1. A method of forming a thin film transistor (TFT), comprising:
providing a substrate;
forming a gate and a non-transparent structure on said substrate;
forming a dielectric layer which covers said gate on said substrate;
forming a first semi-conductive layer on said dielectric layer;
forming a second semi-conductive layer on said first semi-conductive layer;
forming a photoresist layer on said second semi-conductive layer;
placing a mask on said photoresist layer, wherein said mask has a slit pattern aimed at said gate;
patterning said photoresist layer to form a photoresist pattern over said gate and still over said substrate around said gate, wherein said photoresist pattern further comprises a thin photoresist pattern formed under said slit pattern and a thick photoresist pattern;
removing the portions of said second semi-conductive layer and said first semi-conductive layer without said photoresist pattern covering;
removing said thin photoresist pattern; and
removing the portion of said second semi-conductive layer without the portion of the photoresist pattern covering.
2. The method according to claim 1, wherein the center of said slit pattern is above the center of said gate.
3. The method according to claim 1, wherein said non-transparent structure electrically insulated from said gate, and said non-transparent structure and said gate are formed at the same time, and said non-transparent structure is at least under the portion of said first semi-conductive layer.
4. The method according to claim 1, wherein said photoresist pattern is removed after the portion of said second semi-conductive layer is removed, and then an extra dielectric layer is formed on the substrate to cover said first semi-conductive layer and said second semi-conductive layer.
5. The method according to claim 4, wherein said extra dielectric layer is patterned to form an open region to expose the portion of said second semi-conductive layer.
6. The method according to claim 5, comprising a patterned conductive structure formed on said extra dielectric layer and be filled in said open region.
7. The method according to claim 6, wherein said non-transparent structure electrically insulated from said gate is formed at the same time as said gate formed, said non-transparent structure is at least located under the portion of said patterned conductive structure.
8. The method according to claim 1, wherein the portion of said first semi-conductive layer without covering by the remained portion of said photoresist pattern is removed after removing the portion of said second semi-conductive layer.
9. The method according to claim 8, comprising an extra dielectric layer formed on said substrate to cover said first semi-conductive layer and second semi-conductive layer after removing said photoresist pattern.
10. The method according to claim 9, wherein said extra dielectric layer is patterned to form an open region to expose the portion of said second semi-conductive layer.
11. The method according to claim 10, wherein a patterned conductive structure is formed on said extra dielectric layer and filled in said open region.
12. The method according to claim 11, wherein said non-transparent structure electrically insulated from said gate is formed at the same time as said gate formed, said non-transparent structure is at least under the portion of said patterned conductive structure.
13. A method of forming a thin film transistor (TFT), comprising:
providing a substrate;
forming a conductive structure and a non-transparent structure on said substrate, wherein said conductive structure and said non-transparent structure are electrically insulated each other;
forming a first dielectric layer on said substrate, wherein said first dielectric layer covers said conductive structure and said non-transparent structure;
forming a first semi-conductive layer on said first dielectric layer;
forming a second semi-conductive layer on said first semi-conductive layer;
performing a pattern process to removing the portions of said second semi-conductive layer and said first semi-conductive layer, wherein the remained portions of said second semi-conductive layer and said first semi-conductive layer are at least over said conductive structure;
forming a second dielectric layer on said substrate, wherein said second dielectric layer also covers both remained portions of said second and said first semi-conductive layers;
forming an open region on said second dielectric layer to expose the portion of said second semi-conductive layer; and
forming a patterned semi-conductive layer on said second dielectric and filling said open region.
14. The method according to claim 13, wherein the remained portion of said first semi-conductive layer at least covers the portion of said non-transparent structure.
15. The method according to claim 13, wherein the remained portions of said semi-conductive layers are adjusted along the edges of said conductive structure, and the remained portions of said semi-conductive layers over the conductive structure are wider than other portions.
16. The method according to claim 13, wherein the remained portions of said semi-conductive layers are adjusted along the edges of said non-transparent structure, and the remained portions of said semi-conductive layers over the non-transparent structure are wider than other portions.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method for generating a model for simulating systems of reacting species comprising:
receiving a plurality of reaction formulas;
determining a reaction rate expression for each of the received reaction formulas; and
generating a model for simulating systems of reacting species using the received reaction formulas and the determined reaction rate expressions.
2. The method of claim 1, wherein at least one of the reaction formulas is received via a graphical user interface.
3. The method of claim 1, wherein the generated model is displayed on a graphical user interface.
4. The method of claim 1, wherein the determined reaction rate expression is modified via a graphical user interface.
5. The method of claim 1, further comprising generating a reaction list of at least one reaction for at least one of the received reaction formulas.
6. The method of claim 5, further comprising displaying the generated reaction list in a graphical user interface.
7. The method of claim 5, further comprising eliminating at least one reaction rate expression associated with one or more reactions in the reaction list at equilibrium.
8. The method of claim 7, wherein the elimination is based on one or more threshold criteria.
9. The method of claim 5, further comprising determining at least one thermodynamic property of each reaction in the reaction list.
10. The method of claim 5, further comprising determining at least one kinetic property of each reaction in the reaction list.
11. The method of claim 1, further comprising pruning the reaction list to deactivate one or more reactions in the reaction list based on one or more criteria.
12. The method of claim 11, wherein a user modifies the one or more criteria via a graphical user interface.
13. The method of claim 1, further comprising generating a species list based on the received reaction formulas.
14. The method of claim 13, further comprising displaying the species list in a graphical user interface.
15. The method of claim 13, further comprising determining at least one thermodynamic property for each species in the species list.
16. The method of claim 13, further comprising determining at least one transport property for each species in the species list.
17. The method of claim 14, further comprising eliminating at least one time dependent term for at least one species at steady-state.
18. The method of claim 14, further comprising eliminating at least one concentration for at least one species at constant concentration.
19. The method of claim 1, further comprising displaying an output based on the generated model, wherein the output displays the composition and temperature dependence of the system of reacting species.
20. The method of claim 1, further comprising generating material and energy balances for the reacting species as input to a solver of partial differential equations.
21. A system for generating a model for simulating systems of reacting species comprising:
a receiving system that receives a plurality of reaction formulas;
a reaction rate determination system that determines a reaction rate expression for each of the received reaction formulas; and
a model generating system that generates a model for simulating systems of reacting species using the received reaction formulas and the determined reaction rate expressions.
22. The system of claim 21, wherein at least one of the reaction formulas is received via a graphical user interface.
23. The system of claim 21, further comprising a display system that displays the generated model on a graphical user interface.
24. The system of claim 21, wherein the determined reaction rate expression is modified via a graphical user interface.
25. The system of claim 21, further comprising a reaction list generating system that generates a reaction list of at least one reaction for at least one of the received reaction formulas.
26. The system of claim 25, further comprising a display system that displays the generated reaction list in a graphical user interface.
27. The system of claim 25, further comprising an elimination system that eliminates at least one reaction rate expression associated with one or more reactions in the reaction list at equilibrium.
28. The system of claim 27, wherein the elimination is based on one or more threshold criteria.
29. The system of claim 25, further comprising a reaction property determination system that determines at least one thermodynamic property of each reaction in the reaction list.
30. The system of claim 25, further comprising a reaction property determination system that determines at least one kinetic property of each reaction in the reaction list.
31. The system of claim 21, further comprising a pruning system that prunes the reaction list to deactivate one or more reactions in the reaction list based on one or more criteria.
32. The system of claim 31, wherein a user modifies the one or more criteria via a graphical user interface.
33. The system of claim 21, further comprising a species list generating system that generates a species list based on the received reaction formulas.
34. The system of claim 33, further comprising a display system that displays the species list in a graphical user interface.
35. The system of claim 33, further comprising a species property determination system that determines at least one thermodynamic property for each species in the species list.
36. The system of claim 33, further comprising a species property determination system that determines at least one transport property for each species in the species list.
37. The system of claim 34, further comprising an elimination system that eliminates at least one time dependent term for at least one species at steady-state.
38. The system of claim 34, further comprising an elimination system that eliminates at least one concentration for at least one species at constant concentration.
39. The system of claim 21, further comprising a display system that displays an output based on the generated model, wherein the output displays the composition and temperature dependence of the system of reacting species.
40. The system of claim 21, further comprising a material and energy balances generating system that generates material and energy balances for the reacting species as input to a solver of partial differential equations.
41. A computer readable medium having instructions stored thereon for generating a model for simulating systems of reacting species, which when executed by a processor, cause the processor to carry out:
receiving a plurality of reaction formulas;
determining a reaction rate expression for each of the received reaction formulas; and
generating a model for simulating systems of reacting species using the received reaction formulas and the determined reaction rate expressions.
42. The computer readable medium of claim 41, further comprising instructions for receiving at least one of the reaction formulas via a graphical user interface.
43. The computer readable medium of claim 41, further comprising displaying the generated model on a graphical user interface.
44. The computer readable medium of claim 41, further comprising instructions for enabling the determined reaction rate expression to be modified via a graphical user interface.
45. The computer readable medium of claim 41, further comprising instructions for generating a reaction list of at least one reaction for at least one of the received reaction formulas.
46. The computer readable medium of claim 45, further comprising instructions for displaying the generated reaction list in a graphical user interface.
47. The computer readable medium of claim 45, further comprising instructions for eliminating at least one reaction rate expression associated with one or more reactions in the reaction list at equilibrium.
48. The computer readable medium of claim 47, wherein the elimination is based on one or more threshold criteria.
49. The computer readable medium of claim 45, further comprising instructions for determining at least one thermodynamic property of each reaction in the reaction list.
50. The computer readable medium of claim 45, further comprising instructions for determining at least one kinetic property of each reaction in the reaction list.
51. The computer readable medium of claim 41, further comprising instructions for pruning the reaction list to deactivate one or more reactions in the reaction list based on one or more criteria.
52. The computer readable medium of claim 51, further comprising instructions for allowing a user to modify the one or more criteria via a graphical user interface.
53. The computer readable medium of claim 41, further comprising instructions for generating a species list based on the received reaction formulas.
54. The computer readable medium of claim 53, further comprising instructions for displaying the species list in a graphical user interface.
55. The computer readable medium of claim 53, further comprising instructions for determining at least one thermodynamic property for each species in the species list.
56. The computer readable medium of claim 53, further comprising determining at least one transport property for each species in the species list.
57. The computer readable medium of claim 54, further comprising instructions for eliminating at least one time dependent term for at least one species at steady-state.
58. The computer readable medium of claim 54, further comprising instructions for eliminating at least one concentration for at least one species at constant concentration.
59. The computer readable medium of claim 41, further comprising instructions for displaying an output based on the generated model, wherein the output displays the composition and temperature dependence of the system of reacting species.
60. The computer readable medium of claim 41, further comprising instructions for generating material and energy balances for the reacting species as input to a solver of partial differential equations.