1. A data compensation device comprising:
a temperature measuring unit configured to measure an environmental temperature in a vicinity of a machining apparatus;
a position measuring unit configured to measure a position of a component of the machining apparatus decided in advance; and
a calculating unit configured to calculate a geometric error compensation value corresponding to each of a plurality of environmental temperatures on the basis of the environmental temperature measured by the temperature measuring unit, the position of the component measured by the position measuring unit, and the position of the component decided in advance.
2. The device according to claim 1, wherein the calculating unit calculates the geometric error compensation value on the basis of a coordinate value in a space in which the component moves.
3. The device according to claim 1, wherein the temperature measuring unit measures any one of an external temperature of the machining apparatus, an internal temperature of the machining apparatus, and a temperature of the component.
4. The device according to claim 1, wherein
the component includes a reflecting body, and
the position measuring unit measures a position of the reflecting body.
5. The device according to claim 1, further comprising a storing unit configured to store the geometric error compensation value.
6. A machining apparatus comprising:
a data compensation device including:
a temperature measuring unit configured to measure an environmental temperature in a vicinity of the machining apparatus;
a position measuring unit configured to measure a position of a component of the machining apparatus decided in advance; and
a calculating unit configured to calculate a geometric error compensation value corresponding to each of a plurality of environmental temperatures on the basis of the environmental temperature measured by the temperature measuring unit, the position of the component measured by the position measuring unit, and the position of the component decided in advance;
a driving unit configured to drive the component; and
a control unit configured to control the driving unit,
the control unit compensating input machining data using a geometric error compensation value corresponding to the environmental temperature measured by the temperature measuring unit.
7. The apparatus according to claim 6, wherein the calculating unit calculates the geometric error compensation value on the basis of a coordinate value in a space in which the component moves.
8. The apparatus according to claim 6, wherein the temperature measuring unit measures any one of an external temperature of the machining apparatus, an internal temperature of the machining apparatus, and a temperature of the component.
9. The apparatus according to claim 6, wherein
the component includes a reflecting body, and
the position measuring unit measures a position of the reflecting body.
10. The apparatus according to claim 6, wherein the data compensation device further includes a storing unit configured to store the geometric error compensation value.
11. The apparatus according to claim 6, wherein the control unit determines propriety of the compensated machining data.
12. The apparatus according to claim 6, wherein the control unit includes a device that executes software for determining propriety of the compensated machining data.
13. The apparatus according to claim 6, further comprising a display unit configured to display an operation of the machining apparatus.
14. A data compensation method comprising:
measuring an environmental temperature in a vicinity of a machining apparatus and a position of a component of the machining apparatus decided in advance;
calculating a geometric error compensation value corresponding to each of a plurality of environmental temperatures on the basis of the measured environmental temperature, the measured position of the component, and the position of the component decided in advance; and
compensating input machining data using a geometric error compensation value corresponding to the measured environmental temperature.
15. The method according to claim 14, further comprising changing the machining data on the basis of the compensation of the machining data.
16. The method according to claim 15, further comprising determining propriety of the compensated machining data, wherein
the machining data is changed when it is determined that the compensated machining data is proper.
17. The method according to claim 16, wherein positional data of the component is modified when it is determined that the compensated machining data is not proper.
18. The method according to claim 14, wherein the geometric error compensation value is calculated on the basis of a coordinate value in a space in which the component moves.
19. The method according to claim 14, wherein the measuring the environmental temperature includes measuring any one of an external temperature of the machining apparatus, an internal temperature of the machining apparatus, and a temperature of the component.
20. The method according to clam 14, wherein
the component includes a reflecting body, and
the measuring the position of the component includes measuring a position of the reflecting body.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A sensor system comprising:
a first optical sub-system including a first plurality of optical elements;
a second optical sub-system configured to rotate about a first axis relative to the first optical sub-system, the second optical sub-system including:
an afocal foreoptics configured to receive electromagnetic radiation and to direct a collimated beam of the electromagnetic radiation to the first optical sub-system;
a first coelostat mirror configured to rotate about a second axis substantially perpendicular to the first axis and to receive and reflect the electromagnetic radiation; and
a second coelostat mirror configured to rotate about a third axis substantially perpendicular to both the first axis and the second axis, and to receive the electromagnetic radiation reflected by the first coelostat mirror and to direct the electromagnetic radiation to the afocal foreoptics.
2. The sensor system of claim 1, wherein the first axis is substantially parallel to the collimated beam of electromagnetic radiation output by the afocal foreoptics.
3. The sensor system of claim 1, wherein the second axis forms an angle of approximately 45 degrees relative to a plane of the first coelostat mirror and the second axis is parallel to the electromagnetic radiation reflected by the first coelostat minor.
4. The sensor system of claim 1, wherein the third axis forms an angle of approximately 45 degrees relative to a plane of the second coelostat minor and the third axis is parallel to the electromagnetic radiation reflected by the second coelostat minor.
5. The sensor system of claim 1, wherein the second optical sub-system further includes a fold minor optically coupled between the afocal foreoptics and the second coelostat mirror, the fold mirror being configured to receive the electromagnetic radiation from the second coelostat minor and to reflect the electromagnetic radiation towards the afocal foreoptics.
6. The sensor system of claim 1, wherein the afocal foreoptics includes a three mirror anastigmat.
7. The sensor system of claim 1, wherein the first plurality of optical elements includes an optical imager and a detector, the optical imager being configured to receive the electromagnetic radiation from the second optical sub-system and to relay the electromagnetic radiation to the detector.
8. The sensor system of claim 7, wherein the first plurality of optical elements further includes a derotation device configured to receive the collimated beam of the electromagnetic radiation from the second optical sub-system and to transmit the electromagnetic radiation towards the optical imager, the derotation device being configured to counter-rotate the collimated beam of the electromagnetic radiation so that an image output by the derotation device is in a same direction independent of a rotation of the first coelostat mirror.
9. The sensor system of claim 1, wherein the first plurality of optical elements includes a laser module configured to emit a laser beam and an auto-alignment beam, the laser beam being directed towards the first coelostat minor via the afocal foreoptics.
10. The sensor system of claim 9, wherein the auto-alignment beam is used to determine a line of sight of the laser beam.
11. The sensor system of claim 1, wherein a rotation of the first coelostat minor about the second axis provides a travel of a field of regard of the sensor system in an elevation direction.
12. The sensor system of claim 11, wherein the field of regard of the sensor system in the elevation direction is greater than approximately 165 degrees.
13. The sensor system of claim 11, wherein a rotation of the second optical sub-system around the first axis provides a travel of the field of regard in an azimuth direction.
14. The sensor system of claim 13, wherein the field of regard of the sensor system in the azimuth direction is greater than approximately 140 degrees.
15. The sensor system of claim 11, wherein a rotation of the second coelostat mirror about the third axis provides a travel of the field of regard in a pitch direction.
16. The sensor system of claim 1, wherein the first coelostat mirror is further configured to rotate around a fourth axis substantially perpendicular to the second axis and in a plane of the first coelostat minor, wherein a rotation of the first coelostat mirror around the fourth axis prevents a gimbal singularity in which a line of sight direction substantially coincides with the first axis.