1. A substrate cleaning apparatus of cleaning a substrate, the substrate cleaning apparatus comprising:
a main cleaning chamber having a cleaning space in which the substrate is cleaned, the main cleaning chamber comprising a sidewall in which a first vent hole is defined;
at least one first cleaning nozzle disposed in the main cleaning chamber to spray a first cleaning solution;
a cover member covering the main cleaning chamber, the cover member having one side in which a second vent hole is defined;
an air flow generation unit supplying air into the cleaning space through the first vent hole; and
an exhaust unit coupled to the one side of the cover member to suck and exhaust the air supplied into the cleaning space through the second vent hole.
2. The apparatus of claim 1, wherein the air flow generation unit and the exhaust unit generate an air flow within the cleaning space and the air flow is defined by a flow of the air crossing the cleaning space through the first and second vent holes.
3. The apparatus of claim 2, wherein the air flow generation unit and the exhaust unit exhaust mist generated from the first cleaning solution and filled into the cleaning space to the outside of the main cleaning chamber by using the air flow.
4. The apparatus of claim 2, further comprising:
a first auxiliary cleaning chamber disposed adjacent to the sidewall of the main cleaning chamber;
at least one second cleaning nozzle disposed in the first auxiliary cleaning chamber to spray a second cleaning solution;
a second auxiliary cleaning chamber facing the first auxiliary cleaning chamber with the main cleaning chamber therebetween;
at least one third cleaning nozzle disposed in the second auxiliary cleaning chamber to spray a third cleaning solution; and
a transfer unit disposed within the first auxiliary cleaning chamber, the cleaning chamber, and the second auxiliary cleaning chamber to transfer the substrate.
5. The apparatus of claim 4, wherein the air flow generation unit supplies the air into the first auxiliary cleaning chamber through a hole defined in the first auxiliary cleaning chamber, and the air supplied into the first auxiliary cleaning chamber is supplied into the cleaning space through the first vent hole.
6. The apparatus of claim 5, further comprising a guide member disposed within the first auxiliary cleaning chamber to extend to the first vent hole, wherein the guide member guides the air supplied into the first auxiliary cleaning chamber to the first vent hole.
7. The apparatus of claim 4, wherein the first cleaning nozzle sprays the first cleaning solution at a first pressure, the second cleaning nozzle sprays the second cleaning solution at a second pressure, and the third cleaning nozzle sprays the third cleaning solution at a third pressure,
wherein the first pressure is greater than each of the second and third pressures.
8. The apparatus of claim 4, further comprising:
a first auxiliary nozzle disposed within the first auxiliary cleaning chamber to spray a first fluid, the first auxiliary nozzle blocking mist generated from the first cleaning solution and introduced into the first auxiliary cleaning chamber through a first substrate entrance; and
a second auxiliary nozzle disposed within the second auxiliary cleaning chamber to spray a second fluid, the second auxiliary nozzle blocking the mist introduced into the second auxiliary cleaning chamber through a second substrate entrance,
wherein the first substrate entrance communicating with the first auxiliary cleaning chamber is defined in the main cleaning chamber and the second substrate entrance communicating with the second auxiliary cleaning chamber is defined in the main cleaning chamber.
9. The apparatus of claim 4, further comprising an auxiliary air flow generation unit supplying air into the second auxiliary cleaning chamber through a hole defined in the second auxiliary cleaning chamber to block the mist introduced into the second auxiliary cleaning chamber.
10. The apparatus of claim 4, wherein the first cleaning nozzle comprises a water jet nozzle, and each of the second and third cleaning nozzles comprises a spray nozzle or shower nozzle.
11. The apparatus of claim 1, wherein each of the first and second vent holes has a slit shape extending in a width direction of the sidewall of the main cleaning chamber.
12. The apparatus of claim 1, wherein the cover member comprises:
a side part in which the second vent hole is defined, the side part being coupled to the exhaust unit; and
a cover part coupled to the side part to cover an upper portion of the main cleaning chamber,
wherein the cover part is tilted from the second vent hole to the first vent hole in a side view.
13. The apparatus of claim 12, wherein the cover part guides the air supplied into the cleaning space through the first vent hole to the second vent hole.
14. The apparatus of claim 1, further comprising a blocking member protruding from at least one of the sidewall and other sidewalls of the main cleaning chamber to the cleaning space to block a liquid that descends along the sidewall and other sidewalls.
15. The apparatus of claim 1, wherein the first cleaning nozzle comprises a water jet nozzle.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A system for providing fuel having a desired calorie content to a combustion engine over a range of operating levels, comprising:
a. a first fuel supply pipe containing a first fuel;
b. a second fuel supply pipe containing a second fuel and connected to the first fuel supply pipe at a mixing point so that the first fuel mixes with the second fuel to create a mixed fuel having a first calorie content;
c. a control valve in the second fuel supply pipe upstream of the mixing point;
d. a process system downstream of the mixing point for processing the mixed fuel to create a processed mixed fuel having a second calorie content;
e. a first control signal reflective of the first calorie content of the mixed fuel;
f. a second control signal reflective of the second calorie content of the processed mixed fuel;
g. a third control signal reflective of the operating level of the combustion engine; and
h. a controller connected to the control valve for operating the control valve based on the first, second, and third control signals.
2. The system of claim 1, further including a mixed fuel calorimeter downstream of the mixing point that generates the first control signal.
3. The system of claim 1, further including a trim calorimeter downstream of the process system that generates the second control signal.
4. The system of claim 3, wherein the trim calorimeter is proximate the combustion engine.
5. The system of claim 1, wherein the third control signal changes over the range of operating levels of the combustion engine.
6. The system of claim 1, wherein the desired calorie content decreases as the operating level of the combustion engine increases.
7. The system of claim 1, wherein the process system includes a compressor.
8. A system for providing fuel having a desired calorie content to a combustion engine over a range of operating levels, comprising:
a. a first fuel supply pipe containing a first fuel;
b. a second fuel supply pipe containing a second fuel and connected to the first fuel supply pipe at a mixing point so that the first fuel mixes with the second fuel to create a mixed fuel having a first calorie content;
c. a control valve in the second fuel supply pipe upstream of the mixing point;
d. a process system downstream of the mixing point for processing the mixed fuel to create a processed mixed fuel having a second calorie content;
e. a trim calorimeter downstream of the process system that produces a trim control signal reflective of the second calorie content of the processed mixed fuel; and
f. a controller connected to the control valve for adjusting the control valve based on the trim control signal from the trim calorimeter.
9. The system of claim 8, wherein the trim calorimeter is proximate the combustion engine.
10. The system of claim 8, further including a mixed fuel calorimeter downstream of the mixing point that generates a mixed fuel control signal reflective of the first calorie content of the mixed fuel.
11. The system of claim 10, wherein the controller adjusts the control valve based on the trim control signal and the mixed fuel control signal.
12. The system of claim 8, further including an operating level control signal reflective of the operating level of the combustion engine.
13. The system of claim 8, wherein the desired calorie content changes over of the range of operating levels of the combustion engine.
14. The system of claim 8, wherein the desired calorie content decreases as the operating level of the combustion engine increases.
15. The system of claim 8, wherein the process system includes a compressor.
16. A method for providing fuel having a desired calorie content to a combustion engine over a range of operating levels, the method comprising:
a. determining the desired calorie content of the fuel;
b. mixing a first flow of fuel with a second flow of fuel to produce a mixed fuel having a first calorie content;
c. measuring the first calorie content of the mixed fuel;
d. processing the mixed fuel to produce a processed mixed fuel having a second calorie content;
e. measuring the second calorie content of the processed mixed fuel;
f. adjusting the second flow of fuel based on the desired calorie content, the first calorie content of the mixed fuel, and the second calorie content of the processed mixed fuel.
17. The method as recited in claim 16, further including determining the desired calorie content based on the operating level of the combustion engine.
18. The method as recited in claim 16, further including changing the desired calorie content as the operating level of the combustion engine changes.
19. The method of claim 16, further including comparing the first calorie content of the mixed fuel with the second calorie content of the processed mixed fuel to determine a trim value.
20. The method of claim 19, further including adjusting the desired calorie content by the trim value to determine an adjusted desired calorie content.
21. The method of claim 20, further including adjusting the second flow of fuel based on the difference between the adjusted desired calorie content and the first calorie content of the mixed fuel.