1. A charged particle beam apparatus comprising:
a plurality of probes, each of the probes having a tip for contacting a sample;
a probe driving units for driving each of the probes independently;
means for placing a sample that moves in X, Y and Z direction;
said means for placing a sample is provided with a driving unit that moves the plurality of probes and the means for placing a sample in unison;
an electro-optical device to irradiate the sample with a charged particle beam and to obtain a second charged particle image by detection of a second charged particle beam resulting from irradiation of the sample;
a computer connected to CAD image storing means for storing layout pattern of the sample, and
a displaying unit for displaying the second charged particle image and a CAD image corresponding to field of view of the second charged particle beam image.
2. The charged particle beam apparatus according to claim 1, further comprising
an inputting unit for entering information;
wherein said computer links the second charged particle image and the CAD image based on a positional information inputted from the inputting unit.
3. The charged particle beam apparatus according to claim 1,
wherein said computer links the respective magnification information between the second charged particle image and the CAD image.
4. The charged particle beam apparatus according to claim 1,
wherein, when magnification of the second charged particle image is changed,
said computer calculates amount of movement of the means for placing the sample from a positional information specified on the CAD image and the present positional information of the means for placing the sample,
said means for placing a sample moves the calculated amount.
5. The charged particle beam apparatus according to claim 1,
wherein, when a field of view of said second charged particle image changes,
said displayed CAD image is updated to new CAD image corresponding to new filed of view of the changes second charged particle image.
6. The charged particle beam apparatus according to claim 1,
wherein the CAD image is superimposed on displayed second charged particle image.
7. The charged particle beam apparatus according to claim 1,
first CAD image and second CAD image with higher magnification than that of the first CAD image are displayed on the displaying unit, and
an indicator for indicating the second CAD image on the first CAD image.
8. The charged particle beam apparatus according to claim 1,
wherein said first CAD image is an overall view of layout pattern on the sample.
9. The charged particle beam apparatus according to claim 1, further comprising:
a first image processing unit for processing the information of the CAD image; and
a second image processing unit for processing the second charged particle image.
10. The charged particle beam apparatus according to claim 1,
said means for placing a sample provided with a driving unit comprising:
a first stage having a sample placing surface; and
a first stage driving unit for driving the first stage;
a second stage on which the probe driving unit and the first stage are built;
a second stage driving unit for moving the second stage; and
a controlling unit for controlling the probe driving unit, the first stage driving unit, and the second stage driving unit.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A node update system using virtual partition technique for updating execution images of a plurality sensor nodes constituting a wireless sensor network, the node update system comprising:
an update management server transmitting an update request signal for the performance of the update procedure, and transmitting execution image information to be stored in a variable region of the sensor node to a corresponding sensor node to control an update of the corresponding sensor node upon reception of a response signal.
2. The node update system of claim 1, further comprising:
a sink node connected to the update management server, wirelessly transmitting a received update request signal or execution image information to a corresponding sensor node; and
a plurality of sensor nodes determining whether updating is necessary according to the update request signal to transmit a response signal, and performing an update procedure of an execution image on the basis of the execution image information upon reception the execution image information.
3. The node update system of claim 2, wherein the sensor node comprises a program storing unit generating a virtual partition region of a non-updatable invariable region and an updatable variable region.
4. The node update system of claim 3, wherein the program storing unit is implemented with at least one of flash Read-Only Memory (ROM) and Electronically Erasable Programmable Read-Only Memory (EEPROM).
5. The node update system of claim 3, wherein one or more user programs which are written in various formats are stored in the variable region, and a system library used by the user program is stored in the invariable region.
6. The node update system of claim 5, wherein the system library of the invariable region is not varied by a change of the user program.
7. The node update system of claim 2, wherein the execution image information of the sensor node comprises a plurality of records comprising a start code field, a byte count field, an address field, a data field and a checksum field.
8. The node update system of claim 7, wherein the sensor node stores received execution image information in a memory region designated by information of the address field.
9. The node update system of claim 2, wherein the sensor node determines whether to performs an update procedure based on a version of execution image information comprised in the received update request signal.
10. A control method of a node update system using virtual partition technique for updating execution images of a plurality sensor nodes constituting a wireless sensor network, the control method comprising:
virtually generating a non-updatable invariable region and an updatable variable region into which a storage region of a sensor node is divided, according to an execution operation of the sensor node;
monitoring states of the sensor nodes, and transmitting an update request signal to a corresponding sensor node when update is necessary; and
receiving a transmitted execution image information, and storing the execution image information in the variable region to update an execution image, according to a response signal to the update request signal.
11. The control method of claim 10, further comprising:
determining whether an update procedure is performed by a version of execution image information comprised in the update request signal to transmit a response signal, and changing to an update mode; and
changing to a general mode, and transmitting an update end signal representing an end of an update operation, when the update procedure is completed.
12. The control method of claim 10, wherein one or more user programs which are written in various formats are stored in the variable region, and a system library used by the user program is stored in the invariable region.
13. The control method of claim 12, wherein the system library of the invariable region is not varied by a change of the user program.
14. The control method of claim 10, wherein in the updating of the execution image, the execution image information comprises a plurality of records comprising a start code field, a byte count field, an address field, a data field and a checksum field.
15. The control method of claim 14, wherein the updating of the execution image further comprises designating a region, in which received execution image information is to be stored, by information of the address field.