1. A method of forming fine patterns, comprising:
forming first hard mask patterns extending in a first direction on a lower layer;
forming second hard mask patterns filling gap regions between the first hard mask patterns;
forming first mask patterns extending in a second direction perpendicular to the first direction on the first hard mask patterns and the second hard mask patterns;
etching the first hard mask patterns using the first mask patterns as etch masks to form first openings;
forming second mask patterns filling the first openings and extending in the second direction; and
etching the second hard mask patterns using the second mask patterns as etch masks to form second openings spaced apart from the first openings in a diagonal direction with respect to the first direction.
2. The method of claim 1, further comprising:
transferring the first and second openings to the lower layer to form holes arranged in zigzag form in the lower layer.
3. The method of claim 2, further comprising:
filling each of the holes in the lower layer with a filling material; and
removing the lower layer to form fine patterns arranged in zigzag form.
4. The method of claim 1, wherein the first hard mask patterns are repeatedly arranged with a first pitch.
5. The method of claim 4, wherein the first pitch is about two times greater than a width of the first hard mask pattern.
6. The method of claim 5, wherein the first mask patterns are repeatedly arranged with a second pitch that is two or more times greater than the first pitch.
7. The method of claim 6, wherein a width of the first mask pattern is greater than the width of the first hard mask pattern.
8. The method of claim 6, wherein the second mask patterns are repeatedly arranged with a third pitch substantially equal to the second pitch.
9. The method of claim 1, wherein
the first and second hard mask patterns have an etch selectivity with respect to the lower layer; and
the first hard mask patterns are formed of a material different from that of the second hard mask patterns.
10. The method of claim 1, wherein the first and second hard mask patterns may include at least one of poly-silicon, SiON, Si3N4, SiCN, and SiC.
11. The method of claim 1, wherein each of the first and second mask patterns includes an organic pattern including carbon.
12. The method of claim 1, wherein the lower layer is formed of one of a semiconductor material, a conductive material, an insulating material, and any combination thereof.
13. A method of forming fine patterns, comprising:
forming first hard mask patterns extending in a first direction on a lower layer;
forming second hard mask patterns filling gap regions between the first hard mask patterns;
forming first openings in each of the first hard mask patterns, a space between the first openings arranged in the first direction greater than a space between the first openings arranged in a second direction perpendicular to the first direction;
forming second openings in each of the second hard mask patterns, the second openings spaced apart from the first openings in a diagonal direction with respect to the first direction; and
transferring the first and second openings to the lower layer to form holes arranged in zigzag form.
14. The method of claim 13, wherein the forming first openings comprises:
forming first mask patterns extending in the second direction on the first and second hard mask patterns; and
etching the first hard mask patterns using the first mask patterns and the second hard mask patterns as etch masks.
15. The method of claim 14, wherein the forming second openings comprises:
removing the first mask patterns after forming the first openings;
forming second mask patterns that fill the first openings and extend in the second direction; and
etching the second hard mask patterns using the second mask patterns and the first hard mask patterns as etch masks.
16. A method of forming fine patterns, comprising:
forming first mask patterns, extending in a first direction, on first hard mask patterns and second hard mask patterns, the first hard mask patterns on a lower layer extending in a second direction perpendicular to the first direction, the second hard mask patterns filling gap regions between the first hard mask patterns;
etching the first hard mask patterns using the first mask patterns as etch masks to form first openings;
forming second mask patterns filling the first openings and extending in the first direction; and
etching the second hard mask patterns using the second mask patterns as etch masks to form second openings spaced apart from the first openings in a diagonal direction with respect to the second direction.
17. The method of claim 16, further comprising:
transferring the first and second openings to the lower layer to form holes arranged in zigzag form in the lower layer.
18. The method of claim 17, further comprising:
filling each of the holes in the lower layer with a filling material; and
removing the lower layer to form fine patterns arranged in zigzag form.
19. The method of claim 16, wherein the first hard mask patterns are repeatedly arranged with a first pitch.
20. The method of claim 19, wherein the first pitch is about two times greater than a width of the first hard mask pattern.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method to identify video decoding errors produced by a video device, the method comprising:
receiving an output stream of motion video from the video device, wherein the output stream comprises a plurality of output frames each produced by the video device in response to a predetermined input, and wherein each of the plurality of output frames comprises a frame identifier and at least one object presented on a consistent background;
for each of the plurality of output frames, associating the output frame with a frame template based upon the frame identifier, wherein the frame template defines an expected location of the at least one object within the output frame, and verifying that a plurality of pixels lying within the output frame and outside of the expected location of the at least one object conform to the consistent background.
2. The method of claim 1 further comprising indicating a video decoding error when at least one of the plurality of pixels lying without the output frame and outside of the expected location of the at least one object does not conform to the consistent background.
3. The method of claim 1 wherein the consistent background is defined by pixels having a substantially constant pixel value.
4. The method of claim 3 wherein none of the pixels lying within the at least one object has a pixel value that is equal to the substantially constant pixel value.
5. The method of claim 1 wherein the at least one object is unchanging from frame to frame, but is presented at a different location in each frame.
6. The method of claim 1 wherein the frame identifier visually represents a binary number that associates the output frame with the frame template, and wherein the frame identifier is displayed as part of the output frame.
7. The method of claim 1 wherein each of the frame templates comprises a plurality of pixels each having a pixel value, and wherein the total of all the pixel values for each template is substantially the same as the totals of the other templates.
8. The method of claim 1 wherein each of the frame templates comprises a plurality of pixels each having a pixel value, wherein one of the pixel values is associated with the consistent background, and wherein the number of pixels having the pixel value associated with the consistent background is substantially the same in each of the frame templates.
9. The method of claim 1 further comprising scanning a line of pixels in each of the output frames and determining that a video decoding error exists if a number of consecutive pixels having pixel values that differ from the consistent background is less than a minimum length.
10. The method of claim 1 further comprising scanning a line of pixels in each of the output frames and determining that a video decoding error exists if a number of consecutive pixels having pixel values that differ from the consistent background is greater than a maximum length.
11. A system to identify video decoding errors produced by a video device under test, the system comprising:
a video digitizer configured to receive an output stream of motion video from the video device under test, wherein the output stream comprises a plurality of output frames each produced by the video device in response to a predetermined input, and wherein each of the plurality of output frames comprises a frame identifier and at least one object presented on a consistent background; and
a frame analyzer comprising a processor, wherein the frame analyzer is configured to associate, for each of the plurality of output frames, the output frame with a frame template based upon the frame identifier, wherein the frame template defines an expected location of the at least one object within the output frame, to verify that a plurality of pixels lying within the output frame and outside of the expected location of the at least one object conform to the consistent background, and to provide an output that indicates when pixels lying within the output frame and outside the expected location of the at least one object do not conform to the consistent background.
12. The system of claim 11 further comprising a video spooler configured to provide the predetermined input to the video device under test, wherein the predetermined input is a video distribution that represents a plurality of video frames represented by the frame templates.
13. The system of claim 11 wherein the at least one object is unchanging from frame to frame, but is presented at a different location in each frame.
14. The system of claim 11 wherein each of the frame templates comprises a plurality of pixels each having a pixel value, and wherein the total of all the pixel values for each template is substantially the same as the totals of the other templates.
15. The system of claim 11 wherein each of the frame templates comprises a plurality of pixels each having a pixel value, wherein one of the pixel values is associated with the consistent background, and wherein the number of pixels having the pixel value associated with the consistent background is substantially the same in each of the frame templates.
16. A method executable by a video analyzer device to determine decoding errors contained in video frames generated by video hardware under test, the method comprising:
receiving, at the video analyzer device, the output video frames generated by the video hardware under test, wherein each output video frame comprises at least one object presented on a background;
determining, for each of the received output frames, one of a plurality of templates that is associated with the output frame based upon a frame identifier contained within the visual imagery of the output frame, wherein the frame template defines an expected location of the at least one object within the output frame;
comparing, for each of the received output frames, the received output frame to the frame template that is associated with the output frame to verify that the pixels in the output frame lying outside of the at least one object are consistent with the background; and
identifying a decoding error if the comparing identifies pixels lying outside of the at least one object that are not consistent with the background.
17. The method of claim 16 further comprising applying a video distribution to the video hardware under test, wherein the video distribution is based upon the templates.
18. The method of claim 16 wherein each of the frame templates comprises a plurality of pixels each having a pixel value, and wherein the total of all the pixel values for each template is substantially the same as the totals of the other templates.
19. The method of claim 16 wherein each of the frame templates comprises a plurality of pixels each having a pixel value, wherein one of the pixel values is associated with all of the pixels in the backgrounds of the frame templates.
20. The method of claim 19 wherein the number of pixels having the pixel value associated with the consistent background is substantially the same in each of the frame templates.