What is claimed is:
1. A photomask having an isolated residual pattern formed thereonto, and a translucent film formed on both sides of said isolated independent pattern, with a space pattern part therebetween.
2. A photomask according to claim 1, wherein the line width of said space pattern part is approximately equal to the line width of said isolated residual pattern.
3. A photomask according to claim 1, wherein the transmissivity of said translucent film is in the range from 10% to 60%.
4. A photomask according to claim 1, wherein said translucent film does not cause phase inversion.
5. A photomask according to claim 1, wherein the width of said translucent film is at least equal to the width of said isolated residual film.
6. A method of manufacturing a photomask, comprising:
a step of forming an isolated residual pattern onto a photomask, and
a step of placing a translucent film on both sides of said isolated residual pattern with a space pattern part therebetween, said space pattern part having a width that is approximately the same as the line width of said isolated residual pattern, and said translucent film not causing phase inversion, so as to reduce variation in light intensity caused by defocusing.
7. A method of manufacturing a photomask according to claim 6, wherein the transmissivity of said translucent film is in the range from 10% to 60%.
The claims below are in addition to those above.
All refrences to claim(s) which appear below refer to the numbering after this setence.
1. A computer-based method for controlling a vapor generator, comprising:
(a) receiving vapor generator control parameters;
(b) directing the operation of a vapor generator for a fixed period, wherein the generator is controlled by the received control parameters;
(c) storing the control parameters and operational data of the vapor generator as a control profile for the vapor generator;
(d) repeating steps (b)\u2013(c) for a predetermined number of iterations;
(e) selecting a stored control profile; and
(f) automatically controlling the operation of the vapor generator with the data of the selected control profile.
2. The method according to claim 1, wherein the control parameters are received by means of a user interface.
3. The method according to claim 1, wherein the control parameters include power range, power supply voltage, heater off time, heater delay time, start resistance value, resistance increment value, maximum power value, liquid material formulation, and pump flow rate.
4. The method according to claim 1, wherein the predetermined number of iterations is 3.
5. The method according to claim 1, wherein the operational data of the vapor generator includes the power level used to energize the vapor generator to achieve a targeted resistance value.
6. The method according to claim 1, wherein the stored control profiles can be either desirable or undesirable profiles for controlling the operation of the vapor generator.
7. The method according to claim 1, wherein automatically controlling the operation of the vapor generator includes automatically providing power to one or more heaters and initiating fluid delivery to the one or more heaters.
8. The method according to claim 7, wherein power can be shut off to the one or more heaters and fluid delivery can be stopped upon occurrence of a predetermined event.
9. The method according to claim 8, where the predetermined event can include one or more of: over resistance, over pressure, under energy, or over power.
10. The method according to claim 8, wherein an event log entry is created upon occurrence of the predetermined event.
11. The method according to claim 1, wherein step (b) includes pumping a liquid through a capillary sized flow passage and heating the flow passage such that the liquid forms a vapor which exits the flow passage and forms an aerosol in ambient air.
12. A computer-based method for controlling a vapor generator, comprising:
selecting a profile for the operation of a vapor generator; and
automatically directing the operation of the vapor generator based on the data of the selected profile, wherein the data of the selected profile includes:
a voltage of a power supply of the vapor generator for directing power to a heater of the vapor generator;
a power range for energizing the heater; and
a target resistance for the heater.
13. The method according to claim 12, including automatically determining a minimal level of power sufficient to continuously measure resistance and energy without heating the heater.
14. The method according to claim 12, wherein the heater comprises a plurality of heaters.
15. The method according to claim 12, wherein the automatically directing includes pumping a liquid through a capillary sized flow passage and heating the flow passage such that the liquid forms a vapor which exits the flow passage and forms an aerosol in ambient air.
16. A computer-based method for controlling a vapor generator, comprising:
calibrating the operation of a vapor generator with at least two precision resistances, wherein the power level required to energize at least one heater across each of the at least two resistances is recorded upon operation of the vapor generator for a fixed period of time;
calculating a function based on the at least two precision resistances and the corresponding at least two recorded power levels;
calculating the slope of the function as a first correction coefficient;
calculating the intercept of the function on a y axis as a second correction coefficient; and
automatically applying the first and second correction coefficients to software of a controller for directing the operation of the at least one heater of the vapor generator.
17. The method according to claim 16, wherein the first and second correction coefficients correct for variances in resistance within the vapor generator.
18. The method according to claim 16, wherein the first and second correction coefficients correct for variances in energy being sent to the heater of the vapor generator.
19. The method according to claim 16, wherein the software controls pumping a liquid through a capillary sized flow passage and controls the heater to heat the flow passage such that the liquid forms a vapor which exits the flow passage and forms an aerosol in ambient air.
20. The method according to claim 16, including calculating a polynomial function, based on at least three precision resistances and a corresponding at least three recorded energy levels, to compensate for non-linear behavior of the vapor generator.
21. The computer-based method according to claim 16, wherein the method includes:
calibrating the operation of a vapor generator with at least three precision resistances, wherein the power level required to energize at least one heater across each of the at least three resistances is recorded upon operation of the vapor generator for a fixed period of time;
calculating a linear function based on the at least three precision resistances and the corresponding at least three recorded power levels;
calculating the slope of the linear function as a first correction coefficient;
calculating the intercept of the linear function on a y axis as a second correction coefficient; and
automatically applying the first and second correction coefficients to software of a controller for directing the operation of the at least one heater of the vapor generator.
22. A computer-based system for controlling a vapor generator, comprising:
a controller configured to direct operation of a vapor generator;
a user interface configured to receive control parameters for controlling the operation of the controller, including selection of a vapor generator profile;
at least one heater powered by an energy source according to the selected vapor generator profile; and
at least one pump directing a fluid material through the at least one heater, wherein the at least one heater is energized by the energy source such that the fluid material is vaporized by the heater.
23. The system according to claim 22, wherein the controller is configured to meet a plurality of resistance targets during a vapor generation run.
24. The system according to claim 22, wherein the at least one heater includes a capillary sized flow passage through which the fluid is pumped by the at least one pump, the flow passage having an outlet through which the vaporized fluid is ejected into ambient air so as to form an aerosol.
25. A computer-based system for controlling a vapor generator, comprising:
a user interface module configured to receive control parameters for controlling the operation of the vapor generator;
a profile module configured to automatically create one or more profiles for controlling the operation of the vapor generator based on the received control parameters, wherein the user interface module is further configured to select one or more of the created profiles; and
a heater module configured to energize one or more heaters and to provide for fluid delivery to the one or more heaters based on one or more user-selected profiles.
26. The system according to claim 25, wherein each of the one or more heaters includes a capillary sized flow passage through which the fluid is pumped by a pump, the flow passage having an outlet through which vaporized fluid is ejected into ambient air so as to form an aerosol.
27. A vapor generator control system, comprising a computer system, said computer system including at least one of a software program for controlling a vapor generator, a user interface, a memory, and a profile module configured to receive user-specified control parameters and to create one or more profiles for controlling the operation of a vapor generator.
28. The system according to claim 27, wherein the vapor generator is an aerosol generator which generates timed delivery of an aerosol.
29. A system for controlling a vapor generator, comprising:
means for receiving control parameters;
means for creating one or more profiles for controlling a vapor generator;
means for energizing one or more heaters according to the one or more profiles; and
means for vaporizing a liquid material directed through the one or more heaters.
30. The system according to claim 29, wherein each of the one or more heaters includes a capillary sized flow passage through which the liquid is pumped by a pump, the flow passage having an outlet through which the vaporized liquid is ejected into ambient air so as to form an aerosol.
31. A computer-readable medium encoded with software for controlling the operation of a vapor generator, wherein the software is provided for:
receiving vapor generator control parameters;
directing the operation of a vapor generator for a fixed period, wherein the generator is controlled by the received control parameters;
storing the control parameters and operational data of the vapor generator as a control profile for the vapor generator;
selecting a stored control profile; and
automatically controlling the operation of the vapor generator with the data of the selected control profile.
32. The computer-readable medium according to claim 31, wherein the vapor generator is an aerosol generator and the software directs intermittent or continuous operation of the aerosol generator.
33. A computer program, which, when executed by a computer, implements a vapor generator controller by performing the steps of:
calibrating the operation of a vapor generator with at least two precision resistances, wherein the power level required to energize at least one heater across each of the at least two resistances is recorded upon operation of the vapor generator for a fixed period of time;
calculating a function based on the at least two precision resistances and the corresponding at least two recorded power levels;
calculating the slope of the function as a first correction coefficient;
calculating the intercept of the function on a y axis as a second correction coefficient; and
automatically applying the first and second correction coefficients to software of a controller for directing the operation of the at least one heater of the vapor generator.
34. The computer program according to claim 33, wherein the vapor generator is an aerosol generator and the software directs intermittent or continuous operation of the aerosol generator.
35. The method according to claim 33, including calculating a polynomial function, based on at least three precision resistances and a corresponding at least three recorded energy levels, to compensate for non-linear behavior of the vapor generator.
36. The computer program according to claim 33, wherein the computer program implements the vapor generator controller by further performing the steps of:
calibrating the operation of a vapor generator with at least three precision resistances, wherein the power level required to energize at least one heater across each of the at least three resistances is recorded upon operation of the vapor generator for a fixed period of time;
calculating a linear function based on the at least three precision resistances and the corresponding at least three recorded power levels;
calculating the slope of the linear function as a first correction coefficient;
calculating the intercept of the linear function on a y axis as a second correction coefficient; and
automatically applying the first and second correction coefficients to software of a controller for directing the operation of the at least one heater of the vapor generator.