1. A susceptor device comprising:
a ceramic base body having a mounting surface for mounting a plate sample on a surface of the ceramic base body; and
a temperature controlling section for supporting the base body, in which a flow path for circulating a medium for controlling a temperature is formed;
wherein the base body and the temperature controlling section are attached together via an adhesive layer; and
the adhesive layer is sealed by a sealing member which is disposed near a peripheral section of the adhesive layer.
2. A susceptor device according to claim 1 wherein an electrode is disposed inside of the base body.
3. A susceptor device according to claim 1 wherein:
at least a main portion of the temperature controlling section is formed by a conductive material; and
the temperature controlling section serves as an electrode.
4. A susceptor device according to claim 1 wherein:
a supporting section for supporting the sealing member is disposed outside of a peripheral section of the temperature controlling section;
the supporting section is fixed by a fixing member on the temperature controlling section; and
the sealing member is attached to the base body, or the adhesive layer, or the base body and the adhesive layer by compressing the sealing member by the supporting section.
5. A susceptor device according to claim 4 wherein a groove for supporting the sealing member is formed on an upper surface of the supporting section.
6. A susceptor device according to claim 4 wherein:
an inclined surface is formed on an upper end section in an inner peripheral surface of the supporting section such that the inclined surface has a predetermined angle to the inner peripheral surface; and
the sealing member is attached to the base body, or the adhesive layer, or the base body and the adhesive layer by the inclined surface compressing the sealing member.
7. A susceptor device according to claim 6 wherein a ring flange section for supporting the sealing member is formed in a peripheral section of the base body.
8. A susceptor device according to claim 4 wherein:
a flange section which contacts a part of the sealing member is formed in an inner peripheral section of the supporting section;
a second supporting section which contacts other part of the sealing member is disposed so as to face the flange section;
the second supporting section is fixed to the supporting section by a second fixing member and,
the sealing member is attached to the base body, or the adhesive layer, or the base body and the adhesive layer by the second supporting section and the flange section by compressing the sealing section.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
What is claimed is:
1. A microstructured optical waveguide comprising
a central core region disposed along the length thereof; and
an inner cladding layer surrounding said central core region, said inner cladding layer being microstructured to include at least one air channel disposed along the length of said waveguide, wherein said at least one air channel comprises a first plurality of plugs of optically active material disposed to exhibit a desired periodicity .
2. The microstructured optical waveguide as defined in claim 1 wherein the at least one air channel comprises a plurality of air channels disposed axially to surround the core region, wherein at least two, opposing air channels each include a first plurality of plugs of optically active material.
3. The microstructured optical waveguide as defined in claim 1 wherein at least one air channel includes a second plurality of plugs of an alternative optically active material, said alternative optically active material exhibiting different optical characteristics than the original optically active material.
4. The microstructured optical waveguide as defined in claim 3 wherein the first plurality of plugs of optically active material exhibits a refractive index that decreases with increasing temperature and the second plurality of plugs of alternative optically active material exhibits a refractive index that increases with increasing temperature.
5. The microstructured optical waveguide as defined in claim 1 wherein the periodicity of the plugs is tunable by modifying an environmental factor that alters the spacing of the plugs within the air channel.
6. The microstructured optical waveguide as defined in claim 5 wherein opposing ends of said waveguide are subjected to a temperature change to alter the spacing of the plugs.
7. The microstructured optical waveguide as defined in claim 5 wherein opposing ends of the waveguide are subjected to a pressure change to alter the spacing of the plugs.
8. The microstructured optical waveguide as defined in claim 1 wherein the optically active material comprises a liquid.
9. The microstructured optical waveguide as defined in claim 8 wherein the liquid comprises trifluorotoluence.
10. The microstructured optical waveguide as defined in claim 1 wherein the waveguide comprises an optical fiber.
11. The microstructured optical waveguide as defined in claim 1 wherein the waveguide comprises an optical fiber including a tapered region to allow for coupling of a propagating signal between the central core region and the inner cladding layer.
12. The microstructured optical waveguide as defined in claim 11 wherein the tapered region comprises an adiabatically tapered region.
13. A method of forming a microstructured optical waveguide including a plurality of plugs of optically active material in at least one air channel disposed along the length of an inner cladding layer, the method comprising the steps of:
a) supplying a reservoir of optically active material;
b) attaching a vacuum source to a far end of the microstructured optical waveguide;
c) lowering the opposing, near end of said microstructured optical waveguide into the reservoir of optically active material for a defined period of time;
d) applying a vacuum to draw an amount of optically active material into at least one inner cladding air channel;
e) removing said microstructured optical waveguide from said reservoir; and
f) repeating steps c) – e) until a desired plurality of plugs of optically active material have been introduced into said microstructured optical waveguide.
14. The method as defined in claim 13 wherein the frequency of steps c) – e) is controlled to determined the periodicity A of the plugs in the microstructured optical waveguide.
15. The method as defined in claim 13 wherein the method further comprises the steps of heating and stretching the final microstructured optical waveguide to form a central tapered region.
16. The method as defined in claim 15 wherein the heating and stretching are controlled to form adiabatic transition regions into and out of the central tapered region.