1. A data processing apparatus for processing input data to create processed data for outputting, comprising:
a data processor for processing the input data by predetermined processing and outputting the processed data as output data;
an input data evaluator configured to evaluate the input data and calculate a reliability of the input data;
an output data evaluator configured to evaluate the output data and calculate a reliability of the output data, and
a real time learning portion consisting of a single component configured to learn the processing of the data processor in real time using the reliability of the input data calculated by said input data evaluator and the reliability of the output data calculated by said output data evaluator to create learned processing and control the data processor to process the input data according to the learned processing.
2. A data processing apparatus according to claim 1, further comprising an input data storage unit for storing a predetermined number of time-sequentially input data.
3. A data processing apparatus according to claim 2, wherein said input data evaluator calculates a dispersion of the predetermined number of the time-sequentially input data stored by said input data storage unit and evaluates current input data according to the dispersion.
4. A data processing apparatus according to claim 2, wherein said input data evaluator calculates an average of the predetermined number of the time-sequentially input data stored by said input data storage unit, and evaluates current input data according to an error of each of the input data against the average.
5. A data processing apparatus according to claim 2, wherein said input data evaluator calculates a dispersion and an average of the predetermined number of the time-sequentially input data stored by said input data storage unit; obtains an error of each input data against the average; and evaluates current input data according to the dispersion and a respective error.
6. A data processing apparatus according to claim 1, further comprising an output data storage unit for storing the output data, wherein said data processor adds previous output data stored by said output data storage unit and current input data to obtain the output data corresponding to the current input data.
7. A data processing apparatus according to claim 6, wherein said real time learning portion learns a predetermined weight coefficient according to the reliability of the input data and the reliability of the output data, and
said data processor obtains the output data corresponding to the current input data according to the weight coefficient.
8. A data processing method for processing input data and creating processed data for outputting comprising the steps of:
processing the input data by a predetermined processing method and outputting the processed data as output data;
evaluating the input data and calculating a reliability of the input data; evaluating the output data and calculating a reliability of the output data, and
learning the step of processing the input data in real time in a single component using the calculated reliability of the input data and the calculated reliability of the output data to create a learned processing and the input data is processed by the step of processing the input data by the learned processing.
9. A data processing method according to claim 8, further comprising an input data storing step of storing a predetermined number of time-sequentially input data.
10. A data processing method according to claim 9, wherein, in the step of evaluating the input data, a dispersion of the predetermined number of the time-sequentially input data stored in the input data storing step is calculated and current input data is evaluated according to the dispersion.
11. A data processing method according to claim 9, wherein, in the step of evaluating the input data, an average of the predetermined number of the time-sequentially input data stored in the input data storing step is calculated, and current input data is evaluated according to an error of each input data against the average.
12. A data processing method according to claim 9, wherein, in the step of evaluating the input data, a dispersion and an average of the predetermined number of the input data stored in the input data storing step are calculated; an error of each input data against the average is obtained; and current input data is evaluated according to the dispersion and a respective error.
13. A data processing method according to claim 8, further comprising an output data storing step of storing the output data, wherein, in the step of processing the input data, previous output data stored in the output data storing step and current input data are added to obtain the output data corresponding to the current input data.
14. A data processing method according to claim 13, wherein a predetermined weight coefficient is learned according to the reliability of the input data and the reliability of the output data in the step of learning, and
the output data corresponding to the current input data is obtained according to the weight coefficient in the step of processing the input data.
15. A storage medium storing a computer-controllable program for processing input data and creating processed data for outputting the program comprising the steps of:
processing the input data by a predetermined processing and outputting the processed data as output data;
evaluating the input data and calculating a reliability of the input data;
evaluating the output data and calculating a reliability of the output data, and
learning the step of processing the input data in real time in a single component using the calculated reliability of the input data and the calculated reliability of the output data to create a learned processing, and the input data is processed by the step of processing the input data by the learned processing.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A system for processing a workpiece, comprising:
a first rotor;
a second rotor engageable with the first rotor;
a fluid inlet in at least one of the first and second rotors for applying a liquid onto a workpiece between the first and second rotors;
a drain manifold for draining liquid applied to the workpiece;
a first valve in drain manifold and a first drain fitting associated with the first valve; and
a second valve in the drain manifold and a second drain fitting associated with the second valve.
2. The system of claim 1 further comprising a third valve in the manifold associated with a third drain fitting.
3. The system of claim 2 further comprising a fourth drain valve in the manifold associated with a fourth drain fitting.
4. A system for processing a workpiece, comprising:
a first rotor having a face plate;
a ring-shaped second rotor;
a shift assembly, for moving the first and second rotor together and apart; and
a bowl, with the second rotor positionable in the bowl for processing.
5. The system of claim 4 further comprising a first rotor ring joined with the first rotor, with the second rotor supported on the first rotor ring, and with the shift assembly converting to the first rotor ring.
6. A system for processing a workpiece comprising:
a first rotor;
a second rotor engageable with the first rotor;
an outlet in at least one of the first and second rotors;
a load slot in the side of the first rotor, to allow loading and unloading of a workpiece into the system via horizontal movement of the workpiece.
7. The system of claim 6 further comprising first support pins on the first rotor and second support pins on the second rotor, with the second support pins vertically spaced apart from a workpiece in the system by about 0.005-0.015 inches, when the first and second rotors are brought together into a processing position.
8. The system of claim 6 wherein the first rotor is ring shaped and open in the center.
9. The system of claim 7 further comprising centering pins on at least one of the first and second rotors, outside of circumferential edges of a workpiece in the system, for maintaining the workpiece centered on a spin axis of the rotors.
10. The system of claim 7 further comprising movement means, for moving the first and second rotors towards and away from each other, and for spinning the rotors.
11. The system of claim 10 with the first rotor supported on the movement means.
12. The system of claim 11 further comprising an immersion vessel, and with the second rotor moveable into the immersion vessel via the movement means, for immersion processing at least one side of a workpiece.
13. The system of claim 12 with the immersion vessel having a sidewall including a contour section with an increasing radius of curvature.
14. The system of claim 13 with the sidewall of the contour section having a radius of curvature which increases from 5-15%.