1. A rod lens for a lighting apparatus, the rod lens having a rectangular rod structure extending lengthwise comprising a first end and a second end opposing each other,
wherein the first end is formed of one continuous surface, the second end is formed of a plurality of separated surfaces, the first end is a light incident surface of the lens, and the second end is a light exit surface of the lens.
2. The rod lens of claim 1, wherein the second end has two surfaces having the same area.
3. The rod lens of claim 2, further comprising: a first lateral face, a second lateral face adjacent to the first lateral face, a third lateral face adjacent to the second lateral face and opposite the first lateral face, and a fourth lateral face adjacent to the third lateral face and opposite the second lateral face,
wherein parts of the first lateral face and the third lateral face are separated to correspond to the two separated surfaces of the second end.
4. The rod lens of claim 1, wherein the second end is separated to have three surfaces having the same area.
5. The rod lens of claim 4, further comprising: a first lateral face, a second lateral face adjacent to the first lateral face, a third lateral face adjacent to the second lateral face and opposite the first lateral face, and a fourth lateral face adjacent to the third lateral face and opposite the second lateral face,
wherein parts of the first lateral face and the third lateral face are separated to correspond to the three separated surfaces of the second end.
6. The rod lens of claim 1, wherein the second end is separated to have four surfaces having the same area.
7. The rod lens of claim 1, further comprising: a first lateral face, a second lateral face adjacent to the first lateral face, a third lateral face adjacent to the second lateral face and opposite the first lateral face, and a fourth lateral face adjacent to the third lateral face and opposite the second lateral face,
wherein parts of the first lateral face through the fourth lateral face are separated to correspond to the four separated surfaces of the second end.
8. A lighting apparatus comprising:
a light source for emitting light;
a rod lens positioned to receive the light through an incident surface and send out the light through an exit surface;
an objective lens facing an examination object; and
a plurality of light receiving units positioned to receive light reflected from the examination object and record an image of the examination object,
wherein the incident surface of the rod lens is formed of one continuous surface, and
the exit surface of the rod lens is separated into a plurality of surfaces.
9. The lighting apparatus of claim 8, wherein the plurality of light receiving units comprises two light receiving units,
wherein the exit surface of the rod lens is separated into two parts, and each of the two parts corresponds to one of the two light receiving units.
10. The lighting apparatus of claim 9, wherein the two parts of the exit surface of the rod lens have the same area.
11. The lighting apparatus of claim 8, wherein the plurality of light receiving units comprises three light receiving units,
wherein the exit surface of the rod lens is separated into three parts, and each of the three parts corresponds to one of the three light receiving units.
12. The lighting apparatus of claim 11, wherein the three parts of the exit surface of the rod lens have the same area.
13. The lighting apparatus of claim 8, wherein the plurality of light receiving units comprises four light receiving units,
wherein the exit surface of the rod lens is separated into four parts, and each of the four parts corresponds to one of the four light receiving units.
14. The lighting apparatus of claim 13, wherein the exit surface of the rod lens is vertically and horizontally separated so as to have four parts having the same area.
15. A method manufacturing a semiconductor device, comprising:
forming a semiconductor pattern, an insulator pattern and a metal pattern on a substrate;
mounting the substrate on an examination platform of a lighting apparatus;
examining a first pattern on the substrate; and
determining whether the first pattern passes or fails,
wherein, the lighting apparatus comprises,
a light source emitting light,
a rod lens receiving the light through an incident surface and sending out the light through an exit surface,
an objective lens facing the substrate; and
a plurality of light receiving units receiving light reflected from the substrate and recording an image of the substrate,
wherein the incident surface of the rod lens is formed of one continuous surface, and
the exit surface of the rod lens is separated into a plurality of surfaces.
16. The method of claim 15, wherein each surface of the plurality of surfaces of the exit surface corresponds to a light receiving unit of the plurality of light receiving units.
17. The method of claim 15, wherein the light coming out from the exit surface of the rod lens irradiates on the substrate, and
a shadow region is formed between the irradiated light patterns which are formed by the plurality of separated exit surfaces of the rod lens.
18. The method of claim 15, wherein the recorded image by the plurality of light receiving units forms a shadow region which corresponds to the substrate not recorded by the light receiving units and is between the regions recorded by the light receiving units.
19. The method of claim 18, further comprising:
examining a second pattern on the substrate; and
determining whether the second pattern passes or fails,
wherein the second pattern overlaps a portion of the first pattern.
20. The method of claim 19, wherein the first pattern is divided into a plurality of portions separated from each other, and
the second pattern includes a portion between the plurality of portions of the first pattern.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A multi-rod mechanism comprising:
at least one ternary link; and
first, second and third binary links, with the at least one ternary link and the first, second and third binary links connected between a first fixing pivot point and a second fixing pivot point, with a first combination comprising the at least one ternary link pivotally connected to the first binary link, with the first binary link pivotally connected to the first fixing pivot point, with the at least one ternary link providing a first movable pivot point arranged at a first slidable mold, with a second combination comprising the second binary link and providing a second movable pivot point arranged at a second slidable mold and located between the first fixing pivot point and the second fixing pivot point, with the third binary link pivotally connected to the second combination and to the at least one ternary link;
wherein the at least one ternary link and the first, second and third binary links synchronously move the first movable pivot point and the second movable pivot point toward or away from each other in opposite directions.
2. The multi-rod mechanism as defined in claim 1, wherein the first fixing pivot point is arranged at a first fixed seat.
3. The multi-rod mechanism as defined in claim 1, wherein the second fixing pivot point is arranged at a second fixed seat.
4. The multi-rod mechanism of claim 1 wherein the second and third binary links are pivotally connected together at the second movable pivot point.
5. The multi-rod mechanism of claim 4 further comprising a fourth binary link, with the fourth binary link pivotally connected to the second fixing pivot point and to the second binary link.
6. The multi-rod mechanism of claim 1 further comprising another ternary link pivotally connected to the second fixing pivot point, with the second binary link pivotally connected to the second movable pivot point and to the other ternary link, and with the third binary link pivotally connected to the other ternary link spaced from the second fixing pivot point and the second binary link.
7. A multi-rod mechanism comprising:
a first ternary link corresponding to a first fixing pivot point, wherein the first ternary link includes a first connection point, a second connection point and a third connection point, wherein the third connection point of the first ternary link is formed with a first movable pivot point;
a second ternary link corresponding to a second fixing pivot point;
a first binary link, wherein the first binary link includes a first connection point and a second connection point, wherein the first connection point of the first ternary link is pivotally connected with the first connection point of the first binary link, wherein the second connection point of the first binary link is formed with the first fixing pivot point;
a second binary link, wherein the second binary link includes a first connection point and a second connection point, wherein the second connection point of the first ternary link is pivotally connected with the first connection point of the second binary link;
wherein the second ternary link includes a first connection point, a second connection point and a third connection point, wherein the first connection point of the second ternary link is formed with the second fixing pivot point, wherein the second connection point of the second ternary link is pivotally connected with the second connection point of the second binary link; and
a third binary link, wherein the third binary link includes a first connection point and a second connection point, wherein the third connection point of the second ternary link is pivotally connected with the first connection point of the third binary link, wherein the second connection point of the third binary link is formed with the second movable pivot point, wherein the first ternary link, the second ternary link and the first, second and third bins links are connected between the first fixing pivot point and the second fixing pivot point to form a combination of the first ternary link, the second ternary link and the binary links, and the combination of the first ternary link, the second ternary link and the binary links being designed to provide the first movable pivot point and the second movable pivot point between the first fixing pivot point and the second fixing pivot point; and
wherein, in operation, the first ternary link, the second ternary link and the binary links are actuated to move the first movable pivot point and the second movable pivot point toward or away from each other in opposite directions.
8. The multi-rod mechanism as defined in claim 7, wherein the first fixing pivot point is arranged at a first fixed seat.
9. The multi-rod mechanism as defined in claim 7, wherein the second fixing pivot point is arranged at a second fixed seat.
10. The multi-rod mechanism as defined in claim 7, wherein the first movable pivot point is arranged at a first slidable mold.
11. The multi-rod mechanism as defined in claim 7, wherein the second movable pivot point is arranged at a second slidable mold.
12. A multi-rod mechanism comprising:
a ternary link, wherein the ternary link includes a first connection point, a second connection point and a third connection point, wherein the third connection point of the ternary link is formed with a first movable pivot point;
a first binary link, wherein the first binary link includes a first connection point and a second connection point, wherein the first connection point of the ternary link is pivotally connected with the first connection point of the first binary link, wherein the second connection point of the first binary link is formed with a first fixing pivot point;
a second binary link, wherein the second binary link includes a first connection point and a second connection point, wherein the second connection point of the ternary link is pivotally connected with the first connection point of the second binary link;
a third binary link, wherein the third binary link includes a first connection point and a second connection point, wherein the second connection point of the third binary link and the second connection point of the second binary link are pivotally connected to form a second movable pivot point; and
a fourth binary link, wherein the fourth binary link includes a first connection point and a second connection point, wherein the second connection point of the fourth binary link is pivotally connected with the first connection point of the third binary link, wherein the first connection point of the fourth binary link is formed with a second fixing pivot point, with the ternary link and the binary links being connected between the first fixing pivot point and the second fixing pivot point to form a combination of the ternary link and the binary links;
wherein the combination of the ternary link and the binary links provides the first movable pivot point and the second movable pivot point between the first fixing pivot point and the second fixing pivot point; and
wherein the ternary link and the binary links move the first movable pivot point and the second movable pivot point toward or away from each other in opposite directions.
13. The multi-rod mechanism as defined in claim 12, wherein the first fixing pivot point is arranged at a first fixed seat.
14. The multi-rod mechanism as defined in claim 12, wherein the second fixing pivot point is arranged at a second fixed seat.
15. The multi-rod mechanism as defined in claim 12, wherein the first movable pivot point is arranged at a first slidable mold.
16. The multi-rod mechanism as defined in claim 12, wherein the second movable pivot point is arranged at a second slidable mold.