1. A method of manufacturing a light emitting element comprising, sequentially:
(a) forming a mask layer for selective growth formed from a material different from a material that configures a first compound semiconductor layer on a region outside an element forming region on a substrate for manufacturing a light emitting element;
(b) forming a layered structure body by layering a first compound semiconductor layer formed from a GaN-based compound semiconductor, which has a first surface and a second surface opposing the first surface, wherein the first surface contacts the substrate between portions of the mask layer, an active layer formed from a GaN-based compound semiconductor, which contacts the second surface of the first compound semiconductor layer, and a second compound semiconductor layer formed from a GaN-based compound semiconductor, which has a first surface and a second surface opposing the first surface, and in which the first surface contacts the active layer on the element forming region;
(c) forming, on the second surface of the second compound semiconductor layer, a second electrode and a second light reflecting layer formed from a multilayer film;
(d) fixing the second light reflecting layer to a support substrate;
(e) removing the substrate for manufacturing a light emitting element, and exposing the first surface of the first compound semiconductor layer and the mask layer; and
(f) forming a first light reflecting layer formed from a multilayer film and a first electrode on the first surface of the first compound semiconductor layer.
2. The method of manufacturing a light emitting element according to claim 1,
wherein exposure of the first surface of the first compound semiconductor layer and the mask layer in (e) is performed based on a chemicalmechanical polishing method.
3. The method of manufacturing a light emitting element according to claim 1,
wherein a step portion is formed on the first compound semiconductor layer by etching a part of the first surface of the first compound semiconductor layer before the first electrode is formed on the first surface of the first compound semiconductor layer in (f), and
the first light reflecting layer is formed on at least an inside of the step portion, and the first electrode is formed on at least the outside of the step portion in (f).
4. The method of manufacturing a light emitting element according to claim 3,
wherein the first light reflecting layer is formed on a convexity of the first surface of the first compound semiconductor layer, and
the first electrode is formed on a concavity of the first surface of the first compound semiconductor layer.
5. The method of manufacturing a light emitting element according to claim 3,
wherein a value of the surface roughness Ra of the first surface of the first compound semiconductor layer on an inside of the step portion is 3\xd710\u22129 m or less, and
the value of the surface roughness Ra of the first surface of the first compound semiconductor layer on the outside of the step portion exceeds the value of the surface roughness Ra of the first surface of the first compound semiconductor layer on the inside of the step portion.
6. The method of manufacturing a light emitting element according to claim 3,
wherein R2R1\u22661 is satisfied, where the contact resistance value of the first surface of the first compound semiconductor layer inside the step portion is R1, and the contact resistance value of the first surface of the first compound semiconductor layer outside the step portion is R2.
7. A method of manufacturing a light emitting element comprising, sequentially:
(a) forming a mask layer for selective growth formed from a material different from a material that configures a first compound semiconductor layer on a region outside an element forming region on a substrate for manufacturing a light emitting element, and forming a first light reflecting layer formed from a multilayer film, which has a convex shape on the element forming region;
(b) forming a layered structure body by layering a first compound semiconductor layer formed from a GaN-based compound semiconductor, which has a first surface and a second surface opposing the first surface, wherein the first surface contacts the substrate between portions of the mask layer and the first light reflecting layer, an active layer formed from a GaN-based compound semiconductor, which contacts the second surface of the first compound semiconductor layer, and a second compound semiconductor layer formed from a GaN-based compound semiconductor, which has a first surface and a second surface opposing the first surface, and in which the first surface contacts the active layer on the substrate for manufacturing a light emitting element including the first light reflecting layer;
(c) forming, on the second surface of the second compound semiconductor layer, a second electrode and a second light reflecting layer formed from a multilayer film;
(d) fixing the second light reflecting layer to a support substrate;
(e) removing the substrate for manufacturing a light emitting element, and exposing the first surface of the first compound semiconductor layer, the mask layer, and the first light reflecting layer; and
(f) forming a first electrode on at least the first surface of the first compound semiconductor layer.
8. The method of manufacturing a light emitting element according to claim 7,
wherein exposure of the first surface of the first compound semiconductor layer, the mask layer and the first light reflecting layer in (e) is performed based on a chemicalmechanical polishing method.
9. The method of manufacturing a light emitting element according to claim 7,
wherein a part of the first surface of the first compound semiconductor layer on which the first electrode is to be formed is etched, before the first electrode is formed on the first surface of the first compound semiconductor layer in (f).
10. The method of manufacturing a light emitting element according to claim 7,
wherein an area centroid of the second light reflecting layer is not present on a normal line with respect to the first light reflecting layer that passes through the area centroid of the first light reflecting layer.
11. The method of manufacturing a light emitting element according to claim 7,
wherein an area centroid of the active layer is not present on a normal line with respect to the first light reflecting layer that passes through the area centroid of the first light reflecting layer.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method for automatically identifying tooth crowns in a virtual three-dimensional model of teeth in a dental arch, comprising the steps of:
a) storing said model in a memory accessible to a general-purpose computer, said computer including a processing unit;
b) providing machine readable instructions for execution by said processing unit, said instructions comprising instructions operating on said model in the following respects:
1) orientating said model with reference to a plane;
2) automatically determining local maxima of the model and areas bounded by said local maxima;
3) automatically determining saddle points between said local maxima in the model, said saddle points corresponding to boundaries between teeth;
4) determining the position of said saddle points along a dental archform, and
5) for each tooth, automatically identifying a path linking said saddle points comprising a transition between teeth and gingival tissue and between adjacent teeth in said model, and identifying areas bounded by said path and in the direction of said plane as corresponding to one of said tooth crowns.
2. The method of claim 1, wherein instructions 1) comprises instructions defining an occlusal plane or approximation thereof for the model and an approximate center of the model, and performing a transformation of said model to thereby orient said model with reference to said occlusal plane or approximation thereof and to said center.
3. The method of claim 1, wherein, in instructions 4), said archform comprises a parabolic archform of the form y=ax2+b, and wherein the method further comprises the step of performing a parabolic coordinate transform to thereby determine parabolic x coordinates for said saddle points.
4. The method of claim 1, wherein said instructions 5) comprises instructions:
1) performing a directional ravine detection process testing for paths between saddle points with a concave curvature between two saddle points; and
2) delimiting an area bounded by said paths if said ravine detection process is successful.
5. The method of claim 1, wherein instructions 2), 3), 4) and 5) operate on a representation of said model comprising a continuous single surface formed of interconnected triangles defined by vertices.
6. A method for automatically identifying gingival tissue in a virtual three-dimensional model of anatomical structures of the teeth and associated gingival tissue in a dental arch, comprising the steps of:
a) storing said model in a memory accessible to a general-purpose computer, said computer including a processing unit;
b) providing machine readable instructions for execution by said processing unit, said instructions comprising instructions operating on said model in the following respects:
1) orientating said model with reference to a plane;
2) automatically determining local maxima of the model and areas bounded by said local maxima;
3) automatically determining saddle points between said local maxima in the model, said saddle points corresponding to boundaries between teeth;
4) determining the position of said saddle points along a dental archform, and
5) for each tooth, automatically identifying a path defining comprising a transition between teeth and gingival tissue and between adjacent teeth in said model and linking said saddle points, and identifying areas bounded by said path and in the direction away from said plane as corresponding to said gingival tissue.
7. The method of claim 6, wherein instructions 1) comprises instructions defining an occlusal plane or approximation thereof for the model and an approximate center of the model, and performing a transformation of said model to thereby orient said model with reference to said occlusal plane or approximation thereof and to said center.
8. The method of claim 6, wherein, in instructions 4), said archform comprises a parabolic archform of the form y=ax2+b, and wherein the method further comprises the step of performing a parabolic coordinate transform to thereby determine parabolic x coordinates for said saddle points.
9. The method of claim 6, wherein instructions 5) comprises instructions:
1) performing a directional ravine detection process testing for paths between saddle points with a concave curvature between two saddle points; and
2) delimiting an area bounded by said paths if said ravine detection process is successful.
10. The method of claim 6, wherein instructions 2), 3), 4) and 5) operate on a representation of said model comprising a continuous single surface formed of interconnected triangles defined by vertices.
11. In a system comprising a programmed computer containing instructions for separating virtual teeth from a virtual model of both teeth and gingival tissue, the improvement comprising:
providing instructions for execution by said programmed computer that
1) automatically determine local maxima of the model and areas bounded by said local maxima;
2) automatically determine saddle points between said local maxima in the model, said saddle points corresponding to boundaries between teeth;
3) automatically determine the position of said saddle points along a dental archform, and
4) for each tooth, automatically identifying a path interconnecting said saddle points for said tooth, said line or lines comprising a transition between teeth and gingival tissue and between adjacent teeth in said model.
12. The improvement of claim 11, wherein said instructions 4) comprise instructions:
a) performing a directional ravine detection process testing for paths between saddle points with a concave curvature between two saddle points; and
b) delimiting an area bounded by said paths if said ravine detection process is successful.
13. In a system comprising a programmed computer containing instructions for separating virtual teeth from a virtual model of both teeth and gingival tissue, the improvement comprising:
providing instructions for execution by said programmed computer that identifies a path interconnecting saddle points between teeth, said path comprising a transition between teeth and gingival tissue and between adjacent teeth in said model, wherein said path is identified by performing a tree search tracing paths along a surface of said virtual model between said saddle points and selecting a path from said paths in said tree search based on a quality values assigned to said paths.
14. The improvement of claim 13, wherein said tree search is performed by reference to local curvature of said virtual model and a vector field for said model defining a direction of search for said path.