1. A lithographic method, comprising:
positioning a mask proximate to a substrate, the mask including a first mask section and a second mask section; and
shifting the first mask section relative to the substrate by actuating a first electroactive polymer member; and
shifting the second mask section relative to the substrate by actuating a second electroactive polymer member,
wherein the first mask section and the second mask section are shifted asynchronously.
2. The method of claim 1, wherein shifting the first mask section relative to the substrate includes contacting the substrate with the first mask section.
3. The method of claim 2, wherein shifting the second mask section relative to the substrate includes contacting the substrate with the second mask section subsequent to contacting the substrate with the first mask section.
4. The method of claim 1, wherein shifting the first mask section relative to the substrate includes removing the first mask section from contact with the substrate.
5. The method of claim 4, wherein shifting the second mask section relative to the substrate includes removing the second mask section from contact with the substrate subsequent to removing the first mask section from contact with the substrate.
6. The method of claim 1, further comprising monitoring a contact force between the mask and the substrate.
7. The method of claim 6, wherein monitoring contact force between the mask and the substrate includes monitoring contact force between the first mask section and the substrate.
8. The method of claim 1, further comprising monitoring proximity between the mask and the substrate.
9. The method of claim 6, wherein monitoring proximity between the mask and the substrate includes monitoring proximity between the first mask section and the substrate.
10. The method of claim 1, wherein the first and second electroactive polymer members are integral.
11. A lithography apparatus, comprising:
a mask holder having a mask location, the mask holder being configured to hold a mask having a first mask section and a second mask section;
a substrate holder configured to hold a substrate in a substrate location in proximity to the mask location; and
a positioner configured to asynchronously shift the positions of the first mask section and the second mask section relative to the substrate by actuating an electroactive polymer.
12. The apparatus of claim 11, wherein the positioner is configured to place the first mask section of a mask in the mask location in contact with a substrate in the substrate location.
13. The apparatus of claim 12, wherein the positioner is further configured to place the second mask section of a mask in the mask location in contact with the substrate subsequent to placing the first mask section in contact with the substrate.
14. The apparatus of claim 11, wherein the positioner is configured to remove the first mask section of a mask in the mask location from contact with a substrate in the substrate location.
15. The apparatus of claim 14, wherein the positioner is further configured to remove the second mask section of a mask in the mask location from contact with the substrate subsequent to removing the first mask section from contact with the substrate.
16. The apparatus of claim 11, further comprising a monitor configured to monitor a contact force between a mask in the mask location and a substrate in the substrate location.
17. The apparatus of claim 11, further comprising a monitor configured to monitor a proximity between a mask in the mask location and a substrate in the substrate location.
18. A lithographic apparatus, comprising:
a mask holder having a mask location;
a substrate holder having a substrate location;
a monitor configured to monitor a liftoff force between a mask in the mask location and a substrate in the substrate location; and
a positioner configured to shift relative positions of the mask location and the substrate location responsive to the monitored liftoff force by actuating an electroactive polymer member.
19. The apparatus of claim 18, wherein the monitor is configured to monitor liftoff force at a plurality of locations.
20. The apparatus of claim 18, wherein the positioner is configured to shift relative positions of the mask location and the substrate location by actuating a plurality of active regions of the electroactive polymer member.
21. The apparatus of claim 18, wherein the positioner is configured to minimize liftoff force as a mask in the mask position is removed from contact with a substrate in the substrate position.
22. A controller for a lithographic system, comprising:
a receiver that receives a liftoff force measurement signal;
a processor that uses the liftoff force measurement signal to determine an actuation profile for an electroactive polymer member; and
an output that actuates the electroactive polymer member according to the actuation profile.
23. The controller of claim 22, wherein the liftoff force measurement signal is produced by measuring a liftoff force between a mask and a substrate.
24. The controller of claim 22, wherein the liftoff force measurement signal comprises a plurality of liftoff force measurements.
25. The controller of claim 22, wherein the actuation profile comprises a single degree of actuation of the electroactive polymer member.
26. The controller of claim 22, wherein the actuation profile comprises a plurality of actuation signals, each actuation signal being directed to an active region of the electroactive polymer member.
27. The controller of claim 22, wherein the actuation profile is selected to separate a mask and a substrate.
28. The controller of claim 22, wherein the actuation profile is selected to reduce a liftoff force between a mask and a substrate.
29. A lithographic method, comprising:
positioning a mask proximate to a substrate;
monitoring a liftoff force between the mask and the substrate; and
shifting the mask relative to the substrate by actuating an electroactive polymer member, responsive to the monitored liftoff force.
30. The method of claim 29, wherein monitoring the liftoff force includes monitoring liftoff force at a plurality of locations.
31. The method of claim 29, wherein shifting the mask relative to the substrate includes actuating a plurality of active regions of the electroactive polymer member.
32. The method of claim 29, wherein shifting the mask relative to the substrate includes minimizing a liftoff force as the mask is removed from contact with the substrate.
33. A lithographic method, comprising:
monitoring a contact force between a mask and a substrate; and
laterally shifting at least a portion of the mask in response to the monitored contact force, wherein shifting includes actuating an electroactive polymer member.
34. The method of claim 33, wherein the contact force is normal to the substrate.
35. The method of claim 33, wherein the contact force is parallel to the substrate.
36. The method of claim 33, wherein actuating the electroactive polymer member includes applying a lateral force sufficient to overcome friction associated with a normal contact force.
37. The method of claim 33, wherein laterally shifting the at least a portion of the mask includes laterally shifting the at least a portion of the mask by a predetermined distance.
38. The method of claim 33, wherein laterally shifting the at least a portion of the mask includes laterally shifting the at least a portion of the mask at a predetermined speed.
39. The method of claim 33, wherein laterally shifting the at least a portion of the mask includes maintaining the contact force within a predetermined range during lateral shifting.
40. The method of claim 33, wherein laterally shifting the at least a portion of the mask includes laterally shifting the at least a portion of the mask while the mask is in contact with the substrate.
41. The method of claim 33, wherein laterally shifting the at least a portion of the mask includes laterally shifting the at least a portion of the mask while the mask is not in contact with the substrate.
42. A lithographic apparatus, comprising:
a mask holder having a mask location;
a substrate holder having a substrate location;
a monitor configured to monitor a contact force between a mask in the mask location and a substrate in the substrate location; and
a positioner configured to laterally shift relative positions of at least a portion of the mask and the substrate responsive to the monitored contact force by actuating an electroactive polymer member.
43. The lithographic apparatus of claim 42, wherein the monitored contact force is normal to a substrate in the substrate holder.
44. The lithographic apparatus of claim 42, wherein the monitored contact force is parallel to a substrate in the substrate holder.
45. The lithographic apparatus of claim 42, wherein the positioner is configured to overcome friction associated with a normal contact force between a mask in the mask position and a substrate in the substrate position.
46. The lithographic apparatus of claim 42, wherein the positioner is configured to laterally shift the relative positions of the at least a portion of the mask and the substrate by a predetermined distance.
47. The lithographic apparatus of claim 42, wherein the positioner is configured to laterally shift the relative positions of the at least a portion of the mask and the substrate at a predetermined speed.
48. The lithographic apparatus of claim 42, wherein the positioner is configured to maintain the contact force within a predetermined range while laterally shifting the relative positions of the at least a portion of the mask and the substrate.
49. The lithographic apparatus of claim 42, wherein the positioner is configured to laterally shift the relative positions of the at least a portion of the mask and the substrate while maintaining contact between the mask and the substrate.
50. The lithographic apparatus of claim 42, wherein the positioner is configured to remove contact between the at least a portion of the mask and the substrate before laterally shifting the relative positions of the at least a portion of the mask and the substrate.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A medical lead comprising:
a multilumen tube having a distal end and a proximal end and a wall, the wall defining at least three lumens along a first longitudinal portion of the tube and less than three lumens along a second longitudinal portion of the tube, wherein a first, continuous lumen extends through both the first and second portions, wherein the wall is substantially continuous through both the first and second longitudinal portions;
a proximal connector disposed at the proximal end of the medical lead, the proximal connector adapted to connect the lead to an implantable medical device;
a fixation member disposed on a distal end of the lead body, the fixation member having a fixation helix that is adapted to fix the lead at a site within a patient;
a conductor member disposed in the continuous lumen and electrically coupling the proximal connector to the fixation member; and
a distal tip portion, the fixation member at least partially disposed within the distal tip portion;
wherein the second portion of the multilumen tube is connected with the distal tip portion, providing a fluid-tight passageway extending through the first and second portions of the multilumen tube and into the distal tip portion.
2. The medical lead of claim 1, wherein the fixation member further has a fixation member base and the fixation helix is attached to a distal portion of the base and the conductor member is attached to a proximal portion of the base.
3. The medical lead of claim 1, wherein the distal tip portion has a distal outer member and a distal inner member disposed within the distal outer member, wherein a space is formed between an outer surface of a proximal portion of the distal inner member and the inner surface of the distal outer member, and wherein the second portion of the multilumen tube is disposed within the space and forms a fluid tight seal with the distal inner member.
4. The medical lead of claim 1, wherein the conductor member is a coiled torque transmission member and is affixed to the fixation member such that torque provided at a proximal portion of the conductor member is transmitted to the fixation member.
5. The medical lead of claim 1, wherein the distal tip portion has an inner surface with first threads formed thereon and the fixation member has an outer surface with second threads formed thereon, the threads mechanically interacting such that turning the fixation member causes the fixation member to translate longitudinally with respect to the distal tip portion.
6. The medical lead of claim 1, wherein the multilumen tube comprises a flexible material and wherein the second longitudinal portion of the multilumen tube is stretched to fit over a portion of the distal tip portion.
7. The medical lead of claim 6, wherein the material is silicone.
8. The medical lead of claim 1, wherein the proximal connector has a connector body and a terminal pin, wherein a portion of the terminal pin is rotatable with respect to the connector body and wherein a proximal end of the conductor member is coupled to the terminal pin such that torque imparted on the terminal pin is transmitted to through the conductor member to the fixation member.
9. The medical lead of claim 1, wherein the second longitudinal portion of the multilumen tube defines a single lumen.
10. The medical lead of claim 1, wherein the wall of the multilumen tube is continuous from the distal end to the proximal end of the multilumen tube.
11. A medical lead comprising:
a multilumen tube defining a first number of lumens along a first longitudinal portion of the tube and a second number of lumens along a second longitudinal portion of the tube, wherein the first number of lumens is larger than the second number of lumens, wherein a continuous lumen extends through both the first and second portions and wherein the wall is substantially continuous through both the first and second longitudinal portions;
a fixation member disposed on a distal end of the lead body, the fixation member having a fixation helix that is adapted to fix the lead at a site within a patient; and
a distal tip portion, the fixation member at least partially disposed within the distal tip portion;
wherein a fluid tight seal is formed between the second portion of the multilumen tube and the distal tip portion, providing a fluid-tight passageway through the first and second portions of the multilumen tube, into the distal tip portion and to the fixation member.
12. The medical lead of claim 11, wherein the fixation member has a fixation member base and the fixation helix is attached to, and extends distally from, the fixation member base.
13. The medical lead of claim 11, further comprising a conductor member that is disposed in the continuous lumen, wherein a distal portion of the conductor member is electrically coupled to the fixation member.
14. The medical lead of claim 11, further comprising a conductor member that is disposed in the continuous lumen, wherein a distal portion of the conductor member is electrically and mechanically coupled to the fixation member such that torque provided at a proximal portion of the conductor member is transmitted to the fixation member.
15. The medical lead of claim 11, wherein the wall of the multilumen tube is continuous from the distal end to the proximal end of the multilumen tube.
16. The medical lead of claim 11, wherein the multilumen tube comprises a flexible material and wherein the second longitudinal portion of the multilumen tube is stretched to fit over a portion of the distal tip portion.
17. A medical lead comprising:
a multilumen tube having a distal end and a proximal end and a wall, the wall defining a first number of lumens along a first longitudinal portion of the tube and a second number of lumens along a second longitudinal portion of the tube, wherein a first, continuous lumen extends through both the first and second portions, wherein the wall is substantially continuous through both the first and second longitudinal portions and wherein the first number of lumens is greater than the second number of lumens;
a proximal connector disposed at the proximal end of the medical lead, the proximal connector adapted to connect the lead to an implantable medical device;
a fixation member disposed on a distal end of the lead body, the fixation member having a fixation helix that is adapted to fix the lead at a site within a patient;
a conductor member disposed in the continuous lumen and electrically coupling the proximal connector to the fixation member; and
a distal tip portion, the fixation member at least partially disposed within the distal tip portion;
wherein the second portion of the multilumen tube is connected with the distal tip portion, providing a fluid-tight passageway extending through the first and second portions of the multilumen tube and into the distal tip portion.
18. The medical lead of claim 17, wherein the distal tip portion has a distal outer member and a distal inner member disposed within the distal outer member, wherein a space is formed between an outer surface of a proximal portion of the distal inner member and the inner surface of the distal outer member, and wherein the second portion of the multilumen tube is disposed within the space and forms a fluid tight seal with the distal inner member.
19. The medical lead of claim 16, wherein the multilumen tube comprises a flexible material and wherein the second longitudinal portion of the multilumen tube is stretched to fit over a portion of the distal tip portion.
20. The medical lead of claim 19, wherein the material is silicone.