1. A component configured for placement in a gas environment of a lithography apparatus operating with an ultraviolet (UV) or extreme ultraviolet (EUV) wavelength, comprising:
a first part and a second part bonded to each other by adhesive material, wherein the adhesive material is coated with a protective layer insulating the adhesive material from the gas environment.
2. The component according to claim 1, wherein the protective layer has an elasticity modulus of less than 10 MPa.
3. The component according to claim 1, wherein the protective layer has a permeation coefficient of less than 10\u22127 cm2bars.
4. The component according to claim 1, wherein the protective layer is a metallic layer.
5. The component according to claim 1, wherein the protective layer is a polymer layer.
6. The component according to claim 1, wherein the component comprises a scale as the first part and a support as the second part.
7. The component according to claim 1, wherein the component comprises a mirror as the first part and a mirror mounting as the second part.
8. The component according to claim 1, wherein the component comprises a lens as the first part and a lens mounting as the second part.
9. The component according to claim 1, wherein the component comprises a mask as the first part and a mask mounting as the second part.
10. A projection system for an EUV or UV lithography apparatus comprising a component according to claim 1.
11. An EUV or UV lithography apparatus comprising a component according to claim 1.
12. A method for producing a component according to claim 1, comprising:
bonding the first part to the second part with an adhesive material; and
depositing a protective layer on the adhesive material while the material is exposed to the gas environment.
13. The method according to claim 12, wherein the depositing comprises depositing a metallic protective layer in a vacuum environment.
14. The method according to claim 12, wherein the depositing comprises applying a polymer material in a nitrogen environment and setting the material in a humid environment or in an environment with aggressive gases or in a vacuum environment.
15. The method according to claim 12, wherein the depositing comprises depositing a polymer material and setting the material in a humid environment.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A fuel cartridge for a hydrogen generating system, said cartridge comprising:
a housing comprising an end cap and containing a substantially anhydrous hydride reactant and an activating agent comprising a salt having a metal selected from the group consisting of alkaline earth metals and alkali metals;
at least one liquid conduit fixed to the end cap and extending into the anhydrous hydride reactant, the liquid conduit at least one liquid distribution aperture formed thereon, such that liquid reactant may pass in liquid form into the hydride reactant;
wherein the end cap comprises a liquid inlet port communicating with the liquid conduit and a gas outlet port, both the liquid inlet port and the gas outlet port being adapted to seal with a housing receiver.
2. The fuel cartridge according to claim 1, wherein the hydride reactant comprises about 20 percent by weight to about 65 percent by a weight of activating agent.
3. The fuel cartridge according to claim 1, wherein the activating agent is water soluble.
4. The fuel cartridge according to claim 1, wherein the activating agent comprises at least one material selected from the group consisting of BeF2, BeCl2, BcBr2, Bel2, MgF2, MgBr2, MgCl2, Mgl2, CaF2, CaCl2, CaBr2, Cal2, LiF, LiCl, LiBr, Lil, NaF, NaCl, NaBr, Nal, KF, KCl, KBr, Kl, Li2S, and Li2Se.
5. The fuel cartridge according to claim 1, wherein the hydride is enclosed in a fabric pouch having a substantially greater area than thickness, the fabric pouch configured to be inserted into the housing.
6. The fuel cartridge according to claim 1, further comprising a plurality of liquid conduits, wherein the plurality of liquid conduits are spaced radially from a center point of the end cap in a nonuniform configuration.
7. The fuel cartridge according to claim 1, wherein the anhydrous hydride reactant comprises an anhydrous hydride and the liquid reactant comprises a mixture of water and anhydrous activating agent.
8. The fuel cartridge of claim 1, wherein the anhydrous hydride reactant is selected from a group consisting of sodium borohydride, lithium borohydride, lithium aluminum hydride, lithium hydride, sodium hydride, and calcium hydride.
9. An apparatus for hydrogen generation, the apparatus comprising:
a housing configured to contain a mixture of anhydrous hydride reactant and an activating agent comprising a salt having a metal selected from the group consisting of alkaline earth metal and alkali metals;
at least one liquid conduit extending into the container configured to pass a liquid into the mixture; and
wherein the housing further comprises a liquid inlet port and a gas outlet port.
10. The apparatus of claim 9, wherein the hydride reactant comprises sodium borohydride.
11. The apparatus of claim 9, wherein the mixture comprises in the range of between about 20 percent by weight to about 65 percent by weight of the activating agent.
12. The apparatus of claim 9, wherein the activating agent comprises at least one material selected from the group consisting of BeF2, BeCl2, BeBr2, Bel2, MgF2, MgBr2, MgCl2, Mgl2, CaF2, CaCl2, CaBr2, Cal2, LiF, LiCl, LiBr, Lil, NaF, NaCl, NaBr, Nal, KF, KCl, KBr, KL, Li2S, and Li2Se.
13. The apparatus of claim 9, further comprising a plurality of liquid conduits, wherein the plurality of liquid conduits are spaced radially from a center point of an end of the housing in a nonuniform configuration.
14. The apparatus of claim 9, further comprising a fabric pouch having a substantially greater area than thickness configured to contain a portion of the mixture and promote a complete reaction of the mixture, the fabric pouch disposed with in the housing.
15. The apparatus of claim 1, wherein the liquid reactant has a lower freezing point temperature than water.
16. The apparatus of claim 15, wherein the liquid reactant comprises a freezing point lowering additive.
17. The apparatus of claim 16, wherein the freezing point lowering additive comprises an alcohol.