1. A flexible tube for supplying a chemical liquid, which is assembled in a chemical liquid supply apparatus and partitions an expansionshrinkage chamber inside the apparatus and a pressurizing chamber outside it, the tube comprising:
a tubular inlet side fixed end fixed to the chemical liquid supply apparatus, a tubular outlet side fixed end fixed to the chemical liquid supply apparatus, and an elastic deformation portion between the inlet and outlet side fixed ends, the inlet and outlet side fixed ends and the elastic deformation portion being provided in the flexible tube; and
convex arc portions whose deformation centers are three apices spaced apart at approximately regular intervals in a circumferential direction and which are curved in convex shapes so as to have a smaller curvature radius than that of a virtual circle tangent to the apices and project outward, and concave arc portions curved into concave shapes outward consecutively between the respective convex arc portions in a circumferential direction, the convex and concave arc portions being formed in the elastic deformation portion,
wherein at a time of expansion and shrinkage of the elastic deformation portion, the convex arc portions elastically deform in the circumferential direction from the apices as centers, and the concave arc portions elastically deform in a radial direction.
2. A flexible tube for supplying a chemical liquid, according to claim 1, further comprising:
axial deformation portions formed so as to extend to the concave arc portions of the elastic deformation portion and be axially deformed elastically
wherein the axial deformation portions are deformed elastically at a time of expansion and shrinkage of the elastic deformation portions.
3. The flexible tube for supplying a chemical liquid according to claim 2, wherein the axial deformation portions are formed on all circumference of the elastic deformation portion.
4. The flexible tube for supplying a chemical liquid according to claim 2, wherein the axial deformation portions are formed at both ends of the elastic deformation portion.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A compound of formula
and salts thereof, wherein
R is hydroxy or OR2
R1 is hydrogen, halogen, hydroxy, NH2SO2, (C1-4)alkoxy, halo(C1-4)alkoxy, tri(C1-6alkylsilyloxy and (C1-4)alkoxycarbonyl,
and R2 is (C1-4)alkyl, halo(C1-4)alkyl, (C6-18)aryl(C1-4)alkyl or NH2SO3.
2. A compound according to claim 1 of formula
wherein
Rp is hydroxy, aminosulfonyloxy, methoxy, or benzyloxy, and
R1p is halogen, hydroxy, NH2SO2, (C1-4)alkoxy, halo(C1-4)alkoxy, tri(C1-6)alkylsilyloxy and (C1-4)alkoxycarbonyl.
3. A compound according to claim 1 of formula
4. A compound according to claim 1 of formula
5. A compound of claim 1 in the form of a salt.
6. A pharmaceutical composition comprising a compound of claim 1 in association with at least one pharmaceutical excipient.