1. An x-ray imaging system comprising:
an x-ray generator configured to emit an x-ray beam;
a two-dimensional pixelated area radiation detector having a plane arranged perpendicular to an emission direction of the x-ray beam, wherein a first translation stage and a second translation stage carry the radiation detector, wherein the first and second translation stages are configured to move the radiation detector along translation axes parallel to orientation directions of detector pixels of the radiation detector; and
a rotation stage having a rotation axis perpendicular to the emission direction of the x-ray beam, wherein the rotation stage is disposed between the x-ray generator and the radiation detector, wherein the rotation stage is configured to carry and rotate a sample;
a linear stage configured to translate the sample linearly along an axis parallel to the rotation axis of the rotation stage, wherein a motion of the rotation stage and a motion of the linear stage are synchronized such that the x-ray beam traces a spiral pattern on the sample; and
an image acquisition system configured to:
acquire, while the radiation detector is at a first detector position, a first series of radiographs at a plurality of rotation angles of the rotation stage and a plurality of linear stage positions of the linear stage;
after acquiring the first series of radiographs, acquire, while the radiation detector is at a second detector position, a second series of radiographs at the plurality of rotation angles and the plurality of linear stage positions, the second detector position being separated from the first detector position along either or both the translation axes by a distance less than a pixel size of the radiation detector;
generate, based on radiographs in the first series of radiographs and corresponding radiographs in the second series of radiographs, a set of higher-resolution radiographs, wherein the higher-resolution radiographs have higher resolution than the radiographs in the first and second series of radiographs; and
assemble the higher-resolution radiographs into a 3-dimensional radiograph of the sample.
2. The x-ray imaging system of claim 1, wherein the image acquisition system assembles the radiographs in an interlaced fashion to form the higher-resolution radiographs.
3. The x-ray imaging system of claim 1, further comprising:
a first linear position encoder, wherein the first linear position encoder has a resolution finer than one-quarter of the pixel size of the radiation detector, wherein the first linear position encoder is configured to provide a direct measurement of displacement of the first translation stage; and
a second linear position encoder, wherein the second linear position encoder has a resolution finer than one-quarter the pixel size of the radiation detector, wherein the second linear position encoder is configured to provide a direct measurement of displacement of the second translation stage,
wherein the image acquisition system assembles radiographs of the first and second series of radiographs using the measurement of displacement of the first translation stage and the measurement of displacement of the second translation stage.
4. The x-ray imaging system of claim 1, wherein the x-ray generator generates x-rays with an energy range of 20 keV to 600 keV.
5. The x-ray imaging system of claim 1, wherein:
the radiation detector comprises a flat-panel x-ray detector, and
the pixel size of the radiation detector is in a range of 25 micrometers to 250 micrometers.
6. The x-ray imaging system of claim 1, wherein:
the radiation detector comprises a lens-coupled detector, and
the pixel size of the radiation detector is in a range of 0.1 micrometers to 10 micrometers.
7-12. (canceled)
13. An x-ray imaging system comprising:
an x-ray generator configured to emit an x-ray beam;
a two-dimensional pixelated area radiation detector having a plane arranged perpendicular to an emission direction of the x-ray beam, wherein a first translation stage and a second translation stage carry the radiation detector, wherein the first and second translation stages are configured to move the radiation detector along translation axes parallel to orientation directions of detector pixels of the radiation detector;
a rotation stage having a rotation axis perpendicular to the emission direction of the x-ray beam, wherein the rotation stage is disposed between the x-ray generator and the radiation detector, wherein the rotation stage is configured to carry and rotate a sample;
a linear stage configured to translate the sample linearly along an axis parallel to the rotation axis of the rotation stage, wherein a motion of the rotation stage and a motion of the linear stage are synchronized such that the x-ray beam traces a spiral pattern on the sample; and
an image acquisition system configured to:
acquire, while the radiation detector is at a first detector position, a first series of radiographs at a plurality of rotation angles of the rotation stage and a plurality of linear stage positions of the linear stage;
after acquiring the first series of radiographs, acquire, while the radiation detector is at a second detector position, a second series of radiographs at the plurality of rotation angles and the plurality of linear stage positions, wherein the first detector position is separated from the second detector position along one or both the translation axes by a distance less than a linear size of the radiation detector along the respective translation axis;
generate, based on radiographs in the first series of radiographs and corresponding radiographs in the second series of radiographs, a series of composite radiographs with larger fields of view; and
assemble the generated series of composite radiographs into a 3-dimensional radiograph of the sample.
14. The x-ray imaging system of claim 13, further comprising:
a first linear position encoder, wherein the first linear position encoder has a resolution finer than one-quarter of a pixel size of the radiation detector, wherein the first linear position encoder is configured to provide a direct measurement of displacement of the first translation stage;
a second linear detector, wherein the second linear detector has a resolution finer than one-quarter the pixel size of the radiation detector, wherein the second linear detector is configured to provide a direct measurement of displacement of the second translation stage,
wherein the image acquisition system is configured to generate the series of composite radiographs using the measurement of displacement of the first translation stage and the measurement of displacement of the second translation stage.
15. The x-ray imaging system of claim 13, wherein the x-ray generator generates x-rays with an energy range of 20 keV to 600 keV.
16. The x-ray imaging system of claim 13, wherein:
the radiation detector comprises a flat-panel x-ray detector, and
the pixel size of the radiation detector is in the range of 25 micrometers to 250 micrometers.
17. The x-ray imaging system of claim 13, wherein:
the radiation detector comprises a lens-coupled detector, and
the pixel size of the radiation detector is in the range of 0.1 micrometers to 10 micrometers.
18. The x-ray imaging system of claim 13, wherein the image acquisition system is further configured to use a cross-correlation algorithm to match edges of radiographs in the first and second series of radiographs prior to assembling the radiographs in the first and second series of radiographs into the series of composite radiographs.
19. The x-ray imaging system of claim 13, wherein the image acquisition system is further configured to use an interpolation algorithm to blend intensities of radiographs in the first and second series of radiographs prior to assembling the radiographs in the first and second series of radiographs into the series of composite radiographs.
20-25. (canceled)
26. A method comprising:
rotating a sample on a rotation stage having a rotation axis perpendicular to an emission direction of an x-ray beam emitted by an x-ray generator;
translating, on a linear stage, the sample linearly along an axis parallel to a rotation axis of the rotation stage, wherein a motion of the rotation stage and a motion of the linear stage are synchronized such that the x-ray beam traces a spiral pattern on the sample;
acquiring, while a radiation detector is at a first detector position, a first series of radiographs at a plurality of rotation angles of the rotation stage and a plurality of linear stage positions of the linear stage;
after acquiring the first series of radiographs, acquire, while the radiation detector is at a second detector position, a second series of radiographs at the plurality of rotation angles and the plurality of linear stage positions, the second detector position being separated from the first detector position along either or both a first or a second translation axis parallel to orientation directions of detector pixels of the radiation detector, the first and second detector positions separated by a distance finer than a pixel size of the radiation detector, wherein a first translation stage and a second translation stage carry the radiation detector, wherein the first and second translation stages are configured to move the radiation detector along the first and second translation axes;
generating, based on radiographs in the first series of radiographs and corresponding radiographs in the second series of radiographs, a set of higher-resolution radiographs, wherein the higher-resolution radiographs have higher resolution than the radiographs in the first and second series of radiographs; and
assembling the higher-resolution radiographs into a 3-dimensional radiograph of the sample.
27. The method of claim 26, wherein assembling the radiographs comprises assembling the radiographs in an interlaced fashion to form the higher-resolution radiographs.
28. The method of claim 26, wherein:
a first linear position encoder has a resolution finer than one-quarter of the pixel size of the radiation detector and is configured to provide a direct measurement of displacement of the first translation stage, wherein a second linear position encoder has a resolution finer than one-quarter the pixel size of the radiation detector and is configured to provide a direct measurement of displacement of the second translation stage; and
generating the set of higher-resolution radiographs comprises assembling the radiographs of the first and second series of radiographs using the measurement of displacement of the first translation stage and the measurement of displacement of the second translation stage.
29. The method of claim 26, wherein the x-ray generator generates x-rays with an energy range of 20 keV to 600 keV.
30. The method of claim 26, wherein:
the radiation detector comprises a flat-panel x-ray detector, and
the pixel size of the radiation detector is in a range of 25 micrometers to 250 micrometers.
31. The method of claim 26, wherein:
the radiation detector comprises a lens-coupled detector, and
the pixel size of the radiation detector is in a range of 0.1 micrometers to 10 micrometers.
32-35. (canceled)
36. A method comprising:
rotating a sample on a rotation stage having a rotation axis perpendicular to an emission direction of an x-ray beam emitted by an x-ray generator;
translating, on a linear stage, the sample linearly along an axis parallel to a rotation axis of the rotation stage, wherein a motion of the rotation stage and a motion of the linear stage are synchronized such that the x-ray beam traces a spiral pattern on the sample;
acquiring, while a radiation detector is at a first detector position, a first series of radiographs at a plurality of rotation angles of the rotation stage and a plurality of linear stage positions of the linear stage;
after acquiring the first series of radiographs, acquiring, while the radiation detector is at a second detector position, a second series of radiographs at the plurality of rotation angles and the plurality of linear stage positions, wherein the first and second detector positions are different detector positions along a first or a second translation axis parallel to orientation directions of detector pixels of the radiation detector, the first and second detector positions separated by a distance less than a linear size of the radiation detector along the first translation axis or the second translation axis, respectively,
wherein the radiation detector has a plane arranged perpendicular to an emission direction of the x-ray beam emitted by the x-ray generator, a first translation stage and a second translation stage carry the radiation detector, and the first and second translation stages are configured to move the radiation detector along the first and second translation axes;
generating, based on radiographs in the first series of radiographs and corresponding radiographs in the second series of radiographs, a series of composite radiographs with larger fields of view; and
assembling the generated series of composite radiographs into a 3-dimensional radiograph of the sample.
37. The method of claim 36, wherein:
a first linear position encoder has a resolution finer than one-quarter of the pixel size of the radiation detector and is configured to provide a direct measurement of displacement of the first translation stage, wherein a second linear position encoder has a resolution finer than one-quarter the pixel size of the radiation detector and is configured to provide a direct measurement of displacement of the second translation stage; and
generating the series of composite radiographs comprises generating the series of composite radiographs using the measurement of displacement of the first translation stage and the measurement of displacement of the second translation stage.
38. The method of claim 36, wherein the x-ray generator generates x-rays with an energy range of 20 keV to 600 keV.
39. The method of claim 36, wherein:
the radiation detector comprises a flat-panel x-ray detector, and
the pixel size of the radiation detector is in the range of 25 micrometers to 250 micrometers.
40. The method of claim 36, wherein:
the radiation detector comprises a lens-coupled detector, and
the pixel size of the radiation detector is in the range of 0.1 micrometers to 10 micrometers.
41. The method of claim 36, further comprising using a cross-correlation algorithm to match edges of radiographs in the first and second series of radiographs prior to generating the series of composite radiographs.
42. The method of claim 36, further comprising using an interpolation algorithm to blend intensities of radiographs in the first and second series of radiographs prior to generating the series of composite radiographs.
43-46. (canceled)
47. A non-transitory computer-readable data storage medium having instructions stored thereon that, when executed, cause a computing system to:
rotate a sample on a rotation stage having a rotation axis perpendicular to an emission direction of an x-ray beam emitted by an x-ray generator;
translate, on a linear stage, the sample linearly along an axis parallel to a rotation axis of the rotation stage, wherein a motion of the rotation stage and a motion of the linear stage are synchronized such that the x-ray beam traces a spiral pattern on the sample;
acquire, while a radiation detector is at a first detector position, a first series of radiographs at a plurality of rotation angles of the rotation stage and a plurality linear stage positions of the linear stage;
after acquiring the first series of radiographs, acquire, while the radiation detector is at a second detector position, a second series of radiographs at the plurality of rotation angles of the rotation stage and the plurality of linear stage positions, the second detector position being separated from the first detector position along either or both a first translation axis or a second translation axis parallel to orientation directions of detector pixels of the radiation detector, the first and second detector positions separated by a distance finer than a pixel size of the radiation detector, wherein a first translation stage and a second translation stage carry the radiation detector, wherein the first and second translation stages are configured to move the radiation detector along the first and second translation axes;
generate, based on radiographs in the first series of radiographs and corresponding radiographs in the second series of radiographs, a set of higher-resolution radiographs, wherein the higher-resolution radiographs have higher resolution than the radiographs in the first and second series of radiographs; and
assemble the higher-resolution radiographs into a 3-dimensional radiograph of the sample.
48. A non-transitory computer-readable data storage medium having instructions stored thereon that, when executed, cause a computing system to:
rotate a sample on a rotation stage having a rotation axis perpendicular to an emission direction of an x-ray beam emitted by an x-ray generator;
translate, on a linear stage, the sample linearly along an axis parallel to a rotation axis of the rotation stage, wherein a motion of the rotation stage and a motion of the linear stage are synchronized such that the x-ray beam traces a spiral pattern on the sample;
acquire, while a radiation detector is at a first detector position, a first series of radiographs at a plurality of rotation angles of the rotation stage and a plurality of linear stage positions of the linear stage;
after acquiring the first series of radiographs, acquire, while the radiation detector is at a second detector position, a second series of radiographs at the plurality of rotation angles and the plurality of linear stage positions, wherein the second detector position are different detector positions along a first translation axis or a second translation axis parallel to orientation directions of detector pixels of the radiation detector, the first and second detector positions separated by a distance less than a linear size of the radiation detector along the first translation axis or the second translation axis, respectively,
wherein the radiation detector has a plane arranged perpendicular to an emission direction of the x-ray beam emitted by the x-ray generator, a first translation stage and a second translation stage carry the radiation detector, and the first and second translation stages are configured to move the radiation detector along the first and second translation axes; and
generate, based on radiographs in the first series of radiographs and corresponding radiographs in the second series of radiographs, a series of composite radiographs with larger fields of view; and
assemble the generated series of composite radiographs into a 3-dimensional radiograph of the sample.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A vacuum pump having an exhaust portion in which rotating blade portions and stationary blade portions are laminated in multiple stages, wherein
in at least one stage of the stationary blade portion among the plurality of stationary blade portions laminated in the multiple stages,
a plurality of stator blades extended in a radial manner with a predetermined width in the circumferential direction and inclined by a predetermined blade angle with respect to a stationary blade portion main body, and
a plurality of exhaust openings through which a gas current is guided from upstream to downstream by the plurality of stator blades are provided,
each of the plurality of stator blades in one stage of the stationary blade portion is
three-dimensionally connected to the stationary blade portion main body by an inner circumferential side support portion on the inner circumferential end side, and
three-dimensionally connected to the stationary blade portion main body by an outer circumferential side support portion on the outer circumferential end side, and
a cutout is provided in a circumferential front end of the outer circumferential side support portion.
2. The vacuum pump according to claim 1, wherein
each of the plurality of stator blades is formed into a substantial quadrangle elongated in the radial direction in a plan view, and includes
an inner circumferential end extended in the circumferential direction on the inner circumferential end side of the stator blade,
an outer circumferential end extended in the circumferential direction on the outer circumferential end side of the stator blade,
a base end extended in the radial direction for connecting a base part of the inner circumferential end and a base part of the outer circumferential end, and
a side end facing the base end in the circumferential direction and being extended in the radial direction,
the inner circumferential end, the outer circumferential end, and the base end are connected to the stationary blade portion main body, and the side end is separated from the stationary blade portion main body so as to define the exhaust opening, and
the cutout is provided in a front end of the outer circumferential end crossing the side end.
3. The vacuum pump according to claim 2, wherein the cutout is formed into a quadrangle in a plan view, and is long in the circumferential direction and short in the radial direction.
4. The vacuum pump according to claim 2, wherein
the inner circumferential side support portion is provided over the entire length of the inner circumferential end, and the outer circumferential side support portion is provided in a region of a part of the entire length from the base part of the outer circumferential end to the side end.
5. The vacuum pump according to claim 2, wherein
a length of the cutout is less than a half of a length of the outer circumferential end.
6. The vacuum pump according to claim 1, wherein
the stator blades are formed by drawing.