1. A semiconductor device comprising:
a plurality of pattern structures that are spaced apart from one another on a support layer and comprise at least one insulating spacer having an upper width smaller than a lower width;
a plurality of insulating extension patterns on the at least one insulating spacer of the pattern structures, wherein an upper width of the extension patterns is greater than a lower width of the extension patterns;
a plurality of contact patterns on the support layer between the pattern structures and the extension patterns; and
a plurality of conductive patterns on upper and lateral surfaces of the pattern structures and electrically connected to the contact patterns.
2. The semiconductor device of claim 1, wherein the at least one insulating spacer included in the pattern structures comprises a multi-layer spacer including an air spacer.
3. The semiconductor device of claim 1, wherein sidewalls of the extension patterns have a vertical profile.
4. The semiconductor device of claim 1, wherein the extension patterns comprise extension spacers on the at least one insulating spacer included in the pattern structures.
5. The semiconductor device of claim 1, wherein the extension patterns are in an upper area on the pattern structures and in an intermediate area below the upper area of the pattern structures, and wherein a lower area of the pattern structures is free of the extension patterns.
6. A semiconductor device comprising:
a plurality of word lines that extend on a substrate along a first direction and are spaced apart from one another in a second direction perpendicular to the first direction;
a plurality of bit line structures that extend perpendicularly to the word lines in the second direction and are spaced apart from one another in the first direction;
at least one insulating spacer on two sidewalls of each of the bit line structures, wherein an upper width of the at least one insulating spacer is smaller than a lower width of the at least one insulating spacer;
a plurality of contact patterns spaced apart from one another on the substrate between the word lines and between the bit line structures;
a plurality of insulating extension spacers on two sides of the at least one insulating spacer, wherein an upper width of the extension spacers is greater than a lower width of the extension spacers; and
a plurality of conductive landing pads on upper and lateral surfaces of the bit line structures, the at least one insulating spacer, and the extension spacers and electrically connected to the contact patterns, wherein the landing pads are alternately arranged in a zigzag shape along the second direction on right and left sidewalls of each of the bit line structures and the extension spacers.
7. A semiconductor device comprising:
a plurality of pattern structures that are spaced apart from one another on a support layer in a first direction and extend in a second direction perpendicular to the first direction, wherein an upper width of the pattern structures in the first direction is smaller than a lower width of the pattern structures;
a plurality of extension patterns that extend on two sidewalls of each of the pattern structures in the second direction, wherein an upper width of the extension patterns in the first direction is greater than a lower width of the extension patterns; and
a plurality of conductive patterns that are on upper and lateral surfaces of the pattern structures and the extension patterns and are electrically insulated from one another.
8. The semiconductor device of claim 7, wherein ones of the pattern structures comprise a body conductive pattern and an insulation pattern on the body conductive pattern, and one of the extension patterns is on an upper portion of a sidewall of one of the insulation patterns.
9. The semiconductor device of claim 7, wherein the pattern structures comprise bit lines, and the extension patterns comprise insulating spacers on respective sidewalls of the bit lines.
10. The semiconductor device of claim 7, wherein the pattern structures comprise bit lines, and wherein a buried contact is provided on the support layer between the bit lines at a height lower than the bit lines and contacts a respective one of the conductive patterns.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method of monitoring oil consumption in a gas turbine engine, comprising the steps of:
sensing reservoir oil level when the gas turbine engine is not running;
sensing reservoir oil temperature when the gas turbine engine is not running;
sensing reservoir attitude when the gas turbine engine is not running;
determining current gas turbine engine system oil quantity based on at least the sensed reservoir oil level, the sensed reservoir oil temperature, the sensed reservoir attitude, and a predetermined engine retention amount, the predetermined engine retention amount at least substantially equal to an amount of oil retained in the gas turbine engine after the gas turbine engine has been started at least once and when the gas turbine engine is not running;
determining that a predetermined event has occurred;
automatically calculating an average gas turbine engine system oil quantity after the predetermined event has occurred; and
determining gas turbine engine system oil consumption rate from a plurality of calculated average oil quantities.
2. The method of claim 1, further comprising:
measuring gas turbine engine running time;
calculating the total gas turbine engine running time between each occurrence of the predetermined event; and
determining gas turbine engine system oil consumption rate from the plurality of determined average oil quantities and a plurality of calculated total gas turbine engine running times.
3. The method of claim 1, further comprising:
determining when oil has been added to the gas turbine engine system; and
resetting at least a portion of the determined gas turbine engine system oil quantities to zero.
4. The method of claim 3, wherein the step of determining when oil has been added to the gas turbine engine system comprises:
storing a previously determined gas turbine engine system oil quantity;
adding a predetermined minimum fill quantity to the previously determined gas turbine engine system oil quantity to obtain a summed oil quantity;
comparing the current gas turbine engine system oil quantity to the summed oil quantity; and
determining that oil has been added to the gas turbine engine system if the current gas turbine engine system oil quantity is greater than the summed oil quantity.
5. The method of claim 1, further comprising:
determining an amount of air in the oil; and
determining the current gas turbine engine system oil quantity based additionally on the determined amount of air in the oil.
6. The method of claim 1, further comprising:
determining the current gas turbine engine system oil quantity based additionally on oil type.
7. The method of claim 1, wherein the predetermined event is a predetermined number of gas turbine engine starts.
8. The method of claim 1, wherein the predetermined event is a predetermined amount of gas turbine engine running time.
9. A gas turbine engine oil consumption monitoring system, comprising:
a level sensor configured to sense oil level in a reservoir and supply a level signal representative thereof;
a temperature sensor configured to sense oil temperature in the reservoir and supply a temperature signal representative thereof;
an attitude sensor configured to sense reservoir attitude and supply an attitude signal representative thereof; and
a processor coupled to receive the level signal, the temperature signal, and the attitude signal, the processor adapted to receive a signal that indicates a gas turbine engine is not running and configured, upon receipt thereof, to selectively determine current gas turbine engine system oil quantity based on at least the level signal, the temperature signal, the attitude signal, and a predetermined engine retention amount that is at least substantially equal to an amount of oil retained in the gas turbine engine after the gas turbine engine has been started at least once and when the gas turbine engine is not running, the processor further configured to:
determine that a predetermined event has occurred,
automatically calculate an average gas turbine engine system oil quantity after the predetermined event has occurred, and
determine gas turbine engine system oil consumption rate from a plurality of calculated average oil quantities.
10. The system of claim 9, wherein the processor is further configured to:
track gas turbine engine running time;
calculate a total gas turbine engine running time between each occurrence of the predetermined event; and
determine the gas turbine engine system oil consumption rate from the plurality of determined average oil quantities and a plurality of calculated total gas turbine engine running times.
11. The system of claim 9, wherein the processor is further configured to:
determine when oil has been added to the gas turbine engine system; and
reset at least a portion of the determined gas turbine engine system oil quantities to zero.
12. The system of claim 11, wherein the processor is further configured to:
store a previously determined gas turbine engine system oil quantity;
add a predetermined minimum fill quantity to the previously determined gas turbine engine system oil quantity to obtain a summed oil quantity;
compare the current gas turbine engine system oil quantity to the summed oil quantity; and
determine that oil has been added to the gas turbine engine system if the current gas turbine engine system oil quantity is greater than the summed oil quantity.
13. The system of claim 9, wherein the processor is further configured to:
calculate an amount of air in the oil; and
determine the current gas turbine engine system oil quantity based additionally on the determined amount of air in the oil.
14. The system of claim 9, wherein the processor is further configured to:
receive a signal representative of oil type used in the gas turbine engine system; and
determine the current gas turbine engine system oil quantity based additionally on oil type.
15. The system of claim 9, wherein the predetermined event is a predetermined number of gas turbine engine starts.
16. The system of claim 9, wherein the predetermined event is a predetermined amount of gas turbine engine running time.