1. An apparatus for securing a substrate in a processing system, comprising:
a support ring adapted to receive the substrate, the support ring having a seal engaging means formed on a surface therein;
a thrust plate assembly adapted to exert a securing force on the substrate to secure the substrate to the support ring; and
a sealing member attached to the thrust plate assembly, wherein the sealing member is adapted to exert a substantially radial sealing force against the seal engaging means.
2. The apparatus of claim 1, wherein the seal engaging means comprises an annular ring extending from the support ring and the sealing member is adapted to exert a substantially radial sealing force on an outer surface of the raised annular ring.
3. The apparatus of claim 2, wherein the sealing member comprises a body portion attached to the thrust plate assembly and wherein an annular portion extending from the body portion is adapted to engage the outer surface of the annular ring.
4. The apparatus of claim 3, wherein an inner surface of the sealing member where the annular portion extends from the body portion is substantially rounded to mate with a substantially rounded surface of the annular ring.
5. The apparatus of claim 3, wherein an outer diameter of the sealing member, measured to an outer surface of the annular portion, is less than 5 mm greater than an outer diameter of the annular ring.
6. The apparatus of claim 1, wherein the seal engaging means comprises an annular groove formed in a surface of the support ring and the sealing member is adapted to exert a substantially radial sealing force on an inner surface of the annular groove.
7. The apparatus of claim 1, further comprising a plurality of electrical contacts adapted to engage a plating surface of the substrate and the support ring comprises a contact ring.
8. The apparatus of claim 1, further comprising a plurality of electrical contacts adapted to engage a non-plating surface of the substrate.
9. The apparatus of claim 8, wherein the electrical contacts are attached to the thrust plate assembly.
10. The apparatus of claim 9, wherein the electrical contacts are attached to a conductive plate of the thrust plate assembly.
11. An apparatus for securing a substrate in a processing system, comprising:
a support ring adapted to receive the substrate, the support ring having an annular ring extending from a surface thereof;
a thrust plate assembly adapted to exert a securing force on the substrate to secure the substrate to the support ring;
a plurality of electrical contacts adapted to engage the substrate;
a first sealing member attached to the thrust plate assembly, wherein the first sealing member is adapted to exert a sealing force against the annular ring, wherein the sealing force is directed substantially radially inward towards a center of the support ring; and
a second sealing member attached to the support ring, the second sealing member adapted to engage a plating surface of the substrate.
12. The apparatus of claim 11, wherein the first and second sealing members form a cavity enclosing the electrical contacts.
13. The apparatus of claim 12, wherein the cavity is pressurized with a fluid.
14. The apparatus of claim 13, wherein the fluid is a gas.
15. The apparatus of claim 11, wherein the electrical contacts are adapted to engage a non-plating surface of the substrate.
16. The apparatus of claim 15, wherein the electrical contacts are adapted to engage the non-plating surface of the substrate at a substantially equal distance radially inward from an edge of the substrate as the second sealing member engages the plating surface of the substrate.
17. The apparatus of claim 11, wherein the first sealing member comprises a body portion attached to the thrust plate assembly and an annular portion extending from the body portion is adapted to engage an outer surface of the annular ring.
18. An apparatus for securing a substrate in a processing system, comprising:
a support ring adapted to receive the substrate;
a thrust plate assembly adapted to exert a securing force on the substrate to secure the substrate to the support ring;
a plurality of electrical contacts adapted to electrically contact a non-plating surface of the substrate; and
a sealing member attached to the substrate support member adapted to engage a plating surface of the substrate.
19. The apparatus of claim 18, wherein the electrical contacts are disposed on a surface of the thrust plate assembly.
20. The apparatus of claim 18, wherein the electrical contacts are adapted to engage the non-plating surface of the substrate at a substantially equal distance radially inward from an edge of the substrate as the sealing member engages the plating surface of the substrate.
21. The apparatus of claim 18, wherein the sealing member is adapted to engage the plating surface of the substrate within 2 mm of a beveled edge of the substrate.
22. The apparatus of claim 18, wherein the electrical contacts are attached to an electrically conductive plate attachable to a power supply for providing an electrical bias to the electrical contacts.
23. The apparatus of claim 18, further comprising another sealing member adapted to engage the non-plating surface of the substrate radially outward from the electrical contacts.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
What is claimed is:
1. A connector rod for connecting a vehicle steering mechanism to a vehicle wheel, said connector rod comprising;
a first end pivotally connectable to the vehicle steering mechanism to allow said connector rod to pivot in a first plane relative to the vehicle steering mechanism;
a second end adapted for connection to the vehicle wheel assembly;
a shaft portion interconnecting said first and second ends, said shaft portion being formed from a flexible material to allow said connector rod to deform in a second plane, approximately orthogonal to the first plane, in response to movement of said second end of said connector rod in the second plane.
2. The connector rod as set forth in claim 1, wherein said first end of said connector rod includes an aperture for receiving a support shaft of the vehicle steering mechanism, said aperture extending through said connector rod orthogonal to the first plane to allow said connector rod to pivot about the support shaft in the first plane.
3. The connector rod as set forth in claim 1, wherein said shaft portion is formed from a fiber reinforced compound.
4. The connector rod as set forth in claim 1, wherein said second end is cylindrical in shape and includes external threads for engaging a pivotal connection to the vehicle wheel assembly.
5. A vehicle steering assembly comprising;
a vehicle steering mechanism;
a wheel assembly including a pivotal wheel hub for supporting a wheel, a knuckle mounted to said hub, and a pivot arm extending outward from said knuckle;
a connector rod interconnecting said vehicle steering mechanism and said pivot arm for transmitting motion from said vehicle steering mechanism to said wheel assembly;
said connector rod including a first end pivotally connected to said vehicle steering mechanism to allow said connector rod to pivot in a first plane in relation to said vehicle steering mechanism, a second end pivotally connected to said pivot arm, and a shaft portion interconnecting said first and second ends;
said shaft portion being formed from a flexible material to allow said connector rod to deform in a second plane, approximately orthogonal to the first plane, in response to movement of said second end of said connector rod in the second plane.
6. The vehicle steering assembly as set forth in claim 5, wherein said vehicle steering mechanism includes a support shaft and said first end of said connector rod includes an aperture for receiving said support shaft, said support shaft being oriented orthogonal to the first plane to allow said connector rod to pivot about said support shaft in the first plane.
7. The vehicle steering assembly as set forth in claim 5, wherein said shaft portion of said connector rod is formed from a fiber reinforced compound.
8. The vehicle steering assembly as set forth in claim 5, wherein said second end of said connector rod is cylindrical in shape and includes external threads for engaging a connection to the vehicle wheel assembly.
9. The vehicle steering assembly as set forth in claim 8 including a ball joint disposed between and interconnecting said second end of said connector rod and said pivot arm to allow pivotal movement of said connector rod relative to said vehicle wheel assembly.
10. A connector rod for connecting a vehicle steering mechanism to a vehicle wheel assembly, said connector rod comprising;
a first end adapted for pivotal connection to the vehicle steering mechanism, whereby said connector rod is allowed to pivot in a first plane relative to the vehicle steering mechanism;
a second end adapted for connection to the vehicle wheel assembly;
a shaft portion interconnecting said first and second ends;
said first end including a radial spherical bearing disposed between said first end and the vehicle steering mechanism to allow said connector rod to pivot in a second plane, approximately orthogonal to the first plane, in response to horizontal movement of said second end of said connector rod in the second plane.
11. The connector rod as set forth in claim 10, wherein said first end of said connector rod includes an aperture for receiving a support shaft of the vehicle steering mechanism, said aperture extending through said connector rod orthogonal to the first plane to allow said connector rod to pivot about the support shaft in the first plane.
12. The connector rod as set forth in claim 10, wherein said second end is cylindrical in shape and includes external threads for engaging a pivotal connection to the vehicle wheel assembly.
13. A vehicle steering assembly comprising;
a vehicle steering mechanism;
a wheel assembly including a pivotal wheel hub for supporting a wheel, a knuckle mounted to said hub, and a pivot arm extending outward from said knuckle;
a connector rod interconnecting said vehicle steering mechanism and said pivot arm for transmitting motion from said vehicle steering mechanism to said wheel assembly;
said connector rod including a first end pivotally connected to said vehicle steering mechanism to allow said connector rod to pivot in a first plane in relation to said vehicle steering mechanism, a second end pivotally connected to said pivot arm, and a shaft portion interconnecting said first and second ends;
said first end including a radial spherical bearing disposed between said first end and said vehicle steering mechanism to allow said connector rod to pivot in a second plane, approximately orthogonal to the first plane, in response to movement of said second end of said connector rod in the second plane.
14. The vehicle steering assembly as set forth in claim 13, wherein said vehicle steering mechanism includes a support shaft and said first end of said connector rod includes an aperture for receiving said support shaft, said support shaft being oriented orthogonal to the first plane to allow said connector rod to pivot about said support shaft in the first plane.
15. The vehicle steering assembly as set forth in claim 13, wherein said second end of said connector rod is cylindrical in shape and includes external threads for engaging a connection to the vehicle wheel assembly.
16. The vehicle steering assembly as set forth in claim 15 including a ball joint disposed between and interconnecting said second end of said connector rod and said pivot arm to allow pivotal movement of said connector rod relative to said vehicle wheel assembly.
17. A vehicle steering assembly comprising;
a vehicle steering mechanism;
a wheel assembly including a pivotal wheel hub for supporting a wheel, a knuckle mounted to said hub, and a pivot arm extending outward from said knuckle;
a connector rod interconnecting said vehicle steering mechanism and said pivot arm for transmitting linear motion from said vehicle steering mechanism through said connector rod to pivot said wheel assembly;
said connector rod including a first end connected to said vehicle steering mechanism, a second end pivotally connected to said pivot arm, and a shaft portion interconnecting said first and second ends;
said connector rod including a first mechanism to allow said connector rod to pivot in a first plane in relation to said vehicle steering mechanism in response to movement of said second end of said connector arm in the first plane, and a second mechanism to allow said connector rod to pivot in a second plane, approximately orthogonal to the first plane, in response to movement of said second end of said connector rod in the second plane.
18. The vehicle steering assembly as set forth in claim 17, wherein said first mechanism and said second mechanism are a common element disposed between and interconnecting said connector rod and said vehicle steering mechanism.