What is claimed is:
1. A semiconductor device, comprising:
a silicon-on-insulator (SOI) substrate including a bottom silicon substrate, a buried insulation layer and a top silicon layer;
an integrated circuit formed on the top silicon layer of the SOI substrate; and
a tunneling region formed between the bottom silicon substrate and the top silicon layer, which are under the integrated circuit.
2. The semiconductor device as recited in claim 1, further comprising one or more openings for penetrating the top silicon layer around the integrated circuit and exposing the tunneling region.
3. The semiconductor device as recited in claim 2, further comprising an insulation layer for closing the entrance to the openings on the SOI substrate.
4. The semiconductor device as recited in claim 2, further comprising a barrier layer, which is inserted to the buried insulation layer and the top silicon layer around the integrated circuit, for including the openings inside.
5. The semiconductor device as recited in claim 4, wherein the barrier layer includes polysilicon or metallic material.
6. The semiconductor device as recited in claim 1, wherein the buried insulation layer is formed of a silicon oxide.
7. A method for fabricating a semiconductor device, comprising the steps of:
a) preparing an SOI substrate including a bottom silicon substrate, a buried insulation layer and a top silicon layer;
b) forming an integrated circuit on the top silicon layer of the SOI substrate; and
c) forming a tunneling region between the bottom silicon substrate and the top silicon layer, which are under the integrated circuit.
8. The method as recited in claim 7, wherein the step c) of forming the tunneling region includes the steps of:
c1) forming a first trench that penetrates the buried insulation layer and the top silicon layer around the integrated circuit at a predetermined distance and exposes the bottom silicon substrate;
c2) burying a barrier material in the first trench;
c3) forming a second trench that penetrates the top silicon layer between the first trench and the integrated circuit and exposes the buried insulation layer; and
c4) removing the buried insulation layer inside a region defined by the first trench.
9. The method as recited in claim 8, further including a step of forming unevenness on the surfaces of the bottom silicon substrate and the top silicon layer that form the tunneling region, after the step of removing the buried insulation layer.
10. The method as recited in claim 8, further including a step of closing the entrance of the second trench by forming an insulation layer on the SOI substrate, after the step of removing the buried insulation layer.
11. The method as recited in claim 10, further including a step of closing the entrance of the second trench by etching the insulation layer of the second trench region optionally.
12. The method as recited in claim 10, further including a step of filling the air or other gases into the inside of the tunneling region and the second trench.
13. The method as recited in claim 8, wherein the barrier material includes polysilicon or metallic material.
14. The method as recited in claim 13, wherein the buried insulation layer is formed of a silicon oxide.
15. The method as recited in claim 14, wherein the buried insulation layer is removed by using the barrier material as an etching barrier layer and performing a gas phase etching using such gases as HF and BHF.
16. The method as recited in claim 9, wherein the unevenness is formed by performing a gas phase etching or a dry etching using a silicon-etching source.
17. The method as recited in claim 16, wherein the silicon-etching source includes at least any one selected from a group consisting of HBr, He, O2, N2, SF6, CF4, SiF4, BCl3, Cl2, NF3, CHF3, C2F6, and C2ClF5 gases.
18. The method as recited in claim 16, wherein the insulation layer includes at least any one selected from a group consisting of a silicon oxide, a silicon nitride, polymer and polyimide.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. An electrical cable connecting apparatus comprising a first apparatus and a second apparatus, and having a configuration in which a cable-side connector provided at a front end of an electrical cable extending from the second apparatus is connected to a board-side connector provided on a circuit board of the first apparatus,
said electrical cable connecting apparatus further comprising:
an opening portion provided in a housing of the first apparatus at a position facing the board-side connector;
a lid that covers the opening portion; and
a regulation member that regulates movement out of the first apparatus of the electrical cable in conjunction with the lid, the regulation member being attached to the electrical cable,
wherein the lid is configured to be attachable to the opening portion by an attachment portion in a state in which the cable-side connector is connected to the board-side connector,
the attachment portion includes an engaging portion that is provided on one side edge portion of the lid and is for engaging with a side edge portion of the opening portion, and a fixing portion that is provided on another side edge portion side opposing the one side edge portion of the lid and is for fixing to the first apparatus, and
the regulation member regulates the movement closer to the fixing portion than to the engaging portion.
2. The electrical cable connecting apparatus according to claim 1,
wherein when the lid is attached to the opening portion, the electrical cable extends to the outside from an edge portion that is located closer to the fixing portion than to the engaging portion of the lid.
3. The electrical cable connecting apparatus according to claim 1,
wherein the opening portion has an opening-side cable outlet portion having a partially recessed shape through which the electrical cable extends to the outside from the inside of the opening portion.
4. The electrical cable connecting apparatus according to claim 1,
wherein the lid has a lid-side cable outlet portion having a partially recessed shape through which the electrical cable extends to the outside from the inside of the opening portion.
5. The electrical cable connecting apparatus according to claim 1,
wherein the fixing portion has a structure where both sides of the electrical cable are fixed.
6. The electrical cable connecting apparatus according to claim 1,
wherein a positioning section that determines an arrangement position of the electrical cable is provided between the lid-side cable outlet portion and the regulation member for the electrical cable and at least near the lid-side cable outlet portion.
7. The electrical cable connecting apparatus according to claim 1,
wherein the regulation member is provided over the electrical cable on a rear face of the lid and between the engaging portion and the fixing portion.
8. The electrical cable connecting apparatus according to claim 1,
wherein the regulation member is a resin band attached to the electrical cable.
9. The electrical cable connecting apparatus according to claim 1,
wherein the lid is fixed by fixing portions being disposed opposing each other in fixing holes formed in a frame in the opening portion.
10. The electrical cable connecting apparatus according to claim 1,
wherein a plurality of cable-side connectors and a grounding terminal are provided at a front end of the electrical cable.
11. The electrical cable connecting apparatus according to claim 1,
wherein a position at which the electrical cable extends out from the second apparatus and the opening portion of the first apparatus are vertically one above the other, and
the electrical cable is routed along an arc from a second apparatus side to the first apparatus.
12. The electrical cable connecting apparatus according to claim 1,
wherein the housing of the first apparatus has a backplate that is removable to a side opposite the second apparatus across the opening portion.
13. An image forming apparatus comprising the electrical cable connecting apparatus according to claim 1.
14. The image forming apparatus according to claim 13,
wherein any one of the first apparatus and the second apparatus is an image forming apparatus main body including at least an image formation portion and a scanner portion, and the other apparatus is an automatic document feeder.
15. An electrical cable connecting apparatus comprising a first apparatus and a second apparatus, and having a configuration in which a cable-side connector provided at a front end of an electrical cable extending from the second apparatus is connected to a board-side connector provided on a circuit board of the first apparatus,
said electrical cable connecting apparatus further comprising:
an opening portion provided in a housing of the first apparatus at a position facing the board-side connector;
a lid that covers the opening portion; and
a regulation member that regulates movement out of the first apparatus of the electrical cable in conjunction with the lid, the regulation member being attached to the electrical cable,
wherein the lid is configured to be attachable to the opening portion by an attachment portion in a state in which the cable-side connector is connected to the board-side connector,
the attachment portion includes an engaging portion that is provided on one side edge portion of the lid and is for engaging with a side edge portion of the opening portion, and a fixing portion that is provided on another side edge portion side opposing the one side edge portion of the lid and is for fixing to the first apparatus,
when the lid is attached to the opening portion, the electrical cable extends to the outside from an edge portion that is located closer to the fixing portion than to the engaging portion of the lid,
a lid-side cable outlet portion through which the electrical cable extends to the outside is provided in the lid,
the lid-side cable outlet portion is formed by partially recessing the lid along a periphery thereof, and
the engaging portion, the fixing portion, and the lid-side cable outlet portion are disposed in this sequence along a face of the lid.
16. The electrical cable connecting apparatus according to claim 15,
wherein the opening portion has an opening-side cable outlet portion having a partially recessed shape through which the electrical cable extends to the outside from the inside of the opening portion.
17. The electrical cable connecting apparatus according to claim 15,
wherein the fixing portion has a structure where both sides of the electrical cable are fixed.
18. The electrical cable connecting apparatus according to claim 15,
wherein a positioning section that determines an arrangement position of the electrical cable is provided between the lid-side cable outlet portion and the regulation member and at least near the lid-side cable outlet portion.
19. The electrical cable connecting apparatus according to claim 15,
wherein an opening-side cable outlet portion through which the electrical cable extends to the outside is provided in the opening portion, and when the lid is attached to the opening portion, the opening-side cable outlet portion is disposed closer to the fixing portion than to the engaging portion of the lid.
20. The electrical cable connecting apparatus according to claim 15,
wherein the regulation member is provided over the electrical cable on a rear face of the lid and between the engaging portion and the fixing portion.
21. The electrical cable connecting apparatus according to claim 15,
wherein the regulation member is a resin band attached to the electrical cable.
22. The electrical cable connecting apparatus according to claim 15,
wherein the lid is fixed by fixing portions being disposed opposing each other in fixing holes formed in a frame in the opening portion.
23. The electrical cable connecting apparatus according to claim 15,
wherein a plurality of cable-side connectors and a grounding terminal are provided at a front end of the electrical cable.
24. The electrical cable connecting apparatus according to claim 15,
wherein a position at which the electrical cable extends out from the second apparatus and the opening portion of the first apparatus are vertically one above the other, and
the electrical cable is routed along an arc from a second apparatus side to a first apparatus side.
25. The electrical cable connecting apparatus according to claim 15,
wherein the housing of the first apparatus has a backplate that is removable to a side opposite the second apparatus across the opening portion.
26. An image forming apparatus comprising the electrical cable connecting apparatus according to claim 15.
27. The image forming apparatus comprising the electrical cable connecting apparatus according to claim 26,
wherein any one of the first apparatus and the second apparatus is an image forming apparatus main body including at least an image formation portion and a scanner portion, and the other apparatus is an automatic document feeder.