1. A film forming apparatus comprising:
a film forming chamber;
a substrate holder located in said film forming chamber, for holding a substrate on which a structure is to be formed;
exhaust means for exhausting an interior of said film forming chamber;
aerosol generating means for generating an aerosol by blowing up a raw material powder placed in a container with a gas;
introducing means for introducing the aerosol generated by said aerosol generating means into said film forming chamber;
at least one nozzle disposed oppositely to said substrate held by said substrate holder in said film forming chamber, for spraying the aerosol introduced via said introducing means toward said substrate; and
displacing means for chaotically changing a relative position of said substrate held by said substrate holder and said at least one nozzle,
wherein said displacing means includes
a control unit that controls the relative position of said substrate and said at least one nozzle so that the relative position is chaotically changed,
a first rotating support, and
a second rotating support that rotates on the first rotating support,
wherein a rotational axis of the first rotating support is parallel to and displaced from a rotational axis of the second rotating support,
the control unit controls the rotation of the first support and the second support, and
the substrate holder or the at least one nozzle is provided on the second support.
2. The film forming apparatus according to claim 1, wherein:
said first support and said second support each having at least one degree of freedom, said first support and said second support being connected such that degrees of freedom thereof overlap, and said control unit controlling each of said first support and said second support such that an end of the connected first and second supports exhibit chaotic behavior; and
said substrate holder is provided on the end of the connected first and second supports.
3. The film forming apparatus according to claim 1, wherein:
said first support and said second support each having at least one degree of freedom, said first support and said second support being connected such that degrees of freedom thereof overlap, and said control unit controlling each of said first support and said second support such that an end of the connected first and second supports exhibit chaotic behavior; and
said at least one nozzle is provided on the end of the connected first and second supports.
4. The film forming apparatus according to claim 3, wherein a carrying path for carrying the aerosol introduced by said introducing means is formed in each of said plurality of supports.
5. The film forming apparatus according to claim 4, wherein means for preventing deposition of the raw material powder included in the aerosol is provided in said carrying path formed in each of said plurality of supports.
6. The film forming apparatus according to claim 5, wherein said means for preventing deposition of the raw material powder includes an elastic reflection plate.
7. A film forming apparatus comprising:
a film forming chamber;
a substrate holder located in said film forming chamber, for holding a substrate on which a structure is to be formed;
exhaust means for exhausting an interior of said film forming chamber;
aerosol generating means for generating an aerosol by blowing up a raw material powder placed in a container with a gas;
introducing means for introducing the aerosol generated by said aerosol generating means into said film forming chamber;
at least one nozzle disposed oppositely to said substrate held by said substrate holder in said film forming chamber, for spraying the aerosol introduced via said introducing means toward said substrate; and
displacing means for changing a relative position of said substrate held by said substrate holder and said at least one nozzle;
said displacing means includes a plurality of supports each having at least one degree of freedom, said plurality of supports being connected such that degrees of freedom thereof overlap, and control means for controlling each of said plurality of supports such that an end of the connected plurality of supports exhibit chaotic behavior; and
said at least one nozzle is provided on the end of the connected plurality of supports;
wherein a carrying path for carrying the aerosol introduced by said introducing means is formed in each of said plurality of supports; and
wherein a carrying path for carrying the aerosol introduced by said introducing means is formed in each of said plurality of supports.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A process for transmitting digital data to an AD converter via an analog channel, comprising:
generating a sequence of output signals by precoding a sequence of input signal points to precompensate for ISI in the analog channel, the generating being such that at least one of the output signals would be distorted by the channel to a signal representative of a signal point lying between quantization levels of the AD converter in an absence of channel noise and echo and others of the output signals would be distorted by the channel to signals representative of signal points that are quantization levels of the AD converter in an absence of channel noise and echo, a majority of the input signal points being quantization levels of the AD converter; and
wherein the precoding further comprises:
precompensation an input signal point for the ISI; and
adding a modulo amount to the precompensated signal point in response to the precompensated signal point having a value outside of a threshold range.
2. The process of claim 1, wherein the quantization levels are the quantization levels of a PCM vocoder.
3. The process of claim 1, wherein the adding includes determining the value of the modulo amount in a manner responsive to the value of the input signal point that was precompensated.
4. The process of claim 3, wherein the threshold range is dependent on the value of the input signal point that was precompensated.
5. The process of claim 3, wherein the threshold range is independent of the value of the input signal point that was precompensated.
6. The process of claim 1, wherein another of the output signals would be distorted by the ISI to a signal representative of a signal point lying between quantization levels of the AD converter, first and second ones of the output signals lying between different pairs of quantization levels.
7. The process of claim 1, wherein each of the input signal points is representative of a value of a quantization level of the AD converter.
8. A transmitter for transmitting digital data to an AD converter via an analog channel, the transmitter comprising:
a precoder being configured to precompensate a sequence of input signal points of an original constellation for ISI in the analog channel such that the channel would convert the precompensated points into signal points of an extended constellation in the absence of channel noise and echo, the signal points of the original constellation being quantization levels of the AD converter, and the extended constellation including at least one signal point that is not a quantization level of the AD converter; and
wherein the precoder comprises:
a digital filter to generate feedback signal points from precompensated signal points produced from the input signal points by the precoder;
an adder to combine the feedback and associated input signal points; and
a modulo device to produce a signal point within a threshold range from a signal point received from the adder.
9. The transmitter of claim 8, wherein the quantization levels characterizing a portion of the points in the constellations are quantization levels of a PCM vocoder.
10. The transmitter of claim 9, further comprising:
a trellis encoder to produce the input signal points by encoding digital data, the trellis encoder being coupled to transmit the input signal points to the precoder.
11. The transmitter of claim 10, wherein the trellis encoder is configured to produce signal points representative of the quantization levels of the PCM vocoder.
12. The transmitter of claim 9, wherein the precoder trellis encodes the input signal points and further produces signals representative of signal points of the original constellation in response to being configured to precompensate for zero ISI in the analog channel.
13. The transmitter of claim 8, wherein the modulo device is configured to add a modulo amount to a signal point received from the adder in response to the received signal point not having a value in the threshold range.
14. The transmitter of claim 8, wherein the threshold range is dependent on the value of the input signal point that was precompensated.
15. The transmitter of claim 8, wherein the threshold range is independent of the value of the input signal point that was precompensated.
16. The transmitter of claim 13, wherein the modulo device is configured to determine the threshold range from the value of the associated input signal point.
17. The transmitter of claim 8, wherein the extended constellation includes a plurality of signal point values that are not equal to quantization levels of the AD converter.