What is claimed is:
1. A method of providing a metal seed layer substantially free of discontinuities disposed on a substrate comprising the step of contacting a metal seed layer disposed on a substrate with an electroplating bath comprising a) a source of metal ions; b) an electrolyte comprising two or more acids; c) and optionally one or more additives.
2. The method of claim 1 wherein the two or more acids are selected from organic acids, inorganic acids, or mixtures thereof.
3. The method of claim 2 wherein the organic acids are selected from alkylsulfonic acids, aryl sulfonic acids, carboxylic acids or halogenated acids.
4. The method claim 2 wherein the inorganic acids are selected from sulfuric acid, phosphoric acid, nitric acid, hydrogen halide acids, sulfamic acid or fluoroboric acid.
5. The method of claim 1 wherein the two or more acids are present in an amount of from about 1 to about 350 gL.
6. The method of claim 1 wherein the source of metal ions is a source of copper ions.
7. The method of claim 6 wherein the source of copper ions is selected from copper sulfates, copper acetates, copper fluoroborate, or cupric nitrates.
8. The method bath of claim 6 wherein the source of copper ions is present in an amount of from about 1 to about 300 gL.
9. The method of claim 1 wherein the electrolyte further comprises a source of halide ions.
10. A method of manufacturing an electronic device comprising the step of contacting a metal seed layer disposed on a substrate with an electroplating bath comprising a) a source of metal ions; b) an electrolyte comprising two or more acids; c) and optionally one or more additives.
11. The method of claim 10 wherein the two or more acids are selected from organic acids, inorganic acids, or mixtures thereof.
12. The method of claim 11 wherein the organic acids are selected from alkylsulfonic acids, aryl sulfonic acids, carboxylic acids or halogenated acids.
13. The method claim 11 wherein the inorganic acids are selected from sulfuric acid, phosphoric acid, nitric acid, hydrogen halide acids, sulfamic acid or fluoroboric acid.
14. The method of claim 10 wherein the two or more acids are present in an amount of from about 1 to about 350 gL.
15. The method of claim 10 wherein the source of metal ions is a source of copper ions.
16. The method of claim 15 wherein the source of copper ions is selected from copper sulfates, copper acetates, copper fluoroborate, or cupric nitrates.
17. The method bath of claim 15 wherein the source of copper ions is present in an amount of from about 1 to about 300 gL.
18. The method of claim 10 wherein the electrolyte further comprises a source of halide ions.
19. An article of manufacture comprising an electronic device substrate containing one or more apertures, each aperture containing a seed layer deposit obtained from an electroplating composition that comprises a) a source of metal ions; b) an electrolyte comprising two or more acids; c) and optionally one or more additives.
20. A method for removing excess material from a semiconductor wafer containing one or more apertures by using a chemical mechanical planarization process which comprises contacting the semiconductor wafer with a rotating polishing pad thereby removing the excess material from the semiconductor wafer; wherein the apertures contain a seed layer deposit obtained from an electroplating composition that comprises a) a source of metal ions; b) an electrolyte including two or more acids; c) and optionally one or more additives.
21. The method of claim 20 wherein the polishing pad is grooved.
22. The method of claim 20 wherein the semiconductor wafer is also subjected to a polishing slurry.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A method of deploying an optic cable, comprising:
providing the cable comprising an inner tube having an optical fiber disposed inside the inner tube and an outer tube with an inner diameter sized for relative retention of the inner tube disposed inside the outer tube;
positioning the cable at a location; and
controlled flowing of a fluid between the inner and outer tubes to remove hydrogen from within the cable positioned at the location.
2. The method of claim 1, wherein positioning the cable includes lowering the cable into a wellbore.
3. The method of claim 1, wherein flowing of the fluid passes the fluid between the inner and outer tubes across a length of the cable in a first direction and returns the fluid between the inner and outer tubes across the length of the cable in a second direction opposite the first direction.
4. The method of claim 1, wherein the fluid comprises a gas.
5. The method of claim 1, wherein the fluid is selected from one of air, nitrogen, helium, fluorine, argon, oxygen, neon, krypton, xenon, radon, carbon monoxide, carbon dioxide, and mixtures thereof.
6. The method of claim 1, wherein the fluid comprises hydrogen scavenging compounds.
7. The method of claim 1, wherein the fluid comprises one of a fullerene, carbon tetrachloride, perfluorohexane, potassium iodate, and mixtures thereof.
8. The method of claim 1, wherein the flowing of the fluid occurs at a flow rate between 0.05 cubic meters and 1.5 cubic meters per day for a period of at least one week.
9. The method of claim 1, wherein the cable further includes gel filler material disposed inside the inner tube around the optical fiber.
10. The method of claim 1, wherein length of the optical fiber disposed inside a unit length of the inner tube is greater than the unit length.
11. An optic cable system, comprising:
a cable that includes an inner tube having an optical fiber disposed inside the inner tube and an outer tube with an inner diameter sized for relative retention of the inner tube disposed inside the outer tube, wherein a flow path disposed between the inner and outer tubes extends across a length of the cable and includes an inlet and an outlet; and
a source of fluid coupled to the inlet of the flow path, wherein the fluid is pressurized to achieve controlled fluid flow of the fluid through the flow path from the inlet toward the outlet that is defined, the controlled fluid flow to remove hydrogen from within the cable.
12. The optic cable system of claim 11, wherein the flow path includes input and return paths coextensive along the length but separated along part of the length from one another, the inlet configured to introduce the fluid from the source into the input path and the outlet configured to receive from the return path the fluid introduced at the inlet.
13. The optic cable system of claim 11, wherein the flow path includes first and second annular paths coextensive along the length but separated along part of the length from one another, the inlet configured to introduce the fluid from the source into the first annular path and the outlet configured to receive the fluid exiting the cable from the second annular path.
14. The optic cable system of claim 13, wherein a tubular aluminum body disposed between the inner and outer tubes is sized to form the annular paths between the aluminum body and the inner tube and the aluminum body and the outer tube.
15. The optic cable system of claim 11, further comprising a flow tube stranded with the inner tube, wherein the inlet introduces the fluid from the source into the flow tube and the outlet receives the fluid introduced at the inlet and returned via a gap between an interior of the outer tube and exteriors of the inner and flow tubes.
16. The optic cable system of claim 11, further comprising a gel filler material disposed inside the inner tube around the optical fiber.
17. The optic cable system of claim 11, wherein length of the optical fiber disposed inside a unit length of the inner tube is greater than the unit length.
18. The optic cable system of claim 11, further comprising a flow control device configured to maintain flowing of the fluid from the source through the flow path for a period of at least one week.
19. A method of deploying an optic cable, comprising:
providing the cable comprising an inner tube having an optical fiber disposed inside the inner tube and an outer tube with an inner diameter sized for relative retention of the inner tube disposed inside the outer tube;
lowering the cable into a wellbore; and
removing hydrogen from within the cable while located in the wellbore by circulating a fluid between the inner and outer tubes.
20. The method of claim 19, wherein the fluid comprises a gas and the inner and outer tubes are made of metal.