1. A multiphase, ultra low k dielectric film comprising atoms of Si, C, O and H, said film having a dielectric constant of about 2.4 or less, nanosized pores or voids, an elastic modulus of about 5 or greater and a hardness of about 0.7 or greater.
2. The multiphase, ultra low k film of claim 1 having a dielectric constant of about 2.2 or less, nanosized pores or voids, an elastic modulus is from about 3 or greater, and said hardness is from about 0.3 or greater.
3. The multiphase, ultra low k film of claim 1 wherein said pores or voids have a pore diameter of from about 0.5 to about 20 nanometers
4. The multiphase, ultra low k film of claim 1 wherein said film has a first phase of a hydrogenated oxidized silicon carbon material (SiCOH) consisting of Si, C, O and H in a covalently bonded network, and at least another phase consists mainly of C and H atoms.
5. The multiphase, ultra low k film of claim 1 wherein a dense region at the top surface of the film is formed by adjusting the e-Beam radiation conditions.
6. An electronic structure comprising at least a multiphase, ultra low k film of claim 1.
7. An electronic structure comprising at least a multiphase, ultra low k film of claim 1 and further comprising a dense region at the top surface of said film.
8. The electronic structure of claim 6 wherein said multiphase, ultra low k film is an interlevel or intralevel dielectric of a back-end-of-the-line (BEOL) wiring structure.
9. The electronic structure of claim 6 wherein said multiphase, ultra low k film is a cap or diffusion barrier of a BEOL wiring structure.
10. The electronic structure of claim 6 wherein said multiphase, ultra low k film is a hard mask or a polish stop layer for a BEOL wiring structure
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1-30. (canceled)
31. A method of forming a carbon-heteroatom bond between a glycosyl donor and a substrate, comprising the step of combining in solution, in a reaction vessel containing at least one insoluble resin bead, a glycosyl donor comprising a reactive anomeric carbon, a substrate comprising a heteroatom bearing a hydrogen, and an activating reagent, wherein said activating reagent activates said reactive anomeric carbon of said glycosyl donor, thereby forming a product comprising a carbon-heteroatom bond between said anomeric carbon of said glycosyl donor and said heteroatom of said substrate.
32. The method claim 31, wherein said glycosyl donor comprising a reactive anomeric carbon is selected from the group consisting of glycosyl phosphates, glycosyl phosphites, glycosyl trichloroacetimidates, glycosyl halides, glycosyl sulfides, glycosyl sulfoxides, n-pentenyl glycosides, and 1,2-anhydroglycosides.
33. The method claim 31, wherein said glycosyl donor comprising a reactive anomeric carbon is selected from the group consisting of glycosyl phosphates and glycosyl trichloroacetimidates.
34. The method of claim 31, wherein said heteroatom bearing a hydrogen of said substrate is selected from the group consisting of oxygen, nitrogen, and sulfur.
35. The method of claim 31, wherein said heteroatom bearing a hydrogen of said substrate is selected from the group consisting of oxygen and nitrogen.
36. The method of claim 31, wherein said heteroatom bearing a hydrogen of said substrate is oxygen.
37. The method of claim 31, wherein said activating reagent is a Lewis acid.
38. The method of claim 31, wherein said activating reagent is a silyl trifluoromethanesulfonate.
39. The method of claim 31, wherein said activating reagent is trimethylsilyl trifluoromethanesulfonate.
40. The method of claim 31, wherein said glycosyl donor comprising a reactive anomeric carbon is selected from the group consisting of glycosyl phosphates, glycosyl phosphites, glycosyl trichloroacetimidates, glycosyl halides, glycosyl sulfides, glycosyl sulfoxides, n-pentenyl glycosides, and 1,2-anhydroglycosides; said heteroatom bearing a hydrogen of said substrate is selected from the group consisting of oxygen, nitrogen, and sulfur; and said activating reagent is a Lewis acid.
41. The method of claim 31, wherein said glycosyl donor comprising a reactive anomeric carbon is selected from the group consisting of glycosyl phosphates and glycosyl trichloroacetimidates; said heteroatom bearing a hydrogen of said substrate is selected from the group consisting of oxygen, nitrogen, and sulfur; and said activating reagent is a silyl trifluoromethanesulfonate.
42. The method of claim 31, wherein said glycosyl donor comprising a reactive anomeric carbon is selected from the group consisting of glycosyl phosphates and glycosyl trichloroacetimidates; said heteroatom bearing a hydrogen of said substrate is selected from the group consisting of oxygen, nitrogen, and sulfur; and said activating reagent is trimethylsilyl trifluoromethanesulfonate.
43. The method of claim 31, wherein said substrate comprising a heteroatom bearing a hydrogen is tethered to a solid support via a covalent linker.
44. The method of claim 43, wherein said covalent linker is \u2014O\u2014(CH2)3CH\u2550CH(CH2)3\u2014O\u2014.
45. The method of claim 44, wherein said solid support is a resin bead.
46. The method of claim 45, wherein said substrate comprising a heteroatom bearing a hydrogen is selected from the group consisting of monosaccharides, oligosaccharides, polysaccharides, and glycoconjugates.
47. The method of claim 31, wherein said glycosyl donor comprising a reactive anomeric carbon is tethered to a solid support via a covalent linker.
48. The method of claim 47, wherein said covalent linker is \u2014O\u2014(CH2)3CH\u2550CH(CH2)3\u2014O\u2014.
49. The method of claim 48, wherein said solid support is a resin bead.
50. The method of claim 49, wherein said substrate comprising a heteroatom bearing a hydrogen is selected from the group consisting of monosaccharides, oligosaccharides, polysaccharides, and glycoconjugates.
51. The method of claim 43, further comprising the steps of applying positive pressure or a vacuum to said reaction vessel of said apparatus, thereby removing the liquid phase from said reaction vessel of said apparatus; and adding solvent to said reaction vessel of said apparatus.
52. The method of claim 47, further comprising the steps of applying positive pressure or a vacuum to said reaction vessel of said apparatus, thereby removing the liquid phase from said reaction vessel of said apparatus; and adding solvent to said reaction vessel of said apparatus.
53. The method of claim 51, further comprising the steps of applying positive pressure or a vacuum to said reaction vessel of said apparatus, thereby removing the liquid phase from said reaction vessel of said apparatus; and adding solvent to said reaction vessel of said apparatus.
54. The method of claim 52, further comprising the steps of applying positive pressure or a vacuum to said reaction vessel of said apparatus, thereby removing the liquid phase from said reaction vessel of said apparatus; and adding solvent to said reaction vessel of said apparatus.
55. The method of claim 51, further comprising the step of treating said product, in said reaction vessel of said apparatus, with a solution comprising a deprotection reagent, thereby removing from said product a protecting group to produce a second product comprising a heteroatom bearing a hydrogen, wherein said second product is tethered to a solid support via a covalent linker.
56. The method of claim 55, further comprising the step of combining in solution, in said reaction vessel of said apparatus, a glycosyl donor comprising a reactive anomeric carbon, said second product comprising a heteroatom bearing a hydrogen, and an activating reagent, wherein said activating reagent activates said reactive anomeric carbon of said glycosyl donor, thereby forming a third product comprising a carbon-heteroatom bond between said anomeric carbon of said glycosyl donor and said heteroatom of said second product, wherein said third product is tethered to a solid support via a covalent linker.
57. The method of claim 52, further comprising the step of treating said product, in said reaction vessel of said apparatus, with a solution comprising a converting reagent to produce a second product comprising a reactive anomeric carbon, wherein said second product is tethered to a solid support via a covalent linker.
58. The method of claim 57, further comprising the step of combining in solution, in said reaction vessel of said apparatus, a substrate comprising a heteroatom bearing a hydrogen, said second product comprising a reactive anomeric carbon, and an activating reagent, wherein said activating reagent activates said reactive anomeric carbon of said second product, thereby forming a third product comprising a carbon-heteroatom bond between said anomeric carbon of said second product and said heteroatom of said substrate, wherein said third product is tethered to a solid support via a covalent linker.