1. A power semiconductor device comprising:
a semiconductor die, said semiconductor die including a drift region of a first conductivity type;
a channel region of a second conductivity type over said drift region;
a plurality of trenches extending to a depth below said channel region;
gate insulation formed on sidewalls of each trench;
a gate electrode disposed inside each trench;
a silicide body formed over each gate electrode;
an oxide plug comprised of TEOS formed inside each trench and directly on a respective silicide body;
conductive regions of said first conductivity each formed adjacent a respective trench; and
a first contact formed over said die and in electrical contact with each one of said conductive regions of said first conductivity, said first contact extending over said oxide plug, wherein no other insulation is disposed between said oxide plug and said silicide body, and wherein each oxide plug is laterally bound by sidewalls of a respective trench whereby said oxide plug does not extend over said conductive regions.
2. A device according to claim 1, further comprising a thickened oxide layer at the bottom of each trench.
3. A device according to claim 1, further comprising a termination region, wherein no conductive region of said first conductivity is present in said termination region.
4. A device according to claim 1, further comprising a substrate, said drift region being disposed over said substrate, and a second contact in electrical contact with said substrate.
5. A device according to claim 4, wherein said conductive regions are source regions, said first contact is a source contact and said second contact is a drain contact.
6. A device according to claim 1, wherein said silicide body is contained within said trench.
7. A device according to claim 1, wherein said conductive regions and said channel region electrically connect to said first contact on a common plane.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An electrical distribution box with compacting system for its integral elements, suitable for being used in a vehicle, comprising:
a box having a body, and a cooperating fixing means protruding from a bottom surface of said body;
first and second printed circuit boards which make up an electrical distribution system of the vehicle positioned within said body;
a lid for providing said body with an isolation for its internal field, and a cooperating fixing means protruding from a bottom surface of said lid;
a separating element in a form of a laminated board, said separating element interposed between said first and second printed circuit boards, said separating element has on each one of its surfaces a protuberance in a form of a horn, and a plurality of troncoconic protuberances for coming into contact with said first and second printed circuit boards and providing a space between said first and second printed circuit boards and the separating element; and
wherein said cooperating fixing means of the body, said cooperating fixing means of the lid and said horns are in coaxial alignment.
2. The electrical distribution box, according to claim 1, wherein the cooperating fixing means of the body comprises a centered and solitary vertical shaft for providing a support base to the first and second printed circuit boards and establishing a separation between the body and said second printed circuit board.
3. The electrical distribution box, according to claim 2, wherein the bottom surface of the body having a plurality of cylindrical objects distributed jointly on the aforementioned bottom surface for cooperating in the maintenance of the first and second printed circuit boards, and exerting pressure on them.
4. The electrical distribution box, according to claim 2, wherein the vertical shaft having a threaded blind passage for receiving a thread as a means of tightening.
5. The electrical distribution box, according to claim 4, wherein said tightening means comprises a screw.
6. The electrical distribution box, according to claim 5, wherein the cooperating fixing means of the lid comprises a solitary shaft, said shaft having an assistant axial passage, said assistant axial passage having an enlarged portion adjacent to an external surface of said assistant axial passage.
7. The electrical distribution box, according to claim 6, wherein a portion of said assistant axial passage for receiving a body of said screw and the enlarged portion of said passage for housing a head of said screw.
8. The electrical distribution box, according to claim 7, wherein said shaft of said lid establishes a separation between the second printed circuit board and the bottom surface of the lid, wherein the bottom surface of the lid having a plurality of cylindrical objects distributed jointly on the aforementioned bottom surface for cooperating in the maintenance of the aforementioned boards, and exerting pressure on them.
9. The electrical distribution box, according to claim 8, wherein each of the first and second printed circuit boards has a passage for allowing the body of said screw through.
10. The electrical distribution box, according to claim 9, wherein the printed circuit boards have non-conductive portions for allowing contact with the cylindrical objects of the body and the lid and said troncoconic protuberances of said separating element.
11. The electrical distribution box, according to claim 10, wherein said screw has a cylindrical body, a cylindrical head and a threaded end, for being introduced into the lowest diameter passage of the shaft of the lid element, through the first printed circuit board, between the separating element and through the second printed circuit board, until the threaded end is housed in the threaded blind passage of the shaft of the body, and the cylindrical head supported by the enlarged portion on the assistant axial passage of the shaft of the lid, and exerting traction on the body so that between both shafts, they put pressure on the intervening boards and separating element, creating a compacting between them, helped by the cylindrical objects.