1. A voltage controlled oscillator, comprising:
a substrate comprising quartz;
a resonance part including a variable capacitance element and an inductance element, the variable capacitance element having a capacitance which changes according to control voltage for frequency control inputted from an external part, in which a series resonance frequency is adjusted according to the capacitance;
a transistor for amplification having a base connected to the resonance part; and
a first feedback capacitance element and a second feedback capacitance element, which are connected between a base of the transistor and ground and connected in series with each other, the emitter of the transistor being connected therebetween;
wherein the first feedback capacitance element is connected between a base terminal on the substrate on which a pin that extends from the base of the transmitter is mounted, and an emitter terminal on the substrate, on which a pin that extends from the emitter of the transmitter is mounted, the first feedback capacitance element formed by a comb electrode comprising a first and a second common electrode that are formed parallel to each other so as to intersect a line that joins said first and second common electrodes, a first group of electrode fingers extending from the first common electrode in a comb shape, and a second group of electrode fingers extending from the second common electrode in another comb shape, the comb shape of the first group being interdigitated with the another comb shape of the second group;
wherein the distance between the base terminal and the emitter terminal is no greater than 120 \u03bcm; and
wherein the series resonance frequency is no less than 5 GHz.
2. The voltage controlled oscillator according to claim 1,
wherein the second feedback capacitance element is is connected between the emitter terminal and a ground terminal on the substrate, the second feedback capacitance element formed by a comb electrode comprising a third and a fourth common electrode that are formed parallel to each other so as to intersect a line that joins said third and fourth common electrodes, a third group of electrode fingers extending from the third common electrode in a comb shape, and a fourth group of electrode fingers extending from the fourth common electrode in another comb shape, the comb shape of the third group being interdigitated with the another comb shape of the fourth group; and
wherein the distance between the emitter terminal and the ground terminal is no greater than 120 \u03bcm.
3. The voltage controlled oscillator according to claim 1, wherein the resonance part includes a capacitance element other than the variable capacitance element, and this capacitance element comprises: a fifth common electrode and a sixth common electrode formed on the substrate in parallel to each other; a fifth group of electrode fingers extending from the fifth common electrode in a comb shape; and a sixth group of electrode fingers extending from the sixth common electrode in another comb shape; and wherein the comb shape of the fifth group is interdigitated with the another comb shape of the sixth group.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A scanning apparatus comprising:
a mirror structure comprising a mirror, a first side, and a second side opposite to said first side;
a first torsion hinge comprising a third side and a fourth side opposite to said third side;
a base; and
a forced vibration generator comprising a piezoelectric bimorph attached to said base;
wherein said third side of said first hinge is attached to said first side and said fourth side of said first hinge is attached directly to said base, whereby said mirror structure is suspended by said first torsion hinge.
2. The apparatus according to claim 1, wherein at least said first torsion hinge comprises polyimide.
3. The apparatus according to claim 1, wherein said forced vibration generator operates at approximately the same frequency as a resonant frequency of a structure comprising at least said mirror structure, said first torsion hinge and said base.
4. The apparatus according to claim 1, wherein said mirror structure further comprises a support comprising said first side and said second side, said mirror being attached to said support.
5. The apparatus according to claim 4, wherein said support and said base are integrally formed and coupled together by said first torsion hinge.
6. The apparatus according to claim 1, wherein said mirror comprises said first side and said second side.
7. An optical coherence tomography system comprising said scanning apparatus as claimed in claim 1.
8. The optical coherence tomography system according to claim 7 further comprising a lateral scanning arm, wherein said lateral scanning arm comprises said scanning apparatus.
9. A scanning apparatus comprising:
a mirror structure comprising a mirror, a first side, and a second side opposite to said first side
a first torsion hinge comprising a third side and a fourth side opposite to said third side;
a base;
a forced vibration generator comprising a piezoelectric bimorph attached to said base; and
a second torsion hinge comprising a fifth side and a sixth side opposite to said fifth side;
wherein said third side of said first hinge is attached to said first side and said fourth side of said first hinge is attached to said base, whereby said mirror structure is suspended. by said first torsion hinge; and
wherein said fifth side of said second torsion hinge is attached to said second side and said sixth side of side second torsion hinge is attached to said base, whereby said mirror structure is suspended by said first torsion hinge and said second torsion hinge.
10. The apparatus according to claim 3, wherein:
said first torsion hinge is attached to said first side at approximately a center portion of said first side; and
said second torsion hinge is attached to said second side at approximately a center portion of said second side.
11. A scanning apparatus comprising:
a mirror structure comprising a mirror, a first side, and a second side opposite to said first side;
a first torsion hinge comprising a third side and a fourth side Opposite to said third side:
a base; and
a forced vibration generator comprising a piezoelectric bimorph attached to said base;
wherein said third side of said first hinge is attached to said first side and said fourth side of said first hinge is attached to said base, whereby said mirror structure is suspended by said first torsion hinge: and
wherein the mirror structure pivots about the first torsion hinge upon application of a forced vibration to at least said base.
12. A scanning apparatus comprising:
a mirror structure comprising a mirror, a first side, and a second side opposite to said first side;
a first torsion hinge comprising a third side and a fourth side opposite to said third side; and
a base;
wherein said third side of said first hinge is attached to said first side and said fourth side of said first hinge is attached to said base, whereby said mirror structure is suspended by said first torsion hinge, and
a structure comprising at least said mirror structure, said first torsion hinge and said base has a resonant frequency on the order of 30 Hz to 40 Hz.
13. The apparatus according to claim 12, further comprising a piezoelectric bimorph attached to said base for generating a forced vibration, wherein said bimorph is driven below a resonant frequency thereof.
14. A scanning apparatus comprising:
a mirror structure comprising a first reflecting surface, a first side, and a second side opposite to said first side;
a first torsion hinge comprising a third side and a fourth side opposite to said third side; and
a base;
a focusing element;
a beam guide; and
a second reflecting surface;
wherein said third side of said first hinge is attached to said first side and said fourth side of said first hinge is attached to said base, whereby said mirror structure is suspended by said first torsion hinge, and
said second reflecting surface is arrange with respect to said focusing element and said mirror structure to direct a beam from said beam guide onto the first reflecting surface of said mirror structure.
15. The apparatus according to claim 14, wherein said focusing element comprises a Grin lens.
16. The apparatus according to claim 14, wherein said beam guide is an optical fiber.
17. The apparatus according to claim 14, further comprising a prism, wherein said prism comprises said second reflecting surface.
18. The apparatus according to claim 17, wherein said prism is a right angle microprism.
19. The apparatus according to claim 14, wherein said beam comprises an infra-red beam.
20. A scanning apparatus comprising:
a mirror structure comprising a mirror, a first side, and a second side opposite to said first side;
a first torsion hinge comprising a third side and a fourth side opposite to said third side;
A base; and
a forced vibration generator comprising a piezoelectric bimorph attached to said base;
wherein said third side of said first hinge is attached to said first side and said fourth side of said first hinge is attached to said base, whereby said mirror structure is suspended by said first torsion hinge; and
wherein said first torsion hinge and said base are integrally formed.
21. A scanning apparatus comprising:
a mirror structure comprising a mirror, a first side, and a second side opposite to said first side;
a first torsion hinge comprising a third side and a fourth side opposite to said third side;
a base;
a forced vibration generator comprising a piezoelectric bimorph attached to said base; and
a second torsion hinge,
wherein said third side of said first hinge is attached to said first side and said fourth side of said first hinge is attached to said base, whereby said mirror structure is suspended by said first torsion hinge;
wherein said mirror structure further comprises a support comprising said first side and said second side, said mirror being attached to said support;
wherein said support and said base are integrally formed and coupled together by said first torsion hinge; and
wherein, said support is coupled to said base by said first and second torsion hinges, said first and second torsion hinges being formed on opposite sides, respectively, of said support, whereby said support is capable of oscillating about an axis extending through said first and said second torsion hinges, said axis being parallel with a plane of said support.