1. A method for fabricating a thin film transistor, comprising:
forming a semiconductor layer on a substrate;
forming a gate insulation layer on the semiconductor layer;
forming a gate electrode on the gate insulation layer;
etching an entire upper surface of the gate insulation layer except a portion on which the gate electrode is formed by as much as a first thickness; and
forming a lightly doped drain (LDD) region in which a projected range of ions doped in the semiconductor layer extends to a first depth from a surface of the semiconductor layer,
wherein the first thickness equals the first depth.
2. The method of claim 1, wherein the first depth satisfies the following mathematical expression:
(thickness of the semiconductor layer2)-100 \u212b\u2266first depth\u2266(thickness of the semiconductor layer2)+100 \u212b.
3. The method of claim 1, wherein ion doping for forming the LDD region is performed under accelerated voltage conditions in a range of about 80 to about 90 keV.
4. The method of claim 1, wherein ion doping for forming the LDD region is performed under dose conditions in a range of about 1E13 to about 5E13 ionscm2.
5. The method of claim 1, wherein the portion of the gate insulation layer on which the gate electrode is formed has a second thickness before and after the gate insulation layer is etched, and a portion of the gate insulation layer on which the gate electrode is not formed has the second thickness before being etched and a third thickness after being etched, the difference between the second thickness and the third thickness equaling the first thickness.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An apparatus comprising:
an enclosure mounted within an interior of an engine compartment of a vehicle and transverse to a front of said vehicle and in communication with fluid flow generated by movement of said vehicle;
an electro-mechanical generator mounted in said enclosure and in electrical communication with a battery;
said electro-mechanical generator integrated into a rotational element comprising:
a rotational element mounted within said enclosure to rotate about an axis upon receipt of said fluid flow in said enclosure;
a magnet coupled to a distal end of said rotational element to rotate with said rotational element;
an electrically conductive material spaced about a housing relatively concentric to said rotational element and in communication with said magnet;
an electrical charge generated from rotation of said rotational element; and
a connection to communicate said electrical charge to said battery.
2. The apparatus of claim 1, further comprising a first electro-mechanical generator housed in said enclosure adjacent to a second electro-mechanical generator, said first electro-mechanical generator having a first rotational element to rotate in a first rotational direction and said second electro-mechanical generator having a second rotational element adapted to rotate in a second rotational direction, wherein said first and second rotational directions are different.
3. The apparatus of claim 2, further comprising a first fluid force generated by initial movement of said vehicle to cause rotation of said first rotational element, and a second fluid force generated by rotational of said first rotational element to cause rotation of said second rotational element in an opposite direction to said first rotational element.
4. The apparatus of claim 2, further comprising a first battery operatively connected to said first electro-mechanical generator and a second battery operatively connected to said second electro-mechanical generator.
5. The apparatus of claim 1, wherein said electro-mechanical generator is a modular component secured in said enclosure.
6. The apparatus of claim 5, further comprising a visual indicator operatively engaged with each of said modular electro-mechanical generator components to communicate proper operation of said component.
7. The apparatus of claim 6, wherein proper operation of said component includes generating of a minimum electrical charge to said battery operatively engaged with said generator component.
8. The apparatus of claim 5, further comprising modular housing compartments within said enclosure, wherein each of said housing components is sized to receive one of said modular electro-mechanical generator components.
9. The apparatus of claim 8, further comprising replacing one of said generator components with a replacement component absent disruption to a previously installed modular electro-mechanical generator component in said enclosure.
10. The apparatus of claim 9, wherein replacement of one of said modular components is initiated following receipt of a communication that output from said component to said battery is below a threshold of required electrical energy.
11. The apparatus of claim 10, further comprising a control system to monitor electrical output from each of said modular generator components.
12. The apparatus of claim 11, further comprising an output device in communication with said control system to convey failure data of one of said generator components, wherein said output device communication data in a format selected from the group consisting of: visual, auditory, and tactile.
13. The apparatus of claim 1, wherein said electro-mechanical generator is an generator integrated into said rotational element.
14. The apparatus of claim 1, wherein said generated electrical charge recharges said battery.
15. The apparatus of claim 1, wherein said vehicle is selected from the group consisting of: a land vehicle, an air vehicle, and a water based vehicle, and combinations thereof.
16. An apparatus comprising:
an enclosure mounted within an interior of an engine compartment of a vehicle transverse to a front of said vehicle and in communication with a fluid flow generated by movement of said vehicle;
said enclosure having a plurality of interior compartments, with each of said compartments configured to receive and mount a single modular electro-mechanical generator component, said modular electro-mechanical generator component in electrical communication with a battery;
each of said electro-mechanical generator components comprising a generator mounted to a brace and a rotational element in communication with said generator through a shaft;
said rotational element adapted to rotate about an axis upon receipt of said fluid flow in said enclosure;
a first electro-mechanical generator component housed in a first compartment of said enclosure adjacent to a second electro-mechanical generator component housed in an adjacent compartment, said first electro-mechanical generator having a first rotational element adapted to rotate in a first rotational direction and said second electro-mechanical generator having a second rotational element adapted to rotate in a second rotational direction, wherein said first and second rotational directions are different;
an electrical charge generated by each of said generator components through rotation of said rotational elements; and
an electrical connection to communicate said generated electrical charge to said battery.
17. The apparatus of claim 16, further comprising a first fluid force generated by initial movement of said vehicle to cause rotation of said first rotational element, and a second fluid force generated by rotation of said first rotational element to cause rotation of a second rotational element in an opposite direction to said first rotational element.
18. The apparatus of claim 17, wherein said first and second rotational elements are mounted in adjacent compartments of said enclosure.
19. The apparatus of claim 16, wherein said generated electrical charge recharges said battery.
20. The apparatus of claim 16, further comprising a visual indicator operatively engaged with each of said modular electro-mechanical generator components to communicate proper operation of said components.
21. The apparatus of claim 20, wherein proper operation of said component includes generating of a minimum electrical charge to said battery operatively engaged with said generator component.
22. The apparatus of claim 16, wherein said electro-mechanical generator is a modular component secured in said enclosure.
23. The apparatus of claim 22, further comprising modular housing compartments within said enclosure, wherein each of said housing components is sized to receive one of said modular electro-mechanical generator components.
24. The apparatus of claim 23, further comprising replacing one of said generator components with a replacement component absent disruption to previously installed generator component in said enclosure.
25. The apparatus of claim 24, wherein replacement of said component is initiated following receipt of a communication that output from said component to said battery is below a threshold of required electrical output.
26. The apparatus of claim 25, further comprising a control system to monitor electrical output from each of said generator components.
27. The apparatus of claim 26, further comprising an output device in communication with said control system to convey failure data of said generator component, wherein said output device communication data in a format selected from the group consisting of: visual, auditory, and tactile.
28. The apparatus of claim 16, wherein said vehicle is selected from the group consisting of: a land vehicle, an air vehicle, and a water based vehicle, and combinations thereof.
29. An apparatus comprising:
an electro-mechanical generator mounted in a frame and in electrical communication with a battery;
said electro-mechanical generator integrated into a rotational element comprising:
a first rotational element mounted within said frame to rotate about an axis upon receipt of said fluid flow;
a plurality of blades in communication with said first rotational element, a proximal end of each of said blades mounted to said first rotational element and a distal end of each of said blades in communication with a second rotational element;
a magnet housed in said second rotational element;
said second rotational element to rotate with said first rotational element;
an electrically conductive material housed in a third element, spaced apart from said second rotational element; and
an electrical charge generated from rotation of said magnet proximal to said electrically conductive material; and
an electrical connection to communicate said generated electrical charge to said battery.
30. The apparatus of claim 29, further comprising a motor in communication with said battery, said motor to receive electrical energy from said battery as a power source.
31. The apparatus of claim 29, wherein said third element in a fixed position relative to said first and second rotational elements.
32. The apparatus of claim 31, wherein said third element is concentric with said first and second rotational elements.
33. The apparatus of claim 29, wherein said electrically conductive material is a plurality of units spaced about said third element.
34. The apparatus of claim 33, further comprising a capacitor and rectifier bridge for each of said units.
35. The apparatus of claim 29, wherein said vehicle is selected from the group consisting of: a land vehicle, an air vehicle, and a water based vehicle, and combinations thereof.