1. A control apparatus for an internal combustion engine, which stops the internal combustion engine when a stop condition is satisfied, starts the internal combustion engine when a start condition is satisfied, and is provided with a vehicular air conditioning device that heats a vehicle cabin using a coolant for the internal combustion engine, the control apparatus comprising:
a coolant-temperature detection device that detects a temperature of the coolant for the internal combustion engine;
a stop prohibition device that prohibits stopping of the internal combustion engine when the vehicular air conditioning device is heating the vehicle cabin and the temperature of the coolant detected by the coolant-temperature detection device is equal to or below a threshold value;
a movement determination device that determines whether the vehicle is moving; and
a selection device that selects the threshold value, wherein the selection device selects a first value as the threshold value when the movement determination device determines that the vehicle is not moving, and selects a second threshold value, which is higher than the first threshold value, as the threshold value when the movement determination device determines that the vehicle is moving.
2. The control apparatus according to claim 1, wherein:
the movement determination device comprises at least one of a vehicle-speed detection device that detects a vehicle speed, a braking determination device that determines whether a brake is applied to the vehicle by performing a braking operation, and an accelerator-pedal operation detection device that detects an operation of an accelerator pedal of the vehicle;
the movement determination device determining whether the vehicle is moving, using at least one of the vehicle-speed detection devices, the braking determination device, and the accelerator-pedal operation detection device.
3. The control apparatus according to claim 1, wherein it is determined whether the vehicular air conditioning device is heating the vehicle cabin, based on at least one of a target temperature of air supplied into the vehicle cabin by the vehicular air conditioning device, and a heating load with respect to a target temperature of the vehicle cabin preset in the vehicular air conditioning device.
4. The control apparatus according to claim 1, wherein at least one of the first threshold value and the second threshold value includes a value at which stopping of the internal combustion engine is permitted, and another value at which stopping of the internal combustion engine is prohibited, and there is a predetermined difference between the value and the other value.
5. A method of controlling an internal combustion engine, which stops the internal combustion engine when a stop condition is satisfied, starts the internal combustion engine when a start condition is satisfied, and is provided with a vehicular air conditioning device that heats a vehicle cabin using a coolant for the internal combustion engine, the method comprising:
detecting a temperature of the coolant for the internal combustion engine;
prohibiting stopping of the internal combustion engine when the vehicular air conditioning device is heating the vehicle cabin and the detected temperature of the coolant is equal to or below a threshold value;
determining whether the vehicle is moving; and
selecting a first threshold value as the threshold value when it is determined that the vehicle is not moving, and selecting a second threshold value, which is higher than the first threshold value, as the threshold value when it is determined that the vehicle is moving.
6. The method of controlling the internal combustion engine according to claim 5, wherein it is determined whether the vehicle is moving based on at least one of a vehicle speed, a braking operation, and an operation of an accelerator pedal.
7. The method of controlling the internal combustion engine according to claim 5, wherein it is determined whether the vehicular air conditioning device is heating the vehicle cabin, based on at least one of a target temperature of air supplied into the vehicle cabin by the vehicular air conditioning device, and a heating load with respect to a target temperature of the vehicle cabin preset in the vehicular air conditioning device.
8. The method of controlling the internal combustion engine according to claim 5, wherein at least one of the first threshold value and the second threshold value includes a value at which stopping of the internal combustion engine is permitted, and another value at which stopping of the internal combustion engine is prohibited, and there is a predetermined difference between the value and the other value.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1.-24. (canceled)
25. A method of chemical mechanical polishing of a substrate comprising the steps of:
A) providing a substrate having a surface comprising copper disposed over a predominately dielectric layer;
B) movably contacting the substrate with a chemical-mechanical-polishing composition under conditions where at least a portion of the copper is removed, wherein the chemical-mechanical-polishing composition comprises:
a) an oxidizer selected from the group consisting of a peroxide, periodic acid, peracetic acid, and ammonium persulfate, wherein the oxidizer forms free radicals;
b) water,
c) an amine-containing film-forming agent, and
d) at least one non-chelating free radical quencher selected from an hydroxyl-containing amine, a polyol compound, an unsaturated cycloalkene having more than one carbon-carbon double bond, a diazene compound, an azobenzene compound, humic acid, andor derivatives and salts thereof,
with the proviso that the at least one non-chelating free radical quencher is not ascorbic acid, isopropanol, thiamine, or a glycol compound, and that the non-chelating free radical quencher is not the amine-containing film-forming agent, and
wherein the amount of the non-chelating free radical quencher is sufficient to reduce the amount of corrosion of the polished copper surface.
26. The method of chemical mechanical polishing of claim 25 wherein the oxidizer is periodic acid.
27. The method of chemical mechanical polishing of claim 25 wherein the oxidizer is a peroxide.
28. The method of chemical mechanical polishing of claim 25 wherein the chemical-mechanical-polishing composition further comprises at least one of ascorbic acid, isopropanol, thiamine, or a glycol compound.
29. The method of chemical mechanical polishing of claim 25 wherein the chemical-mechanical-polishing composition further comprises ascorbic acid.
30. The method of chemical mechanical polishing of claim 25 wherein the free radical quencher comprises a hydroxyl-containing amine.
31. The method of chemical mechanical polishing of claim 25 wherein the free radical quencher comprises a polyol compound.
32. The method of chemical mechanical polishing of claim 25 wherein the free radical quencher comprises an unsaturated cycloalkene having more than one carbon-carbon double bond.
33. The method of chemical mechanical polishing of claim 25 wherein the free radical quencher comprises a diazene compound.
34. The method of chemical mechanical polishing of claim 25 wherein the free radical quencher comprises an azobenzene compound.
35. The method of chemical mechanical polishing of claim 25 wherein the free radical quencher comprises humic acid andor derivatives and salts thereof.
36. The method of claim 25, further comprising changing the composition of the chemical-mechanical-polishing composition during the step of movably contacting the substrate.
37. The method of claim 36, wherein the step of changing the composition comprises transitioning between two separate polishing compositions, a first polishing composition and a second polishing composition, each having different compositions.
38. The method of claim 37, wherein the first and second polishing compositions are different in one or more of the following ways: the first polishing composition has a greater abrasive particle size than the second polishing composition; the first polishing composition has a greater amount of abrasive particles than the second polishing composition; the first polishing composition has a greater amount of oxidizer than the second polishing composition; the first polishing composition has a lower pH than the second polishing composition; and the second polishing composition has a greater amount of non-chelating free radical quenchers andor film-forming agents than the first polishing composition.
39. The method of chemical mechanical polishing of claim 25 wherein the method has a copper removal rate of at least about of at least about 200 nmminute.
40. The method of chemical mechanical polishing of claim 25 wherein the method has a copper removal rate of at least about of at least about 500 nmminute.
41. The method of chemical mechanical polishing of claim 25 wherein the method has a copper removal rate of at least about of at least 3 micronsminute.
42. The method of chemical mechanical polishing of claim 25 wherein the amine-containing film-forming agent comprises benzotriazole, triazole, benzimidazole, or mixtures thereof.
43. The method of chemical mechanical polishing of claim 25 wherein the chemical-mechanical-polishing composition comprises a multi-hydroxybenzene compound.