We claim:
1. A connection assembly, comprising:
a shaft having a first end, said first end defining a cross section having a polygon shape and further defining an outward projection; and
a flange defining a recess having a shape complimentary to said polygon shape of said first end of said shaft, a ridge, and an inward projection opposite said ridge, said ridge and said inward projection cooperatively defining a groove;
wherein said recess rotationally retains said first end of said shaft and said ridge and said inward projection cooperatively axially retain said outward projection in said groove.
2. A connection assembly according to claim 1, wherein said polygon shape of said first end is a member selected from the group consisting of a triangle, a square, a pentagon, a hexagon, a heptagon, and an octagon.
3. A connection assembly according to claim 1, wherein said polygon shape defines convex sides.
4. A connection assembly according to claim 1, wherein said polygon shape defines concave sides.
5. A connection assembly according to claim 1, wherein said outward projection extends continuously around the perimeter of said polygon shape of said first end of said shaft.
6. A connection assembly according to claim 1, wherein said shape of said recess is a member selected from the group consisting of a triangle, a square, a pentagon, a hexagon, a heptagon and an octagon.
7. A connection assembly according to claim 1, wherein said recess defines convex sides.
8. A connection assembly according to claim 1, wherein said recess defines concave sides.
9. A connection assembly according to claim 1, wherein said ridge extends continuously around the perimeter of said recess.
10. A connection assembly according to claim 1, wherein said inward projection extends continuously around the perimeter of said recess.
11. A connection assembly according to claim 1, wherein said groove extends continuously around the perimeter of said recess.
12. A connection assembly according to claim 1, wherein said outward projection defines a first angular surface.
13. A connection assembly according to claim 12, wherein said inward projection defines a second angular surface complimentary to said first angular surface, such that said inward projection, said groove, and said ridge are in continuous contact with said outward projection.
14. A connection assembly, comprising:
a shaft having a first end, said first end defining a cross section having a polygon shape and further defining a circumferential outward projection;
a flange defining a recess having a shape complimentary to said polygon shape of said first end, a circumferential ridge, a circumferential inward projection opposite said ridge, said ridge and said inward projection cooperatively defining a circumferential groove;
wherein said recess rotationally retains said first end of said shaft, and said circumferential ridge and said circumferential inward projection cooperatively axially retain said outward projection in said circumferential groove.
15. The connection assembly of claim 14, wherein said polygon shape of said first end is a member selected from the group consisting of a triangle, a square, a pentagon, a hexagon, a heptagon, and an octagon.
16. A connection assembly according to claim 14, wherein said polygon shape defines convex or concave sides.
17. A connection assembly according to claim 14, wherein said polygon shape defines concave sides.
18. The connection assembly of claim 14, wherein said shape of said recess is a member selected from the group consisting of a triangle, a square, a pentagon, a hexagon, a heptagon, and an octagon.
19. A connection assembly according to claim 14, wherein said recess defines convex sides.
20. A connection assembly according to claim 14, wherein said recess defines concave sides.
21. A connection assembly according to claim 14, wherein said outward projection defines a first angular surface.
22. A connection assembly according to claim 21, wherein said inward projection defines a second angular surface complimentary to said first angular surface, such that said inward projection, and said ridge are in continuous contact with said outward projection.
23. A method of connecting a shaft and a flange, comprising:
providing a shaft having a terminus that defines a polygon shape and an outward projection;
providing a flange having a recess adapted to receive the polygon shape, a ridge, and an upwardly extending projection;
inserting the terminus into the recess such that the outward projection is in continuous contact with the ridge; and
clamping the upwardly extending projection over the outward projection so as to form an inward projection to axially retain the flange and shaft.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. (canceled)
2. (canceled)
3. A defect inspecting method, comprising the steps of:
detecting a plurality of defects of a semiconductor device on a substrate, and selecting desired defects from among said defects, and selecting, from among said defects, indicator defects that are easily detectable from among said plurality of defects in accordance with attribute of the defects detected by an observing apparatus; and
observing said indicator defects by said observing apparatus in accordance with said attribute of said indicator defects, and detecting said desired defects in accordance with coordinates of said indicator defects.
4. The defect inspecting method as claimed in claim 3, wherein said attribute is one of at least dimension, type, scattered light amount, local variation in luminance, and profile configuration of said plurality of defects.
5. A defect inspecting system comprising:
a defect selecting unit for selecting desired defects from among a plurality of defects of a semiconductor device on a substrate detected by a defect inspecting apparatus, and selecting, from among said defects, indicator defects that are easily detectable from among said plurality of defects in accordance with attribute of the defects detected by an observing apparatus, said defect inspecting apparatus detecting said defects of a sample, said observing apparatus observing said defects;
a memory unit for storing a correlated relationship between defects’ position-coordinates defined by said defect inspecting apparatus and said defects’ position-coordinates defined by said observing apparatus;
a coordinate-correspondence determining unit for coordinate-transforming position-coordinates of said indicator defects with the use of said correlated relationship so as to calculate transformed position-coordinates of said indicator defects, said indicator defects being detected by said observing apparatus in accordance with said attribute; and
communications means for connecting communications among said defect selecting unit, said memory unit, and said coordinate-correspondence determining unit.
6. The defect inspecting system as claimed in claim 5, wherein said attribute is one of at least dimension, type, scattered light amount, local variation in luminance, and profile configuration of said plurality of defects.