperature measuring device is attached to a stage which is movably provided to hold the drawing substrate.
10. The pattern forming apparatus according to claim 8, further comprising:
an energy beam optical system configured to draw the pattern, the energy beam optical system supplying a correction value to drawing data to draw the pattern based on the temperature measured by the second temperature measuring device.
11. The pattern forming apparatus according to claim 1, wherein the constant-temperature member is a constant-temperature vessel.
12. The pattern forming apparatus according to claim 11, wherein the constant-temperature vessel has a hole for a drawing beam to pass through.
13. The pattern forming apparatus according to claim 11, wherein at least a part of the constant-temperature vessel is outside of the drawing chamber.
14. The pattern forming apparatus according to claim 1, wherein the first temperature controller is a first temperature regulator and the second temperature controller is a second temperature regulator.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An apparatus for sensing remote load voltages, comprising:
a power converter;
a plurality of remote loads, each remote load located in a loop connected to the power converter;
a feedback loop connected to the power converter, the feedback loop being physically adjacent to the power converter, wherein the feedback loop further comprises a first path and a second path, and the first path and the second path are in parallel; and
an error amplifier connected to the feedback loop;
wherein the error amplifier has a gain defined by
Gav=(N*Ka)*(weighted average individual loop gains), wherein;
Gav is the average gain of the error amplifier,
N is the number of loops, and
Ka is a constant gain adjustment factor.
2. The apparatus of claim 1, wherein the first path further comprises a capacitor-resistor network.
3. The apparatus of claim 1, wherein the first path further includes a low-pass filter.
4. The apparatus of claim 1, wherein the first path further includes a high-pass filter.
5. The apparatus of claim 1, wherein the first path further includes a band-pass filter.
6. An apparatus for sensing remote load voltages, comprising:
a power converter;
a plurality of feedback loops, each respective feedback loop having a specified loop impedance relative to a desired loop gain and connected to an output terminal of the power converter at one end;
a plurality of loads, each load situated in a respective feedback loop at a specified distance from the power converter;
an error amplifier, including
a first one of said plurality of feedback loops including a remote load,
a second one of said plurality of feedback loops being in parallel with said first loop and being physically adjacent to said controller; said second one of said plurality of feedback loops being directly connected to a summing node input of the error amplifier;
wherein each load has a critical voltage point and the error amplifier has an output equal to a sum of a plurality of critical voltage points times the gain of each feedback loop to and including the error amplifier, the error amplifier output being defined by
E0=Zf(i1+i2+i3+ . . . +iN),
wherein Zf is the impedance of a gain compensation network of the error amplifier,
i is the current flowing through a feedback loop, and
N represents the number feedback loops.
7. The apparatus of claim 6, wherein the plurality of loads include at least one of a nearby load, a remote load, a converter terminal voltage and an inductor terminal voltage.
8. The apparatus of claim 6, wherein the critical voltage point comprises one or more of a remote load, a nearby load, a converter terminal voltage, and an inductor terminal voltage.
9. The method of claim 6, wherein the impedance is set using a resistor-capacitor network.
10. The method of claim 6, wherein the impedance comprises a desired relative gain of each feedback loop.
11. The method of claim 6, wherein the impedance for each feedback loop comprises configuring a specific feedback loop response.
12. The method of claim 6, wherein each feedback loop has at least one critical point.
13. The method of claim 12, wherein the critical point comprises one or more of a remote load, a nearby load, a converter terminal voltage, and an inductor terminal voltage.
14. An apparatus for sensing remote load voltages, comprising:
a power converter;
a plurality of feedback loops, each respective feedback loop having a specified loop impedance relative to a desired loop gain and connected to an output terminal of the power converter at one end;
a plurality of loads, each load situated in a respective feedback loop at a specified distance from the power converter;
an error amplifier, including
a first one of said plurality of feedback loops including a remote load,
a second one of said plurality of feedback loops being in parallel with said first loop and being physically adjacent to said controller; said second one of said plurality of feedback loops being directly connected to a summing node input of the error amplifier;
wherein the error amplifier has a gain defined by
Gav=(N*Ka)*(weighted average individual loop gains), wherein
Gav is the average gain of the error amplifier,
N is the number of loops, and
Ka is a constant gain adjustment factor.
15. The apparatus of claim 14, wherein the plurality of loads include at least one of a nearby load, a remote load, a converter terminal voltage, and or inductor terminal voltage.
16. The method of claim 14, wherein the impedance is set using a resistor-capacitor network.
17. The method of claim 14, wherein the impedance comprises a desired relative gain of each feedback loop.
18. The method of claim 14, wherein the impedance for each feedback loop comprises configuring a specific feedback loop response.
19. The method of claim 14, wherein each feedback loop has at least one critical point.
20. The method of claim 19, wherein the critical point comprises one or more of a remote load, a nearby load, a converter terminal voltage, or an inductor terminal voltage.