1. A shaping method of a thin film layer, said thin film layer including a first thin film and a second thin film in side-by-side relationship with said first thin film, the method comprising the steps of:
calculating a preliminary etching amount, based on a required etching amount for shaping said first thin film into a given shape, an etching rate of said first thin film, and an etching rate of said second thin film, said preliminary etching amount compensating for a difference between said etching rates to equalize an etching amount of said second thin film to said required etching amount;
depositing said second thin film to cover said first thin film;
planarizing the surface of said second thin film and the surface of said first thin film until said first thin film is exposed;
etching, after the planarizing step, only said second thin film by said preliminary etching amount; and
etching, by using ion milling, said thin film layer by said required etching amount to provide a continuous flat surface consisting of the surfaces of said first thin film and said second thin film.
2. The thin film layer shaping method of claim 1, wherein said required etching amount and said preliminary etching amount are determined by an etching depth.
3. The thin film layer shaping method of claim 1, further comprising:
a step of performing a planarizing process on said first thin film after etching said thin film layer by said required etching amount.
4. A manufacturing method of a perpendicular recording magnetic head, said perpendicular recording magnetic head including a main magnetic pole film and a non-magnetic film in side-by-side relationship with said main magnetic pole film, the method comprising the steps of:
forming a magnetic pole layer including a main magnetic pole film and a non-magnetic film in side-by-side relationship with said main magnetic pole film;
calculating a preliminary etching amount, based on a required etching amount for shaping said main magnetic pole film into a given shape, an etching rate of said main magnetic pole film, and an etching rate of said non-magnetic film, said preliminary etching amount compensating for a difference between said etching rates to equalize an etching amount of said non-magnetic film to said required etching amount;
depositing said non-magnetic film to cover said main magnetic pole film;
planarizing the surface of said non-magnetic film and the surface of said main magnetic pole film until said main magnetic pole film is exposed;
etching, after the planarizing step, only said non-magnetic film by said preliminary etching amount; and
etching, by using ion milling, said magnetic pole layer by said required etching amount to provide a continuous flat surface consisting of the surfaces of said main magnetic pole film and said non-magnetic film.
5. The perpendicular recording magnetic head manufacturing method of claim 4, wherein said non-magnetic film is made of alumina.
6. The perpendicular recording magnetic head manufacturing method of claim 4, wherein said required etching amount and said preliminary etching amount are determined by an etching depth.
7. The perpendicular recording magnetic head manufacturing method of claim 4, wherein ion milling is used for etching said magnetic pole layer by said required etching amount.
8. The perpendicular recording magnetic head manufacturing method of claim 4, wherein reactive ion etching is used for etching only said non-magnetic film by said preliminary etching amount.
9. The perpendicular recording magnetic head manufacturing method of claim 4, wherein an alkali etchant is used for etching only said non-magnetic film by said preliminary etching amount.
10. The perpendicular recording magnetic head manufacturing method of claim 4, further comprising:
step of performing a planarizing process on said main magnetic pole film after etching said magnetic pole layer by said required etching amount.
11. The perpendicular recording magnetic head manufacturing method of claim 4, wherein CMP is used for said planarizing process.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. The current coil, preferably for a needle motion sensor for fuel injection valves, with a cylindrical coil body (1), which has a metallic coil core (3) inserted into its one end, which is coaxially encompassed by a coil winding (7) mounted on the coil body (1), wherein the ends (9) of the coil winding wire are each connected with a connecting contact wire (13) which, on the other end, can be connected to an electric connecting line, characterized in that the connecting contact wires (13) are each pressed into a formed groove (15) provided on the coil body (1).
2. The current coil according to claim 1, characterized in that a tension relief loop (17) is provided on the connecting contact wires (13), which is completely disposed inside the coil body (1) and permits a length compensation on the connecting contact wire (13).
3. The current coil according to claim 1, characterized in that the coil winding wire has a tension relief loop on its fastening ends (9) to the connecting contact wire (13).
4. The current coil according to claim 1, characterized in that the ends (9) of the coil winding wire are guided in an obliquely extending guide groove (11) of the coil body (1).
5. The current coil according to claim 1, characterized in that at least in the vicinity of the connecting contact wires (13) and the coil winding wire, the coil body (1) is completely enclosed on its radial circumference surface by a plastic material, preferably a hot glue.
6. A process for producing a current coil according to claim 1, characterized by means of the following process steps:
the connecting contact wires (13) , which are embodied as formed wires, are pressed into corresponding formed grooves (15) on the coil body (1), with the provision of a relief loop (17) and with radially protruding wire ends (23), the coil wire (7) is wound onto the coil body (1), the ends (9) of the coil winding wire are each fastened to a protruding end (23) of the connecting contact wires (13),
the wire contact points between coil winding wire ends (9) and connecting contact wire ends (23) are soldered, preferably in a solder bath,
the protruding wire ends (23) of the connecting contact wires (13) are bent in the direction of the coil body (1),
the wire-guiding regions of the current coil are completely extrusion coated with a plastic material.