1. A silicon carbide single crystal formed using a silicon carbide semiconductor substrate as a seed crystal, the silicon carbide single crystal comprising:
a crystal defect configured as a stamp that penetrates from a front surface to a rear surface of the silicon carbide single crystal, the stamp formed on at least a surface of the seed crystal as an identification indicator and propagated from the silicon carbide semiconductor substrate in a growth direction of the silicon carbide single crystal.
2. The silicon carbide single crystal according to claim 1, wherein
the stamp is formed in one position or a plurality of positions of an outer edge.
3. The silicon carbide single crystal according to claim 1, wherein
the stamp is formed of one or a combination of a letter, a number, a bar code, and a QR code which is a registered trademark.
4. A method of manufacturing a silicon carbide semiconductor substrate, comprising:
preparing a seed crystal made of silicon carbide of a single crystal;
forming a stamp on at least a surface of the seed crystal as an identification indication formed of a crystal defect;
growing a silicon carbide single crystal while propagating the stamp in a growth direction, by growing the silicon carbide single crystal on the surface of the seed crystal on which the stamp is formed; and
forming a silicon carbide semiconductor substrate formed with the stamp, by cutting out and slicing the silicon carbide single crystal to which the stamp is propagated.
5. The method of manufacturing the silicon carbide semiconductor substrate according to claim 4, wherein
the forming the stamp includes forming the stamp by laser machining, cutting with a diamond cutting tool, dry etching, or ion implantation.
6. The method of manufacturing the silicon carbide semiconductor substrate according to claim 4, further comprising:
growing the silicon carbide single crystal while propagating the stamp in the growth direction, by again growing the silicon carbide single crystal with the seed crystal after cutting out the silicon carbide single crystal or the silicon carbide semiconductor substrate as a seed crystal; and
again forming the silicon carbide semiconductor substrate formed with the stamp by further cutting out and slicing the silicon carbide single crystal to which the stamp is propagated.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A biological information measuring panel, comprising:
an elastically flexible laying plate portion to be disposed below a subject; and
a strain detecting sensor attached to the laying plate portion,
wherein strain changes of the laying plate portion generated in accordance with biological activities of the subject are detected by the strain detecting sensor in a state in which the laying plate portion is disposed below the subject, and
wherein an output signal from the strain detecting sensor is used to measure the biological information of the subject.
2. The biological information measuring panel as recited in claim 1, wherein the laying plate portion is formed into an approximately rectangular belt shape and is to be disposed below the subject so as to extend in a widthwise direction of the subject.
3. The biological information measuring panel as recited in claim 1, wherein bending strength of the laying plate portion is set so as to fall within the range of from 7.5\xd7102 to 1.5\xd71012 Nmm2.
4. The biological information measuring panel as recited in claim 1, wherein the laying plate portion is made of a material whose Young’s modulus falls within the range of from 3\xd7104 to 30\xd7104 MPa.
5. The biological information measuring panel as recited in claim 1, wherein the laying plate portion is set to be 10 to 1,000 mm in length, 300 to 2,000 mm in width, and 0.1 to 30 mm in thickness.
6. The biological information measuring panel as recited in claim 1, wherein the laying plate portion is made of aluminum or its alloy.
7. The biological information measuring panel as recited in claim 1, further comprising an elastic layer attached to at least one of upper and lower surfaces of the laying plate portion.
8. The biological information measuring panel as recited in claim 7, wherein the elastic layer is an elastic sheet member, and wherein the elastic sheet member is attached to at least one of upper and lower surfaces of the laying plate portion with a peripheral end portion of the elastic sheet member protruded from a periphery of the laying plate portion.
9. The biological information measuring panel as recited in claim 1, wherein the strain detecting sensor is a strain gauge.
10. The biological information measuring panel as recited in claim 9, wherein at least one strain gauge is attached to at least one of the upper and lower surfaces of the laying plate portion.
11. The biological information measuring panel as recited in claim 9,
wherein a pair of strain gauges are attached to facing positions of the upper and lower surfaces of the laying plate portion,
wherein the pair of strain gauges and a pair of dummy resistances are electrically connected each other to form a bridged circuit, and
wherein an output signal from the bridged circuit is used to measure the biological information of the subject.
12. The biological information measuring panel as recited in claim 9,
wherein two pairs of strain gauges are attached to facing positions of the upper and lower surfaces of the laying plate portion,
wherein the two pairs of strain gauges are electrically connected each other to form a bridged circuit, and
wherein an output signal from the bridged circuit is used to measure the biological information of the subject.
13. The biological information measuring panel as recited in claim 9,
wherein the strain gauges are attached to right and left side portions and a central portion of at least one of the upper and lower surfaces of the laying plate portion.
14. The biological information measuring panel as recited in claim 9,
wherein the laying plate portion is provided with at least one thin thickness portion thinner than the other portion of the laying plate portion,
wherein at least one strain gauge is attached to at least one surface of the upper and lower surfaces of the thin thickness portion of the laying plate portion.
15. The biological information measuring panel as recited in claim 14,
wherein the thin thickness portion is formed in the laying plate portion by partially forming a dented portion on at least one of the upper and lower surfaces of the thin thickness portion of the laying plate portion.
16. The biological information measuring panel as recited in claim 14,
wherein the thin thickness portion is formed in the laying plate portion by forming the laying plate portion so that a thickness of the laying plate portion continuously changes in a widthwise direction of the laying plate portion.
17. The biological information measuring panel as recited in claim 9,
wherein a signal line passing opening for passing input signal lines to the strain gauges andor output signal lines from the strain gauges is formed near a strain gauge attaching position.
18. The biological information measuring panel as recited in claim 1,
wherein the strain detecting sensor is a conductive elastomer sensor.
19. The biological information measuring panel as recited in claim 18,
wherein the elastomer sensor is disposed inside the laying plate portion.
20. The biological information measuring panel as recited in claim 18,
wherein the laying plate portion is divided into an upper plate portion and a lower plate portion, and wherein the upper plate portion and the lower plate portion are secured in a superimposed manner in a state in which the conductive elastomer sensor is sandwiched between the upper plate portion and the lower plate portion.
21. The biological information measuring panel as recited in claim 1,
further comprising a controlling device for controlling an output signal from the strain detecting sensor is attached to the laying plate portion.
22. The biological information measuring panel as recited in claim 21,
wherein the controlling device is disposed in a dented portion formed in the upper surface or the lower surface of the laying plate portion.
23. A biological information measuring mat, comprising:
the biological information measuring panel as recited in claim 1,
wherein the panel is disposed in the mat.
24. A biological information measuring device, comprising:
the biological information measuring panel as recited in claim 1 or the biological information measuring mat as recited in claim 23,
wherein biological information of the subject is measured based on an output signal from the strain detecting sensor of the panel or the mat.
25. The biological information measuring device as recited in claim 24, further comprising:
computing means for computing the biological information of the subject based on the output signal from the strain detecting sensor; and
displaying means for displaying the biological information computed by the computing means.
26. The biological information measuring device as recited in claim 25, further comprising communicating means configured to transmit the biological information computed by the computing means.
27. The biological information measuring device as recited in claim 25, further comprising warning means configured to give a warning based on the biological information computed by the computing means.
28. A biological information measuring method, comprising the steps of:
preparing the biological information measuring panel as recited in claim 1 or the biological information measuring mat as recited in claim 23,
detecting strain changes of the laying plate portion of the panel or the mat generated in accordance with biological activities of the subject in a state in which the panel or the mat is disposed below the subject, and
measuring the biological information of the subject based on an output signal from the strain detecting sensor.
29. The biological information measuring method as recited in claim 28,
wherein the biological information of the subject is computed by computing means based on the output signal from the strain detecting signal, and
wherein the biological information computed by the computing means is displayed by displaying means.
30. The biological information measuring method as recited in claim 29, wherein the biological information computed by the computing means is transmitted by communicating means.
31. The biological information measuring method as recited in claim 29, wherein a warning is given by warning means based on the biological information computed by the computing means.
32. A biological activities monitoring system, comprising:
the biological information measuring panel as recited in claim 1 or the biological information measuring mat as recited in claim 23;
computing means configured to compute the biological information of the subject based on an output signal from the strain detecting sensor of the panel or the mat;
displaying means configured to display the biological information computed by the computing means; and
communicating means configured to transmit the biological information computed by the computing means.