1. A method for producing SOI wafers by delamination method comprising the steps of:
preparing a first wafer having an insulating layer on its both major surfaces;
providing two delamination planes in the interior of said first wafer;
bonding a second wafer on one side of the first wafer bonding a third wafer on the other side of the first wafer; and
delaminating said second and third wafers from said first wafer such that each of said second and third wafers carries a SOI layer on one of its major surfaces.
2. The method according to claim 1, wherein said first, second and third wafers are silicon wafers and said insulating layer is an SiO2 layer.
3. The method according to claim 1, wherein said delamination planes are provided by ion implantation of hydrogen ions.
4. The method according to claim 3, wherein said ion implantation of hydrogen ions is performed simultaneously on both sides of said first wafer.
5. The method according to claim 1, wherein said delamination is performed by a heat treatment at a temperature of about 500 C. or higher in an inert gas atmosphere.
6. The method according to claim 1, wherein after delamination said first wafer is prepared as a new first wafer for a next delamination cycle.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
In the claims:
1. A thermally insulating glass panel comprising:
first and second spaced apart glass substrates defining a low pressure space therebetween having a pressure less than atmospheric pressure;
a plurality of spacers disposed between said first and second glass substrates in order to space the substrates from one another; and
at least one elongated fiber inclusive hermetic edge seal disposed at least partially between said first and second glass substrates for hermetically sealing said low pressure space.
2. The glass panel of claim 1, wherein said edge seal comprises at least one elongated glass fiber.
3. The glass panel of claim 1, wherein said edge seal is substantially transparent to at least certain wavelengths of visible light.
4. The glass panel of claim 1, wherein said edge seal comprises a bundle of elongated glass fibers.
5. The glass panel of claim 1, wherein said elongated fiber is bent at corner areas of the edge seal which substantially correspond to corner areas of the glass panel.
6. The glass panel of claim 5, wherein opposite ends of said elongated fiber are bonded to one another at a junction or interface area in order to complete the edge seal.
7. The glass panel of claim 1, wherein said fiber comprises at least one of: silica based glass, brucite and chrysotile.
8. The glass panel of claim 1, wherein at least one of said spacers comprises a glass fiber.
9. The glass panel of claim 1, wherein said edge seal has one of an approximately circular cross section, an approximately rectangular cross section, and an approximately oval cross section when located at least partially between the substrates.
10. The glass panel of claim 1, wherein said edge seal is transparent to at least about 70% of certain wavelengths of visible light.
11. The glass panel of claim 10, wherein said edge seal is transparent to at least about 90% of all wavelengths of visible light.
12. The glass panel of claim 13, wherein a refractive index of said edge seal is approximately equal to a refractive index of at least one of said glass substrates.
13. A vacuum IG window unit comprising:
first and second spaced apart substrates having a low pressure space therebetween with a pressure less than atmospheric pressure;
a plurality of spacers disposed between said first and second substrates for spacing said substrates from one another; and
an edge seal including at least one elongated fiber disposed between said first and second substrates for sealing said low pressure space.
14. The window unit of claim 13, wherein said substrates are glass substrates.
15. The window unit of claim 14, wherein said fiber comprises an elongated glass inclusive fiber.
16. The window unit of claim 13, wherein said edge seal comprises a bundle of elongated fibers.
17. A method of making a vacuum insulating glass (IG) window unit comprising:
providing first and second glass substrates;
positioning a plurality spacers on the first substrate;
positioning at least one glass fiber on the first substrate at least partially at an edge seal location;
sandwiching the at least one glass fiber and the spacers between the first and second glass substrates;
heating at least an edge seal area so as to form an edge seal including the at least one glass fiber; and
evacuating a space between the first and second substrates so that the space has a pressure less than atmospheric pressure.
18. The method of claim 17, wherein the glass fiber is elongated in shape, and wherein the method further comprises bending the fiber into a shape of an edge seal at the time of or after the fiber is positioned on the first substrate.
19. The method of claim 17, further comprising bending and fusing the glass fiber into a shape of an edge seal prior to positioning the fiber on the first substrate.
20. A vacuum IG window unit comprising:
first and second spaced apart substrates having a low pressure space therebetween with a pressure less than atmospheric pressure;
a plurality of spacers disposed between said first and second substrates for spacing said substrates from one another; and
an edge seal including at least one glass fiber disposed between said first and second substrates for sealing said low pressure space.