1. A hand-held power tool, comprising:
a torque setting unit;
a gearbox assemblage;
a hammer impact mechanism; and
a tool spindle configured to transfer a rotary motion to a tool mounting device;
wherein the hammer impact mechanism includes a drive rotation element having a rotation axis that is arranged coaxially with at least a part of the tool spindle,
wherein the hammer impact mechanism includes a linearly moveable striker that in at least one operating state impacts a surface of the tool spindle linearly, and that partly coaxially surrounds the tool spindle in at least one plane,
wherein the drive rotation element is arranged as an impact mechanism shaft that encases at least a region of the tool spindle and transfers a rotary motion to the striker to generate an impact.
2. The hand-held power tool according to claim 1, wherein the hand-held power tool is arranged as an impact drill driver.
3. The hand-held power tool according to claim 1, wherein the hammer impact mechanism includes an eccentric element.
4. The hand-held power tool according to claim 3, wherein the eccentric element includes a rotation axis that coincides with a rotation axis of the tool spindle.
5. The hand-held power tool according to claim 1, wherein the hammer impact mechanism has a resilient lever element, supported pivotably around a pivot axis, which is provided in order to drive a striker of the hammer impact mechanism in at least one operating state.
6. The hand-held power tool according to claim 1, wherein the hammer impact mechanism has a striker that, in at least one operating state, is freely movable in a principal working direction.
7. The hand-held power tool according to claim 1, wherein the gearbox assemblage includes at least one sun gear that, in at least one operating state, is connected nonrotatably to the drive rotation element.
8. The hand-held power tool according to claim 1, further comprising an electric motor and a battery connector unit adapted to supply the electric motor with energy.
9. The hand-held power tool according to claim 1, wherein the gearbox assemblage includes a gear stage that is arranged as a planet wheel gear stage.
10. The hand-held power tool according to claim 1, wherein the hammer impact mechanism includes a releasable clutch apparatus adapted to transfer rotary motion.
11. The hand-held power tool according to claim 10, wherein the clutch apparatus is adapted to be closed by a force transferred via the tool spindle.
12. The hand-held power tool according to claim 1, wherein the gearbox assemblage includes at least one gear stage element adapted to split a power flow so as to make available different rotation speeds for an impact mode and a rotation mode.
13. The hand-held power tool according to claim 1, wherein the gearbox assemblage is adapted to generate, in at least one operating state, at least two output rotary motions that have a non-integer ratio to one another.
14. The hand-held power tool according to claim 1, wherein the gearbox assemblage includes at least one ring gear supported axially movably.
15. The hand-held power tool according to claim 1, wherein in at least one operating state, the striker impacts a transfer element of the tool spindle linearly.
16. The hand-held power tool according to claim 1, wherein the striker has an impact surface that is oriented substantially perpendicular relative to the tool spindle and the transfer element has an impact surface that is oriented substantially perpendicular relative to the tool spindle, the impact surface of the striker and the impact surface of the transfer element are oriented substantially parallel to one another.
17. The hand-held power tool according to claim 1, wherein the tool spindle includes a rotary entrainment contour which is for creating an axially displaceable and nonrotatable connection with the gearbox assemblage along a rotation axis of the hand-held power tool for pickoff of a rotation speed of the tool spindle in at least one operating state.
18. The hand-held power tool according to claim 1, wherein the tool spindle and the impact mechanism shaft rotate, in at least one operating state, at a different angular speed.
19. A hand-held power tool, comprising:
a torque setting unit;
a gearbox assemblage;
a hammer impact mechanism; and
a tool spindle;
wherein the hammer impact mechanism includes a drive rotation element having a rotation axis that is arranged coaxially with at least a part of the tool spindle,
wherein the drive rotation element is arranged as an impact mechanism shaft that encases at least a region of the tool spindle,
wherein the hammer impact mechanism is arranged as an eccentric impact mechanism that includes an eccentric element, wherein the eccentric element is:
comprised of a sleeve;
connected nonrotatably to the impact mechanism shaft;
configured to move an eccentric outer element of the hammer impact mechanism during a hammer drilling mode;
supported in an orifice of the eccentric outer element, which eccentric outer element is arranged as an approximately elliptical disk; and
movable relative to the eccentric outer element by a bearing.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A container cleanliness measurement apparatus comprising:
a separation promoting unit adapted to promote separation of particles;
a collection unit adapted to collect separated particles; and
a measurement unit adapted to measure an amount of collected particles,
wherein said separation promoting unit and said collection unit are adapted to enter inside a container which is adapted to house substrates.
2. The container cleanliness measurement apparatus according to claim 1, wherein said separation promoting unit and said collection unit are each formed into an elongated nozzle shape having an opening formed therein.
3. The container cleanliness measurement apparatus according to claim 2, wherein the opening of said collection unit is formed to surround the opening of said separation promoting unit.
4. The container cleanliness measurement apparatus according to claim 1, wherein said separation promoting unit is adapted to inject at least water vapor.
5. The container cleanliness measurement apparatus according to claim 4, wherein said collection unit is connected to an exhaust apparatus, and a moisture collection unit is disposed between said collection unit and said exhaust apparatus.
6. The container cleanliness measurement apparatus according to claim 1, wherein said separation promoting unit is adapted to inject heated gas.
7. The container cleanliness measurement apparatus according to claim 1, wherein said separation promoting unit is adapted to inject a substance with two possible phase states of gas and liquid phases or of gas and solid phases.
8. The container cleanliness measurement apparatus according to claim 1, wherein said separation promoting unit is adapted to inject gas while varying a flow speed of the gas like a pulsed wave.
9. The container cleanliness measurement apparatus according to claim 1, wherein said separation promoting unit and said collection unit are adapted to scan a region of a predetermined area.
10. The container cleanliness measurement apparatus according to claim 1, wherein said measurement unit is adapted to observe scattered light generated by laser light irradiation onto the collected particles.
11. The container cleanliness measurement apparatus according to claim 1, wherein said measurement unit includes a flow path adapted to permit the collected particles to flow therethrough and having a bent portion, and a pressure-sensitive device disposed in the bent portion of the flow path.
12. A substrate processing system including a substrate receiving apparatus adapted to receive substrates by being connected with a container which is adapted to house the substrates, and a substrate processing apparatus adapted to perform processing on the received substrates, wherein:
said substrate receiving apparatus includes a separation promoting unit adapted to promote separation of particles, and a collection unit adapted to collect separated particles;
said separation promoting unit and said collection unit are adapted to enter inside the container connected to said substrate receiving apparatus; and
the substrate processing system further includes a measurement unit adapted to measure an amount of collected particles.
13. The substrate processing system according to claim 12, wherein said substrate processing apparatus is adapted to perform any one of etching, CVD, heat treatment, diffusion processing, and substrate cleaning.
14. A container cleanliness measurement method for measuring cleanliness inside a container which is adapted to house substrates, comprising:
a separation promoting step of promoting separation of particles;
a collection step of collecting separated particles; and
a measurement step of measuring collected particles.
15. The container cleanliness measurement method according to claim 14, wherein said separation promoting step and said collection step are repeated.
16. The container cleanliness measurement method according to claim 14, wherein said separation promoting step and said collection step are each carried out at least once when the measured amount of particles is equal to larger than a predetermined reference value.
17. The container cleanliness measurement method according to claim 14, further including:
a receiving confirmation step of confirming, prior to said separation promoting step, whether nor not the substrates are housed in the container,
wherein said separation promoting step is carried out when the substrates are not housed in the container.