What is claimed is:
1. A device for removing thermal energy from a system, the device comprising,
a microchannel extending a length and having a triangular cross section for receiving and conducting a working fluid,
a cover for enclosing the microchannel for conducting the thermal energy from the system, and
interstitial material surrounding the microchannel, the interstitial material conducting the thermal energy from the cover to the working fluid in the microchannel.
2. The device of claim 1, wherein,
the triangular cross section is an isosceles triangular cross section.
3. The device of claim 1, wherein,
the working fluid is a refrigerant.
4. The device of claim 1 wherein,
the working fluid is water.
5. The device of claim 1 wherein,
the interstitial material is silica.
6. The device of claim 1 wherein,
the triangular cross section has a height of less than three hundred and seventy microns.
7. A device for removing thermal energy from a system, the device comprising,
a plurality of microchannels extending in parallel to a length and each of the plurality of microchannels have a triangular cross section for concurrently receiving and conducting a working fluid,
a cover for enclosing the plurality of microchannels for conducting the thermal energy from the system, and
interstitial material surrounding the microchannel and disposed between each successive pairs of the plurality of microchannels for forming a gap distance between each successive pairs of the plurality of microchannels, the interstitial material conducting heat from the cover to the working fluid in the plurality of microchannels.
8. The device of claim 7 wherein,
the triangular cross section is an isosceles triangular cross section.
9. The device of claim 7 wherein,
each of the plurality of microchannels is aligned to each other and point in a same direction.
10. The device of claim 7 wherein,
each of the plurality of microchannels is aligned to each other and alternately point in alternating directions.
11. The device of claim 7 wherein,
the gap distance is less than sixty microns.
12. The device of claim 7 wherein,
the triangular cross section has a height of less that three hundred and seventy microns.
13. The device of claim 7 wherein,
each of the plurality of microchannels are aligned to each other and alternately point in alternating directions, and
the cover comprises a top cover and a bottom cover for respectively enclosing the alternating microchannels for containing the working fluid within the plurality of microchannels during flow of the working fluid through the plurality of microchannels.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1-21. (canceled)
22. A method of making an electrode assembly for a plasma processing apparatus, comprising:
mounting a plurality of first fastener members in a plurality of apertures of a backing member, each aperture including a first portion and a second portion wider than the first portion, each first fastener member including a head disposed in the second portion of an aperture; and
securing the backing member to an electrode;
the head of each of the first fastener members being configured to prevent the first fastener members from being pulled out of the respective apertures in a direction away from the electrode or from rotating.
23. The method of claim 22, further comprising fastening the backing member to a top plate including a plurality of through openings each of which is aligned with a respective aperture of the backing member, the fastening including inserting a second fastener member in openings of the top plate such that each second fastener member engages a respective first fastener member to secure the backing member to the top plate.
24. The method of claim 22, wherein the first fastener members are T-nuts.
25. The method of claim 22, further comprising, before the mounting, bonding the head of each of the first fastener members to a bearing surface that partially defines the second portion of the aperture.
26. The method of claim 24, wherein each of the T-nuts has internal threads, and the second fastener member comprises a bolt threaded into a respective one of the T-nuts.
27. The method of claim 25, wherein the head is a rectangular shaped head and the second portion of the apertures is rectangular in shape.
28. The method of claim 22, wherein the electrode comprises an inner silicon electrode and an outer silicon electrode comprised of overlapping contiguous segments, the backing member comprising a plate adhesively bonded to the inner silicon electrode and a ring adhesively bonded to the outer silicon electrode.
29. The method of claim 22, wherein the electrode comprises a showerhead electrode having gas passages and the backing member comprises a backing plate having gas injection holes, the method further comprising bonding the showerhead electrode to the backing plate with the gas injection holes of the backing plate aligned with the gas passages of the showerhead electrode.
30. The method of claim 22, wherein the electrode comprises a showerhead electrode and the first fastener members comprise a plurality of fastener members concentrically arranged at locations between adjacent rows of gas passages in the showerhead electrode.