1. A silicon condenser microphone, comprising:
a substrate including a side surrounding a cavity;
a transducer unit supported by the substrate, including a backplate and a diaphragm forming a capacitor with the backplate;
a partition positioned in the cavity of the substrate for dividing the cavity into an upper cavity and a lower cavity, the partition including a main body connected to an inner surface of the side of the substrate, and a perforation penetrating the main body for communicating the upper cavity with the lower cavity.
2. The silicon condenser microphone as described in claim 1 further including a top cover for fixing the diaphragm.
3. The silicon condenser microphone as described in claim 1, wherein the backplate attaches to the substrate and forms a plurality of through holes.
4. The silicon condenser microphone as described in claim 1, wherein the partition further includes a protrusion extending from the main body, and the perforation penetrates the protrusion and the main body.
5. The silicon condenser microphone as described in claim 4, wherein the protrusion extends from the main body along a direction far away from the transducer unit.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A filter assembly for use in a baghouse, the baghouse having a tube sheet with a plurality of openings, the filter assembly comprising:
a first filter element including a mounting structure at a first axial end to attach the first filter element to the tube sheet adjacent an opening, a first tubular member fixed to and extending from the mounting structure, a first pleated filter media disposed adjacent to the first tubular member, and a first member having a threaded portion connected with the tubular member at a second axial end of the first filter element;
a second filter element including a second member having a threaded portion at a first axial end, a second tubular member connected with and extending from the second member, a second pleated filter media disposed adjacent to the second tubular member; and
the first and second threaded members being tubular and the threaded portions being threadedly engageable to connect the first filter element with the second filter element and permit fluid communication between the first and second filter elements, the threaded portions of the first and second members located outside the axial extents of the first and second filter elements.
2. The filter assembly of claim 1 wherein at least one of the threaded portions of the first and second members has an outer diameter greater than the smallest inner diameter of the first and second pleated filter medias.
3. The filter assembly of claim 1 wherein the threaded portions of the first and second members has an outer diameter less than the largest outer diameter of the first and second filter elements.
4. The filter assembly of claim 1 wherein at least one of the first and second members includes a flange and side wall to surround an end portion of a respective filter element and that is filled with a potting material, the side wall having a portion projecting into the potting material to resist separation of the at least one member from the potting material.
5. The filter assembly of claim 1 wherein at least one of the first and second members includes one of the threaded portions swaged to a cup member to form a seal that inhibits leakage therebetween.
6. The filter assembly of claim 1 wherein the first member has an externally threaded portion extending from the second axial end of the first filter element and the second member has an internally threaded member extending from the first axial end of the second filter element.
7. The filter assembly of claim 1 further including an end plate at a second axial end of the second filter element to define a closed end of the second filter element.
8. A filter assembly for use in a baghouse, the baghouse having a tube sheet with a plurality of openings, the filter assembly comprising:
a first filter element including a mounting structure at a first axial end to attach the first filter element to the tube sheet adjacent an opening, a first tubular member fixed to and extending from the mounting structure, a first pleated filter media disposed adjacent to the first tubular member, and a first member having a threaded portion connected with the tubular member at a second axial end of the first filter element;
a second filter element including a second member having a threaded portion at a first axial end, a second tubular member connected with and extending from the second member, a second pleated filter media disposed adjacent to the second tubular member; and
the first and second threaded members being tubular and the threaded portions being threadedly engageable to connect the first filter element with the second filter element and permit fluid communication between the first and second filter elements, at least one of the threaded portions of the first and second members has an outer diameter greater than the smallest inner diameter of the first and second pleated filter medias.
9. The filter assembly of claim 8 wherein the threaded portions of the first and second members located outside the axial extents of the first and second filter elements.
10. The filter assembly of claim 8 wherein the threaded portions of the first and second members has an outer diameter less than the largest outer diameter of the first and second filter elements.
11. The filter assembly of claim 8 wherein at least one of the first and second members includes a flange and side wall to surround an end portion of a respective filter element and that is filled with a potting material, the side wall having a portion projecting into the potting material to resist separation of the at least one member from the potting material.
12. The filter assembly of claim 8 wherein at least one of the first and second members includes one of the threaded portions swaged to a cup member to form a seal that inhibits leakage therebetween.
13. The filter assembly of claim 8 wherein the first member has an externally threaded portion extending from the second axial end of the first filter element and the second member has an internally threaded member extending from the first axial end of the second filter element.
14. The filter assembly of claim 8 further including an end plate at a second axial end of the second filter element to define a closed end of the second filter element.
15. A filter assembly for use in a baghouse, the baghouse having a tube sheet with a plurality of openings, the filter assembly comprising:
a first filter element including a mounting structure at a first axial end to attach the first filter element to the tube sheet adjacent an opening, a first tubular member fixed to and extending from the mounting structure, a first pleated filter media disposed adjacent to the first tubular member, and a first member having a threaded portion connected with the tubular member at a second axial end of the first filter element;
a second filter element including a second member having a threaded portion at a first axial end, a second tubular member connected with and extending from the second member, a second pleated filter media disposed adjacent to the second tubular member; and
the first and second threaded members being tubular and the threaded portions being threadedly engageable to connect the first filter element with the second filter element and permit fluid communication between the first and second filter elements, the threaded portions of the first and second members located outside the axial extents of the first and second filter elements and at least one of the threaded portions of the first and second members has an outer diameter greater than the smallest inner diameter of the first and second pleated filter medias.
16. The filter assembly of claim 15 wherein the threaded portions of the first and second members has an outer diameter less than the largest outer diameter of the first and second filter elements.
17. The filter assembly of claim 15 wherein at least one of the first and second members includes a flange and side wall to surround an end portion of a respective filter element and that is filled with a potting material, the side wall having a portion projecting into the potting material to resist separation of the at least one member from the potting material.
18. The filter assembly of claim 15 wherein at least one of the first and second members includes one of the threaded portions swaged to a cup member to form a seal that inhibits leakage therebetween.
19. The filter assembly of claim 15 wherein the first member has an externally threaded portion extending from the second axial end of the first filter element and the second member has an internally threaded member extending from the first axial end of the second filter element.
20. The filter assembly of claim 15 further including an end plate at a second axial end of the second filter element to define a closed end of the second filter element.