1. A method of controlling combustion of an internal combustion engine during a lean mode of the engine, comprising:
storing, in a control unit, at least one combustion control table that defines at least one combustion control value in terms of the following variables: engine speed, representative temperature value, and representative torque;
during operation of the engine, receiving values representing engine speed, temperature, and intake air flow;
calculating a representative in-cylinder fresh air oxygen value and a representative temperature value;
wherein the representative in-cylinder fresh air oxygen value is calculated at least in part from the measured intake air flow;
using the representative in-cylinder fresh air oxygen value, the representative temperature value, and the engine speed value to calculate the representative torque value;
accessing the combustion control table, such that the representative torque value, the representative temperature value, and the engine speed value are used to determine at least one combustion control value; and
using the combustion control value from the previous step to control an associated combustion control mechanism.
2. The method of claim 1, further comprising the steps of determining at least one air handling representative value and of using the air handling representative value to determine at least one air handling actuator position value, prior to the step of calculating the representative in-cylinder fresh air oxygen value.
3. The method of claim 1, wherein the temperature representative value is calculated from intake temperature and coolant temperature.
4. The method of claim 1, wherein the in-cylinder fresh air oxygen representative value is calculated from an estimated value of in-cylinder oxygen from fresh air added to the product of a fresh air flow weighting function, the ratio of in-cylinder oxygen in fresh air to total in-cylinder oxygen, and the deviation of oxygen mass in recirculated exhaust gas from steady state.
5. The method of claim 4, wherein the weighting function varies from 0 to 1 and varies during light load conditions of the engine.
6. The method of claim 4, wherein the weighting function is determined by storing and accessing a table of air flow, temperature, and engine speed values mapped to weighting function values.
7. The method of claim 4, wherein the ratio of in-cylinder oxygen from fresh air to total in-cylinder oxygen is determined by storing and accessing a table of air flow, temperature, and engine speed values mapped to values of the ratio.
8. The method of claim 4, wherein the deviation of oxygen mass in recirculated exhaust gas from steady state is determined by storing and accessing a table of air flow, temperature, and engine speed values mapped to values of the deviation.
9. The method of claim 1, wherein the at least one fueling parameter is fuel injection quantity.
10. The method of claim 1, wherein the at least one fueling parameter is rail pressure.
11. The method of claim 1, wherein the at least one fueling parameter is injection or ignition timing, and further comprising the step of correcting a base timing parameter with an O2 concentration correction factor.
12. The method of claim 11, wherein the correction factor advances timing when oxygen concentration is lower than at steady state.
13. A method of controlling combustion of an internal combustion engine during a rich mode of the engine, comprising:
storing, in a fueling control unit, a fueling quantity control table that defines fueling quantity control values in terms of the following variables: engine speed, representative temperature, and representative torque;
during operation of the engine, receiving values representing engine speed, temperature, and intake air flow;
calculating a representative in-cylinder total oxygen value and a representative temperature value;
wherein the representative in-cylinder total oxygen value is calculated at least in part from the intake air flow;
using the representative in-cylinder fresh air oxygen value, the representative temperature value, and the engine speed value to calculate the representative torque value;
accessing the fueling quantity control table, such that the representative torque value, the representative temperature value, and the engine speed value are used to determine a fueling quantity control value;
correcting the fueling quantity control value based on a desired air-fuel ratio and feedback from an exhaust oxygen sensor; and
using the fueling quantity control value from the previous step to control fuel injection.
14. The method of claim 13, further comprising the steps of storing additional fueling parameter base maps for additional fueling parameters, and wherein accessing step is performed to obtain additional fueling control values.
15. The method of claim 13, further comprising the initial step of beginning the rich mode when the oxygen concentration reaches a rich mode oxygen concentration.
16. The method of claim 13, further comprising the steps of determining at least one air handling representative value and of using the air handling representative value to determine at least one air handling actuator position value, prior to the step of calculating the representative in-cylinder total oxygen value.
17. The method of claim 16, wherein the air handling representative value is determined from a current air handling representative value and a differential of pedal position.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method for detecting rule violations in a mask pattern file, comprising:
calculating a manufacturing rule based on a design parameter associated with a manufacturing process;
measuring a non-edge dimension of a feature in a mask pattern file, the non-edge dimension comprising a dimension of the feature other than the length of an edge of the feature; and
identifying a rule violation in the mask pattern file if the measured non-edge dimension is less than the calculated manufacturing rule.
2. The method of claim 1, further comprising the calculated manufacturing rule including a minimum area (area) calculated based on the design parameter (b) using the formula:
area=b2*1.20.
3. The method of claim 1, further comprising the calculated manufacturing rule including a minimum vertice distance (c) calculated based on the design parameter (b) using the formula:
c=\u221a{square root over (b)}2.
4. The method of claim 1, wherein the feature comprises a jog feature, an optical proximity correction (OPC) feature or an isolated feature.
5. The method of claim 4, wherein measuring the non-edge dimension of the feature in the mask pattern file comprises determining a measured area for the isolated feature.
6. The method of claim 4, wherein measuring the non-edge dimension of the feature in the mask pattern file comprises determining a measured vertice distance for the OPC feature.
7. The method of claim 4, wherein measuring the non-edge dimension of the feature in the mask pattern file comprises determining a measured distance between at least two edges of the jog feature.
8. The method of claim 1, wherein the design parameter comprises a range between approximately ten nanometers and approximately one thousand nanometers.
9. The method of claim 1, further comprising the manufacturing process including an etching process.
10. The method of claim 9, wherein the etching process comprises a dry etch.
11. The method of claim 9, wherein the etching process comprises a wet etch.
12. The method of claim 1, further comprising selecting the manufacturing process to fabricate a photomask using the mask pattern file if the measured non-edge dimension is greater than or equal to the calculated manufacturing rule.
13. The method of claim 1, further comprising:
measuring a width of a linear feature in the mask pattern file; and
identifying the rule violation in the mask pattern file if the measured width is less than the calculated manufacturing rule.
14. A method for determining manufacturability of a photomask based on manufacturing rules, comprising:
calculating a manufacturing rule based on a design parameter associated with a manufacturing process;
measuring a non-edge dimension of a feature in a mask pattern file, the non-edge dimension comprising a dimension of the feature other than the length of an edge of the feature; and
selecting the manufacturing process to fabricate a photomask if the measured non-edge dimension is greater than or equal to the calculated manufacturing rule.
15. The method of claim 14, further comprising the calculated manufacturing rule including a minimum area (area) calculated based on the design parameter (b) using the formula:
area=b2*1.20.
16. The method of claim 14, further comprising the calculated manufacturing rule including a minimum vertice distance (c) calculated based on the design parameter (b) using the formula:
c=\u221a{square root over (b)}2.
17. The method of claim 14, further comprising the measured non-edge dimension adjusted by a sizing value.
18. The method of claim 14, wherein the manufacturing process comprises a writing process.
19. The photomask of claim 18, further comprising the manufacturing process including an etching process.
20. A photomask, comprising:
a substrate; and
a patterned layer formed on at least a portion of the substrate, the patterned layer formed by:
calculating a manufacturing rule based on a design parameter associated with a manufacturing process;
measuring a non-edge dimension of a feature in a mask pattern file, the non-edge dimension comprising a dimension of the feature other than the length of an edge of the feature; and
selecting the manufacturing process to fabricate the photomask if the measured non-edge dimension is greater than or equal to the calculated manufacturing rule.
21. The photomask of claim 20, further comprising the calculated manufacturing rule including a minimum area (area) calculated based on the design parameter (b) using the formula:
area=b2*1.20.
22. The photomask of claim 20, further comprising the calculated manufacturing rule including a minimum vertice distance (c) calculated based on the design parameter (b) using the formula
c=\u221a{square root over (b)}2.
23. A photomask assembly, comprising:
a pellicle assembly defined in part by a pellicle frame and a pellicle film attached thereto; and
a photomask coupled to the pellicle assembly opposite from the pellicle film, the photomask including a patterned layer formed on a substrate, the patterned layer formed by:
calculating a manufacturing rule based on a design parameter associated with a manufacturing process;
measuring a non-edge dimension of a feature in a mask pattern file, the non-edge dimension comprising a dimension of the feature other than the length of an edge of the feature; and
selecting the manufacturing process to fabricate the photomask if the measured non-edge dimension is greater than or equal to the calculated manufacturing rule.
24. The photomask assembly of claim 23, further comprising the calculated manufacturing rule including a minimum area (area) calculated based on the design parameter (b) using the formula:
area=b2*1.20.
25. The photomask assembly of claim 23, further comprising the calculated manufacturing rule including a minimum vertice distance (c) calculated based on the design parameter (b) using the formula:
c=\u221a{square root over (b)}2.