1. An optical apparatus having an optical axis, the optical apparatus comprising:
an optical element forming an asymmetrical shape with respect to the optical axis;
an optical element holding member that holds the optical element; and
at least three support members that support the optical element holding member,
wherein at least either one of the optical element holding member and the optical element is configured so that total weight of the optical element holding member and the optical element is applied substantially equally to the at least three support members.
2. The optical apparatus according to claim 1, wherein the at least three support members respectively support the optical element holding member at least three support positions, and center of mass of the optical element holding member and the optical element is located within a predetermined distance from the incenter of a triangle formed by three of the at least three support positions.
3. The optical apparatus according to claim 1, wherein the at least three support members respectively support the optical element holding member at least three support positions, and center of mass of the optical element holding member and the optical element coincides with the incenter of a triangle formed by three of the at least three support positions.
4. The optical apparatus according to claim 1, wherein the at least three support members respectively support the optical element holding member at least three support positions, and at least either one of the optical element holding member and the optical element is configured such that a reference plane containing the three support positions, center of mass of an optical unit including the optical element holding member and the optical element with respect to the reference plane, and an intersection point between a perpendicular of the reference plane extending through the center of mass and the reference plane have a predetermined positional relationship relative to a triangle formed by the three support positions.
5. The optical apparatus according to claim 4, wherein the intersection point coincides with the incenter of the triangle.
6. The optical apparatus according to claim 4, wherein the intersection point is located within a predetermined distance from the incenter of the triangle.
7. The optical apparatus according to claim 4, wherein the intersection point is located inside the triangle.
8. The optical apparatus according to claim 1, wherein the at least three support members respectively support the optical element holding member at least three support positions, and at least either one of the optical element holding member and the optical element is configured such that center of mass of the optical element holding member and the optical element located on a reference plane containing a triangle formed by three of the at least three support positions.
9. The optical apparatus according to claim 1, wherein the at least three support members respectively support the optical element holding member at least three support positions, and at least either one of the optical element holding member and the optical element is configured such that at least one of inertia principal axes of an optical unit including the optical element holding member and the optical element is parallel to a reference plane containing the at least support positions.
10. The optical apparatus according to claim 1, wherein the at least three support members respectively support the optical element holding member at least three support positions, and at least either one of the optical element holding member and the optical element is configured such that at least one of inertia principal axes of an optical unit including the optical element holding member and the optical element located on a reference plane containing the at least three support positions.
11. The optical apparatus according to claim 1, wherein the at least three support members respectively support the optical element holding member at least three support positions, and at least either one of the optical element holding member and the optical element is configured such that at least one of inertia principal axes of an optical unit including the optical element holding member and the optical element intersects with a triangle defined by three of the at least three support positions.
12. The optical apparatus according to claim 11, wherein the inertia principal axes all intersect with the triangle.
13. The optical apparatus according to claim 1, wherein at least either one of the optical element holding member and the optical element includes a balance weight.
14. The optical apparatus according to claim 13, wherein the balance weight is integrally formed with at least either one of the optical element holding member and the optical element.
15. An optical apparatus having an optical axis, the optical apparatus comprising:
an optical element forming an asymmetrical shape with respect to the optical axis;
an optical element holding member that holds the optical element;
at least three support members that support the optical element holding member; and
a balance weight provided to at least one of the optical element holding member and the optical element.
16. The optical apparatus according to claim 15, wherein the balance weight adjusts weight balance of at least one of the optical element holding member and the optical element such that the weight of the optical element holding member and the optical element is distributed and applied substantially equally to the at least three support members.
17. The optical apparatus according to claim 15, wherein at least either one of the optical element holding member and the optical element is configured such that weight of the optical element held by the optical element holding member is applied substantially equally to the at least three support members.
18. The optical apparatus according to claim 16, wherein the balance weight is a projecting portion integrally formed with at least one of the optical element holding member and the optical element.
19. The optical apparatus according to claim 16, wherein the balance weight is a cutaway portion formed in at least part of the optical element holding member and the optical element.
20. An optical apparatus having an optical axis, the optical apparatus comprising:
an optical element forming an asymmetrical shape with respect to the optical axis;
an optical element holding member that holds the optical element; and
at least three support members that support the optical element holding member,
wherein the at least three support members are arranged at irregular intervals such that weight of the optical element holding member and the optical element is distributed substantially equally to the at least three support members.
21. A barrel comprising:
an optical apparatus according to claim 1.
22. An exposure apparatus for exposing an image of a pattern formed on a mask onto a substrate through a projection optical system, the exposure apparatus comprising a barrel according to claim 21.
23. A device manufacturing method including a lithography operation, the method comprising:
performing exposure in the lithography operation by using an exposure apparatus according to claim 22.
24. A barrel comprising:
an optical apparatus according to claim 15.
25. An exposure apparatus for exposing an image of a pattern formed on a mask onto a substrate through a projection optical system, the exposure apparatus comprising a barrel according to claim 24.
26. A device manufacturing method including a lithography operation, the method comprising:
performing exposure in the lithography operation by using an exposure apparatus according to claim 23.
27. A barrel comprising:
an optical apparatus according to claim 20.
28. An exposure apparatus for exposing an image of a pattern formed on a mask onto a substrate through a projection optical system, the exposure apparatus comprising a barrel according to claim 27.
29. A device manufacturing method including a lithography operation, the method comprising:
performing exposure in the lithography operation by using an exposure apparatus according to claim 28.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A process for making a substrate bearing a coating of a crosslinked polymer composition on at least one surface thereof, comprising the steps of:
(a) coating onto said substrate a crosslinkable oligomer composition comprising:
(1) a first component oligomer comprising a plurality of polymerized monomer units having pendent, free-radically polymerizable functional groups, and a plurality of polymerized monomer units having pendent, hydrophilic poly(alkylene oxide) groups; and
(2) a second component oligomer comprising a plurality of polymerized monomer units having pendent, photoinitiator groups; and
(b) photochemically crosslinking said first component oligomer and second component oligomer, in the presence of a photoinitiator, by forming covalent bonds between said pendent, free-radically polymerizable functional groups of said first component oligomer said second component oligomer.
2. The process of claim 1 wherein said oligomer composition has been partially converted to a coatable viscosity of from 750 to 7,500 cPs at 22\xb0 C. prior to step a.
3. The process of claim 1 wherein said oligomer composition comprises
(a) per 100 parts by weight of said first component, an amount of said second component sufficient to provide more than two crosslinks per first component oligomer chain;
(b) less than 2 parts by weight residuals content.
4. The process of claim 1 wherein the molecular weight (Mn) of said first oligomer is less than the entanglement molecular weight.
5. The process of claim 1 wherein the average degree of polymerization of the first and second component oligomers is \u2266300.
6. The process of claim 1, wherein said pendent polyalkylene oxide groups of said first component oligomer is of the formula:
\u2014(CH(R1)\u2014CH2\u2014O)m\u2014R2
wherein R1 is a H or a C1 to C4 alkyl group, R2 is H, a C1 to C4 alkyl group, aryl, or combinations thereof, and m is from 2 to 100.
7. The process of claim 1, wherein said pendent poly(alkylene oxide) group is a poly(ethylene oxide) (co)polymer.
8. The process of claim 1, wherein said pendent poly(alkylene oxide) group is a poly(ethylene oxide-co-propylene oxide) copolymer.
9. The process of claim 1, wherein said second component oligomer further comprises a plurality of polymerized monomer units having pendent, hydrophilic poly(alkylene oxide) groups.
10. The process of claim 1 wherein said first oligomer having pendent unsaturated polymerizable groups is prepared by the reaction of an oligomer having a plurality of pendent reactive functional groups with an unsaturated compounds having co-reactive functional groups.
11. The process of claim 10 wherein said pendent reactive functional groups are selected from hydroxyl, amino, oxazolinyl, oxazolonyl, acetyl acetonyl, carboxyl, isocyanato, epoxy, aziridinyl, acyloyl halide, and cyclic anhydride groups.
12. The process of claim 1 wherein the second component oligomer is prepared by the reaction of an oligomer having a plurality of pendent reactive functional groups with co-reactive compounds having a photoinitator group.
13. The process of claim 1 which comprises an amount of said second component oligomer is sufficient to provide more than two crosslinks per first component oligomer chain.
14. The process of claim 1 wherein said crosslinkable oligomer composition comprises:
(a) from 0.01 to 99.9 parts by weight of said first component oligomer, and
(b) from 99.9 to 0.1 parts by weight of said second component oligomer,
wherein the composition, when crosslinked, can absorb at least 50 wt. % water.
15. The process of claim 1 wherein said first component oligomer comprises
(a) from 20 to 99 parts by weight of polymerized monomer units derived from an ethylenically-unsaturated monomer having a pendent poly(alkylene oxide) group;
(b) from 0.1 to 35 parts by weight of polymerized monomer units derived from of an ethylenically-unsaturated monomer having a pendent polymerizable functional group;
(c) from 0 to 50 parts by weight of polymerized monomer units derived from a polar monomer;
(d) from 0 to 20 parts by weight of polymerized monomer units derived from a hydrophobic monomer;
(e) from 0 to 10 parts by weight of at least one other monomer.
16. The process of claim 15 wherein said polar monomer c), when present, is selected from the group consisting of substituted (meth)acrylamides, N-vinyl pyrrolidone, N-vinyl caprolactam, acrylonitrile, N-vinyl acetamide, tetrahydrofurfuryl acrylate, acrylamides, and mixtures thereof.
17. The process of claim 1 wherein the second oligomer component comprises:
(a) from 20 to 99 parts by weight of polymerized monomer units having pendent, hydrophilic poly(alkylene oxide) groups,
(b) from 0.1 to 25 parts by weight of polymerized monomer units derived from of an ethylenically-unsaturated monomer having a pendent photoinitiator group;
(c) from 0 to 25 parts by weight of polymerized monomer units derived from of an ethylenically-unsaturated monomer having a pendent polymerizable group;
(d) from 0 to 20 parts by weight of hydrophobic monomers;
(e) from 0 to 50 parts by weight of polymerized monomer units derived from a polar monomer; and
(f) from 0 to 40 parts by weight, preferably less than 25 parts by weight, of at least one other monomer.