1. A resist composition for immersion exposure comprising a base component (A) which exhibits changed solubility in an alkali developing solution under action of acid, an acid-generator component (B) which generates acid upon irradiation, and a fluorine-containing compound (C) having a group represented by general formula (C-1) shown below
wherein Q represents a group in which one hydrogen atom has been removed from a monovalent hydrophilic group; R2 represents an aromatic cyclic group-containing organic group which may have a fluorine atom, and R3 represents a hydrocarbon group of 2 or more carbon atoms which may have a fluorine atom, with the proviso that at least one of R2 and R3 has a fluorine atom,
wherein the amount of the fluorine-containing compound (C) is 0.1 to 20 parts by weight, relative to 100 parts by weight of the base component (A).
2. The resist composition for immersion exposure according to claim 1, wherein said fluorine-containing compound (C) is at least one compound selected from the group consisting of compounds represented by general formulas (C-1-1) to (C-1-4) shown below:
wherein R51 represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group; each of R52 to R55 independently represents a hydrogen atom or a fluorine atom, with the proviso that at least one of R52 to R55 represents a fluorine atom; R56 represents a hydrocarbon group of 2 or more carbon atoms which may have a fluorine atom; R61 represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group; each of R62 to R65 independently represents a hydrogen atom or a fluorine atom; and R66 represents a hydrocarbon group of 2 or more carbon atoms having a fluorine atom.
3. The resist composition for immersion exposure according to claim 1, wherein said fluorine-containing compound (C) is a polymeric compounds having a structural unit represented by general formula (c1-1-1), (c1-1-2), (c1-1-3) or (c1-1-4) shown below:
wherein R51 represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group; each of R52 to R55 independently represents a hydrogen atom or a fluorine atom, with the proviso that at least one of R52 to R55 represents a fluorine atom; R56 represents a hydrocarbon group of 2 or more carbon atoms which may have a fluorine atom; R61 represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group; each of R62 to R65 independently represents a hydrogen atom or a fluorine atom; and R66 represents a hydrocarbon group of 2 or more carbon atoms having a fluorine atom.
4. The resist composition for immersion exposure according to claim 1, wherein said base component (A) is a base component which exhibits increased solubility in an alkali developing solution under action of acid.
5. The resist composition for immersion exposure according to claim 4, wherein said base component (A) comprises a resin component (A1) which exhibits increased solubility in an alkali developing solution under action of acid, and said resin component (A1) has a structural unit (a1) derived from an acrylate ester containing an acid dissociable, dissolution inhibiting group.
6. The resist composition for immersion exposure according to claim 5, wherein said resin component (A1) further has a structural unit (a2) derived from an acrylate ester containing a lactone-containing cyclic group.
7. The resist composition for immersion exposure according to claim 5, wherein said resin component (A1) further has a structural unit (a3) derived from an acrylate ester containing a polar group-containing aliphatic hydrocarbon group.
8. The resist composition for immersion exposure according to claim 1, which further comprises a nitrogen-containing organic compound (D).
9. A method of forming a resist pattern, comprising: applying a resist composition for immersion exposure of any one of claims 1 to 8 to a substrate to form a resist film on the substrate; subjecting said resist film to immersion exposure; and alkali developing said resist film to form a resist pattern.
10. A fluorine-containing compound comprising at least one compound selected from the group consisting of compounds represented by general formulas (C-1-1) and (C-1-2) shown below:
wherein R51 represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group; each of R52 to R55 independently represents a hydrogen atom or a fluorine atom, with the proviso that at least one of R52 to R55 represents a fluorine atom; R56 represents a hydrocarbon group of 2 or more carbon atoms which may have a fluorine atom; R61 represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group; each of R62 to R65 independently represents a hydrogen atom or a fluorine atom; and R66 represents a hydrocarbon group of 2 or more carbon atoms having a fluorine atom.
11. A fluorine-containing compound comprising a polymeric compound having a structural unit represented by general formula (c1-1-1) or (c1-1-2) shown below:
wherein R51 represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group; each of R52 to R55 independently represents a hydrogen atom or a fluorine atom, with the proviso that at least one of R52 to R55 represents a fluorine atom; R56 represents a hydrocarbon group of 2 or more carbon atoms which may have a fluorine atom; R61 represents a hydrogen atom, a lower alkyl group or a halogenated lower alkyl group; each of R62 to R65 independently represents a hydrogen atom or a fluorine atom; and R66 represents a hydrocarbon group of 2 or more carbon atoms having a fluorine atom.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A rotary electric machine for vehicles, comprising:
a rotor;
a stator disposed opposed to the rotor;
a frame made of aluminum and supporting the rotor and the stator;
a rectifier secured to an outer end face of the frame and having low-loss elements used as rectifying elements; and
a heat insulator disposed between the rectifier and the frame.
2. The rotary electric machine for vehicles according to claim 1, wherein the low-loss elements are low-loss diodes.
3. The rotary electric machine for vehicles according to claim 1, wherein the low-loss elements are MOS transistors.
4. The rotary electric machine for vehicles according to claim 1, wherein the heat insulator is formed of a material having heat conductivity smaller than that of aluminum.
5. The rotary electric machine for vehicles according to claim 1, wherein the heat insulator is formed of stainless steel.
6. The rotary electric machine for vehicles according to claim 1, wherein the heat insulator is formed of ceramic.
7. The rotary electric machine for vehicles according to claim 1, wherein the heat insulator is formed of a resin.
8. The rotary electric machine for vehicles according to claim 1, wherein the heat insulator is formed of glass.
9. The rotary electric machine for vehicles according to claim 1, wherein the heat insulator is provided as a gap which is formed by locating both the rectifier and the frame to be spatially apart from each other by a distance corresponding to the gap.
10. The rotary electric machine for vehicles according to claim 1, wherein the rectifier is secured to the frame by means of a screw which is formed of a material having heat conductivity smaller than that of aluminum.
11. The rotary electric machine for vehicles according to claim 1, wherein:
the rectifier comprises a positive-side radiator plate joined with positive-side rectifying elements and a negative-side radiator plate joined with negative-side rectifying elements;
the negative-side radiator plate is disposed opposed to the frame with an interposition of the heat insulator; and
the heat insulator is formed of an electrically conductive material to establish electrical connection between the negative-side radiator plate and frame via the heat insulator.
12. The rotary electric machine for vehicles according to claim 11, wherein the heat insulator is formed of a material having heat conductivity smaller than that of aluminum.
13. The rotary electric machine for vehicles according to claim 11, wherein the heat insulator is an electrically conductive body having a hollow structure.