1. A gas concentration controller system configured to mix a first gas and a second gas at a predetermined ratio to produce mixed gas having a predetermined concentration, the gas concentration controller system comprising:
a first gas line that is provided with a first gas flow rate controlling mechanism for controlling a flow rate of the first gas;
a second gas line that is provided with a second gas flow rate controlling mechanism for controlling a flow rate of the second gas;
an output gas line that is joined by the first gas line and the second gas line and configured to output the mixed gas having the predetermined concentration;
an exhaust gas line that is connected to an upstream side of the second gas flow rate controlling mechanism in the second gas line and provided with an onoff valve and a flow rate control part configured to flow the second gas in the exhaust gas line; and
a control part configured to, depending on the flow rate of the second gas flowing through the second gas line or a type of the second gas, switch onoff the onoff valve provided in the exhaust gas line, while the flow rate of the second gas in the second gas line is being controlled by the second gas flow rate controlling mechanism.
2. The gas concentration controller system according to claim 1, wherein the first gas is diluent gas, and the second gas is standard gas.
3. The gas concentration controller system according to claim 1, wherein
the second gas line has: a plurality of branch lines and the second gas flow rate controlling mechanism is one of a plurality of second gas flow rate controlling mechanisms that are respectively provided on each of the plurality of branch lines; and a line switching mechanism configured to select, from the branch lines, a branch line through which the second gas flows,
flow rate control ranges of the second gas flow rate control mechanism provided in the respective branch lines are configured to be mutually different, and
the exhaust gas line is connected to, among the plurality of branch lines, a branch line that is provided with a second gas flow rate controlling mechanism having a low flow rate range.
4. The gas concentration controller system according to claim 3, wherein
in a case where, among the plurality of branch lines, the branch line that is provided with the second gas flow rate controlling mechanism having the low flow rate range is selected, the control part is configured to open the onoff valve provided in the exhaust gas line.
5. A gas concentration controller program used for a gas concentration controller system configured to mix a first gas and a second gas at a predetermined ratio to produce mixed gas having a predetermined concentration and is provided with:
a first gas line that is provided with a first gas flow rate controlling mechanism for controlling a flow rate of the first gas;
a second gas line that is provided with a second gas flow rate controlling mechanism for controlling a flow rate of the second gas;
an output gas line that is joined by the first gas line and the second gas line and configured to output the mixed gas having the predetermined concentration; and
an exhaust gas line that is connected to an upstream side of the second gas flow rate controlling mechanism in the second gas line and provided with an onoff valve and a flow rate control part configured to flow the second gas in the exhaust gas line,
the program is configured to instruct a computer to fulfill a function as a control part configured to, depending on the flow rate of the second gas flowing through the second gas line or a type of the second gas, switch onoff the onoff valve provided in the exhaust gas line, while the flow rate of the second gas in the second gas line is being controlled by the second gas flow rate controlling mechanism.
6. A gas concentration controller method using a gas concentration controller system configured to mix a first gas and a second gas at a predetermined ratio to produce mixed gas having a predetermined concentration and is provided with:
a first gas line that is provided with a first gas flow rate controlling mechanism for controlling a flow rate of the first gas;
a second gas line that is provided with a second gas flow rate controlling mechanism for controlling a flow rate of the second gas;
an output gas line that is joined by the first gas line and the second gas line and configured to output the mixed gas having the predetermined concentration; and
an exhaust gas line that is connected to an upstream side of the second gas flow rate controlling mechanism in the second gas line and provided with an onoff valve and a flow rate control part configured to flow the second gas in the exhaust gas line, the gas concentration controller method, depending on the flow rate of the second gas flowing through the second gas line or a type of the second gas, configured to switch onoff the onoff valve provided in the exhaust gas line, while the flow rate of the second gas in the second gas line is being controlled by the second gas flow rate controlling mechanism.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A testing apparatus comprising:
a probe station with a working surface for supporting an object to be tested;
a micropositioner located on the working surface;
a probe mounted on the micropositioner for testing one or more circuits of the object;
a first electronic camera mounted on the micropositioner for taking images of the probe and the circuits;
a frame; and
a second electronic camera mounted on the frame;
wherein the frame is movably mounted on the probe station and can move back and forth along a first axis parallel to the working surface.
2. The testing apparatus as claimed in claim 1, further comprising a monitor connecting with the first electronic camera for displaying the images.
3. The testing apparatus as claimed in claim 1, wherein the second electronic camera can move along a second axis parallel to the working surface and perpendicular to the first axis.
4. The testing apparatus as claimed in claim 1, wherein the micropositioner comprises a suction cup absorbed on the working surface by vacuum adsorption.
5. The testing apparatus as claimed in claim 1, wherein the micropositioner comprises a magnetic portion, and the micropositioner can be fixed on the working surface by magnetic attraction between the magnetic portion and the probe station.
6. The testing apparatus as claimed in claim 1, wherein the micropositioner comprises a first adjusting knob, and the first adjusting knob is utilized to adjust movement of the probe along a first axis parallel to the working surface.
7. The testing apparatus as claimed in claim 6, wherein the micropositioner further comprises a second adjusting knob, and the second adjusting knob is utilized to adjust movement of the probe along a second axis, the second axis being parallel to the working surface and perpendicular to the first axis.
8. The testing apparatus as claimed in claim 7, wherein the micropositioner comprises a third adjusting knob, and the third adjusting knob is utilized to adjust movement of the probe along a third axis, the third axis being perpendicular to the working surface.
9. The testing apparatus as claimed in claim 1, wherein the micropositioner comprises an angle adjusting knob for adjusting an angle of the probe relative to the working surface.
10. A testing apparatus comprising:
a probe station with a working surface for supporting an object to be tested;
a micropositioner located on and moveable relative to the working surface;
a probe mounted on the micropositioner for testing one or more circuits of the object;
an electronic camera mounted on the micropositioner for taking images of the probe and the circuits;
a device displaying the images in a specific form;
a frame having a second electronic camera mounted thereon, wherein the frame is movably mounted on the probe station and can move back and forth along a first axis parallel to the working surface.
11. A method of testing comprising steps of:
providing a probe station with a working surface for supporting an object to be tested;
providing a micropositioner located on the working surface;
providing a probe mounted on the micropositioner for testing one or more circuits of the object;
providing an electronic camera mounted on the micropositioner for taking images of the probe and the circuits;
providing a frame movably mounted on the probe station;
providing a second electronic camera mounted on the frame; and
moving the frame either back forth or both back and forth along a first axis parallel to the working surface.